2025-03-21

Advances in SiC-Coated Graphite Susceptors for Semiconductor Applications

SiC-coated graphite susceptors offer superior corrosion resistance, durability, and efficiency in semiconductor manufacturing, even in harsh NH3 and Cl2 environments.

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With R & D capabilities from key materials to end application products, the core and key technologies of independent intellectual property rights have achieved a number of scientific and technological innovations.

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Day: 21 March, 2025

Advances in SiC-Coated Graphite Susceptors for Semiconductor Applications

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