{"id":617,"date":"2024-11-27T09:25:43","date_gmt":"2024-11-27T01:25:43","guid":{"rendered":"http:\/\/weitai1.globaldeepsea.site\/plasma-etching-disk-production\/"},"modified":"2024-11-27T09:25:43","modified_gmt":"2024-11-27T01:25:43","slug":"%d8%a5%d9%86%d8%aa%d8%a7%d8%ac-%d8%a3%d9%82%d8%b1%d8%a7%d8%b5-%d8%a7%d9%84%d8%b5%d9%82%d8%b1","status":"publish","type":"post","link":"https:\/\/www.cnvetenergy.com\/ar\/%d8%a5%d9%86%d8%aa%d8%a7%d8%ac-%d8%a3%d9%82%d8%b1%d8%a7%d8%b5-%d8%a7%d9%84%d8%b5%d9%82%d8%b1\/","title":{"rendered":"How Plasma Etching Shapes Disk Production"},"content":{"rendered":"<p><\/p>\n<figure data-line=\"2\"><img decoding=\"async\" src=\"https:\/\/statics.mylandingpages.co\/static\/aaanxdmf26c522mp\/image\/309f38969f894792bafdd79a55928566.webp\" alt=\"How Plasma Etching Shapes Disk Production\" class=\"md-zoom\"><\/figure>\n<p><\/p>\n<p data-line=\"4\">\u062a\u062d\u062f\u062b \u062a\u0642\u0646\u064a\u0629 \u0627\u0644\u0642\u0631\u0635 \u0627\u0644\u062a\u064a \u062a\u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0645\u0646 \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635 \u0645\u0646 \u062e\u0644\u0627\u0644 \u062a\u0645\u0643\u064a\u0646 \u0625\u0646\u0634\u0627\u0621 \u0647\u064a\u0627\u0643\u0644 \u0645\u0639\u0642\u062f\u0629 \u0628\u062f\u0642\u0629 \u0644\u0627 \u0645\u062b\u064a\u0644 \u0644\u0647\u0627. \u062a\u0633\u062a\u062e\u062f\u0645 \u0647\u0630\u0647 \u0627\u0644\u0639\u0645\u0644\u064a\u0629 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0644\u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0645\u0648\u0627\u062f \u0645\u0646 \u0631\u0643\u0627\u0626\u0632 \u060c \u0645\u0645\u0627 \u064a\u0633\u0645\u062d \u0644\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u0628\u062a\u062d\u0642\u064a\u0642 \u0627\u0644\u062a\u0641\u0627\u0635\u064a\u0644 \u0627\u0644\u062f\u0642\u064a\u0642\u0629 \u0627\u0644\u0645\u0637\u0644\u0648\u0628\u0629 \u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 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\u0648\u0627\u0644\u062f\u0642\u0629 \u060c \u062a\u0645\u0643\u0646 \u0627\u0644\u0635\u0646\u0627\u0639\u0627\u062a \u0645\u0646 \u062a\u0644\u0628\u064a\u0629 \u0627\u0644\u0637\u0644\u0628 \u0627\u0644\u0645\u062a\u0632\u0627\u064a\u062f \u0639\u0644\u0649 \u0645\u0646\u062a\u062c\u0627\u062a \u0627\u0644\u0642\u0631\u0635 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0648\u0627\u0644\u0641\u0639\u0627\u0644\u0629.<\/p>\n<p><\/p>\n<h2 data-line=\"6\" id=\"Key Takeaways\">\u0627\u0644\u0645\u062f\u0627\u062e\u0644 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/h2>\n<p><\/p>\n<ul data-line=\"8\"><\/p>\n<li data-line=\"8\">\u064a\u0639\u062f \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0636\u0631\u0648\u0631\u064a\u064b\u0627 \u0644\u0625\u0646\u0634\u0627\u0621 \u0647\u064a\u0627\u0643\u0644 \u0642\u0631\u0635 \u0645\u0639\u0642\u062f\u0629 \u0628\u062f\u0642\u0629 \u0639\u0627\u0644\u064a\u0629 \u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647\u0627 \u062d\u062c\u0631 \u0627\u0644\u0632\u0627\u0648\u064a\u0629 \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635 \u0627\u0644\u062d\u062f\u064a\u062b.<\/li>\n<p><\/p>\n<li data-line=\"9\">\u062a\u0633\u062a\u062e\u062f\u0645 \u0627\u0644\u0639\u0645\u0644\u064a\u0629 \u0627\u0644\u063a\u0627\u0632 \u0627\u0644\u0645\u0624\u064a\u0646 \u0644\u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0645\u0648\u0627\u062f \u060c \u0645\u0645\u0627 \u064a\u0633\u0645\u062d \u0628\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0645\u064a\u0632\u0627\u062a \u0627\u0644\u0645\u062c\u0647\u0631\u064a\u0629 \u0627\u0644\u062a\u064a \u062a\u0644\u0628\u064a \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629.<\/li>\n<p><\/p>\n<li data-line=\"10\">\u062a\u0642\u062f\u0645 \u0643\u0644 \u0645\u0646\u0647\u0627 \u062a\u0642\u0646\u064a\u0627\u062a \u0645\u062b\u0644 \u0639\u0645\u0644\u064a\u0629 Bosch \u0648 RIE \u0648 ICP-RIE \u0645\u0632\u0627\u064a\u0627 \u0641\u0631\u064a\u062f\u0629 \u060c \u0645\u0645\u0627 \u064a\u062a\u064a\u062d \u0644\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u062a\u0643\u064a\u064a\u0641 \u0646\u0647\u062c\u0647\u0645 \u0628\u0646\u0627\u0621\u064b \u0639\u0644\u0649 \u0627\u062d\u062a\u064a\u0627\u062c\u0627\u062a \u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0645\u062d\u062f\u062f\u0629.<\/li>\n<p><\/p>\n<li data-line=\"11\">\u062a\u0628\u0631\u0632 ICP-Rie \u0644\u0642\u062f\u0631\u062a\u0647\u0627 \u0639\u0644\u0649 \u062a\u062d\u0642\u064a\u0642 \u0645\u0639\u062f\u0644\u0627\u062a \u062d\u0641\u0631 \u0623\u0633\u0631\u0639 \u0648\u062f\u0642\u0629 \u0641\u0627\u0626\u0642\u0629 \u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647\u0627 \u0645\u062b\u0627\u0644\u064a\u0629 \u0644\u0644\u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0627\u0644\u0645\u0639\u0642\u062f\u0629 \u0648\u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0639\u0627\u0644\u064a \u0627\u0644\u062d\u062c\u0645.<\/li>\n<p><\/p>\n<li data-line=\"12\">\u064a\u062a\u0636\u0645\u0646 \u0627\u062e\u062a\u064a\u0627\u0631 \u062a\u0642\u0646\u064a\u0629 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0627\u0644\u0645\u0646\u0627\u0633\u0628\u0629 \u0645\u0648\u0627\u0632\u0646\u0629 \u0639\u0648\u0627\u0645\u0644 \u0645\u062b\u0644 \u062a\u0639\u0642\u064a\u062f \u0627\u0644\u062a\u0635\u0645\u064a\u0645 \u0648\u062a\u0643\u0648\u064a\u0646 \u0627\u0644\u0645\u0648\u0627\u062f \u0648\u062d\u062c\u0645 \u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0648\u0627\u0644\u062a\u0643\u0644\u0641\u0629.<\/li>\n<p><\/p>\n<li data-line=\"13\">\u062a\u062a\u0642\u0646 \u062a\u0642\u0646\u064a\u0627\u062a \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u062a\u0645\u0643\u0646 \u0627\u0644\u0634\u0631\u0643\u0627\u062a \u0627\u0644\u0645\u0635\u0646\u0639\u0629 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\u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u062d\u062c\u0631 \u0627\u0644\u0632\u0627\u0648\u064a\u0629 \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0623\u0642\u0631\u0627\u0635 \u0627\u0644\u062d\u062f\u064a\u062b\u0629. \u0645\u0646 \u062e\u0644\u0627\u0644 \u0627\u0644\u0627\u0633\u062a\u0641\u0627\u062f\u0629 \u0645\u0646 \u0627\u0644\u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u060c \u064a\u0645\u0643\u0646 \u0644\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u062a\u062d\u0642\u064a\u0642 \u0627\u0644\u062f\u0642\u0629 \u0648\u0627\u0644\u062a\u0639\u0642\u064a\u062f \u0627\u0644\u0645\u0637\u0644\u0648\u0628 \u0644\u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u0642\u0631\u0635 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0623\u062f\u0627\u0621 \u0627\u0644\u064a\u0648\u0645. \u064a\u062a\u062d\u0648\u0644 \u0647\u0630\u0627 \u0627\u0644\u0642\u0633\u0645 \u0625\u0644\u0649 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data-line=\"27\">\u064a\u0634\u064a\u0631 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0625\u0644\u0649 \u0639\u0645\u0644\u064a\u0629 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u062c\u0627\u0641\u0629 \u0627\u0644\u062a\u064a \u062a\u0633\u062a\u062e\u062f\u0645 \u0627\u0644\u063a\u0627\u0632 \u0627\u0644\u0645\u0624\u064a\u0646 \u060c \u0623\u0648 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u060c \u0644\u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0645\u0648\u0627\u062f \u0645\u0646 \u0627\u0644\u0631\u0643\u064a\u0632\u0629. \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635 \u060c \u062a\u062a\u064a\u062d \u0647\u0630\u0647 \u0627\u0644\u0637\u0631\u064a\u0642\u0629 \u0625\u0646\u0634\u0627\u0621 \u0623\u0646\u0645\u0627\u0637 \u0648\u0647\u064a\u0627\u0643\u0644 \u0645\u0639\u0642\u062f\u0629 \u0628\u062f\u0642\u0629 \u0627\u0633\u062a\u062b\u0646\u0627\u0626\u064a\u0629. \u062a\u0639\u062a\u0645\u062f \u0627\u0644\u0639\u0645\u0644\u064a\u0629 \u0639\u0644\u0649 \u0627\u0644\u062a\u0641\u0627\u0639\u0644 \u0628\u064a\u0646 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0648\u0633\u0637\u062d \u0627\u0644\u0645\u0627\u062f\u0629 \u060c \u062d\u064a\u062b \u062a\u0646\u0647\u0627\u0631 \u0623\u064a\u0648\u0646\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 \u0648\u0627\u0644\u0623\u0646\u0648\u0627\u0639 \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u064a\u0629 \u0648\u062a\u0632\u064a\u0644 \u0627\u0644\u0637\u0628\u0642\u0627\u062a \u063a\u064a\u0631 \u0627\u0644\u0645\u0631\u063a\u0648\u0628 \u0641\u064a\u0647\u0627. \u0647\u0630\u0647 \u0627\u0644\u062f\u0642\u0629 \u062a\u062c\u0639\u0644 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0644\u0627 \u063a\u0646\u0649 \u0639\u0646\u0647 \u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0645\u064a\u0632\u0627\u062a \u0627\u0644\u0645\u062c\u0647\u0631\u064a\u0629 \u0627\u0644\u0645\u0637\u0644\u0648\u0628\u0629 \u0641\u064a \u0627\u0644\u0623\u0642\u0631\u0627\u0635 \u0627\u0644\u062d\u062f\u064a\u062b\u0629.<\/p>\n<p><\/p>\n<p data-line=\"29\">\u062a\u062f\u0648\u0631 \u0645\u0628\u0627\u062f\u0626 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u062d\u0648\u0644 \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u0627\u062a \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a\u0629 \u0627\u0644\u062a\u064a \u062a\u0633\u064a\u0637\u0631 \u0639\u0644\u064a\u0647\u0627. \u0645\u0646 \u062e\u0644\u0627\u0644 \u0636\u0628\u0637 \u0627\u0644\u0645\u0639\u0644\u0645\u0627\u062a \u0645\u062b\u0644 \u062a\u0643\u0648\u064a\u0646 \u0627\u0644\u063a\u0627\u0632 \u0648\u0627\u0644\u0636\u063a\u0637 \u0648\u0627\u0644\u0637\u0627\u0642\u0629 \u060c \u064a\u0645\u0643\u0646 \u0644\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u062a\u0635\u0645\u064a\u0645 \u0639\u0645\u0644\u064a\u0629 \u0627\u0644\u062d\u0641\u0631 \u0644\u062a\u0644\u0628\u064a\u0629 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0645\u062d\u062f\u062f\u0629. \u062a\u0636\u0645\u0646 \u0647\u0630\u0647 \u0627\u0644\u0642\u062f\u0631\u0629 \u0639\u0644\u0649 \u0627\u0644\u062a\u0643\u064a\u0641 \u0623\u0646 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u064a\u0638\u0644 \u0623\u062f\u0627\u0629 \u0645\u062a\u0639\u062f\u062f\u0629 \u0627\u0644\u0627\u0633\u062a\u062e\u062f\u0627\u0645\u0627\u062a \u0644\u0625\u0646\u0634\u0627\u0621 \u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0645\u0639\u0642\u062f\u0629 \u0639\u0644\u0649 \u0631\u0643\u0627\u0626\u0632 \u0627\u0644\u0642\u0631\u0635.<\/p>\n<p><\/p>\n<h4 data-line=\"31\" id=\"Key components and their roles in the plasma etching process.\">\u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0648\u0623\u062f\u0648\u0627\u0631\u0647\u0627 \u0641\u064a \u0639\u0645\u0644\u064a\u0629 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627.<\/h4>\n<p><\/p>\n<p data-line=\"33\">\u0627\u0644\u0639\u062f\u064a\u062f \u0645\u0646 \u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u062d\u0631\u062c\u0629 \u062a\u062f\u0641\u0639 \u0639\u0645\u0644\u064a\u0629 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627. \u0627\u0644 <strong>\u063a\u0631\u0641\u0629 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627<\/strong> \u0628\u0645\u062b\u0627\u0628\u0629 \u0627\u0644\u0628\u064a\u0626\u0629 \u0627\u0644\u062a\u064a \u064a\u062d\u062f\u062b \u0641\u064a\u0647\u0627 \u0627\u0644\u062d\u0641\u0631 \u060c \u0645\u0639 \u0627\u0644\u062d\u0641\u0627\u0638 \u0639\u0644\u0649 \u0627\u0644\u0638\u0631\u0648\u0641 \u0627\u0644\u0644\u0627\u0632\u0645\u0629 \u0644\u062a\u0648\u0644\u064a\u062f \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627. \u062f\u0627\u062e\u0644 \u0627\u0644\u063a\u0631\u0641\u0629 \u060c \u064a\u062a\u0645 \u062a\u0642\u062f\u064a\u0645 \u063a\u0627\u0632\u0627\u062a \u0645\u062b\u0644 \u0627\u0644\u0641\u0644\u0648\u0631 \u0623\u0648 \u0627\u0644\u0643\u0644\u0648\u0631 \u0648\u062a\u0623\u064a\u0646\u0647\u0627 \u0644\u062a\u0634\u0643\u064a\u0644 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627. \u0627\u0644 <strong>\u0645\u0635\u062f\u0631 \u062a\u0648\u0627\u062a\u0631 \u0627\u0644\u0631\u0627\u062f\u064a\u0648 (RF)<\/strong> \u064a\u0646\u0634\u0637 \u062c\u0632\u064a\u0626\u0627\u062a \u0627\u0644\u063a\u0627\u0632 \u060c \u0645\u0645\u0627 \u064a\u062e\u0644\u0642 \u0623\u064a\u0648\u0646\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0644\u0627\u0632\u0645\u0629 \u0644\u0644\u062d\u0641\u0631.<\/p>\n<p><\/p>\n<p data-line=\"35\">The <strong>\u062d\u0627\u0645\u0644 \u0627\u0644\u0631\u0643\u064a\u0632\u0629<\/strong>\u0623\u0648 \u062a\u0634\u0627\u0643 \u060c \u064a\u0624\u0645\u0646 \u0645\u0627\u062f\u0629 \u0627\u0644\u0642\u0631\u0635 \u0623\u062b\u0646\u0627\u0621 \u0627\u0644\u0639\u0645\u0644\u064a\u0629. \u063a\u0627\u0644\u0628\u064b\u0627 \u0645\u0627 \u064a\u0634\u0645\u0644 \u0645\u064a\u0632\u0627\u062a \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0644\u0645\u0646\u0639 \u0627\u0631\u062a\u0641\u0627\u0639 \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u060c \u0645\u0645\u0627 \u0642\u062f \u064a\u0624\u062f\u064a \u0625\u0644\u0649 \u062a\u0644\u0641 \u0627\u0644\u0631\u0643\u064a\u0632\u0629. \u0628\u0627\u0644\u0625\u0636\u0627\u0641\u0629 \u0625\u0644\u0649 \u0630\u0644\u0643 \u060c \u0648 <strong>\u0646\u0638\u0627\u0645 \u0641\u0631\u0627\u063a<\/strong> \u064a\u0636\u0645\u0646 \u062c\u0648 \u062e\u0627\u0636\u0639 \u0644\u0644\u0631\u0642\u0627\u0628\u0629 \u0639\u0646 \u0637\u0631\u064a\u0642 \u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0634\u0648\u0627\u0626\u0628 \u0648\u0627\u0644\u062d\u0641\u0627\u0638 \u0639\u0644\u0649 \u0636\u063a\u0637 \u0645\u0646\u062e\u0641\u0636. \u064a\u0644\u0639\u0628 \u0643\u0644 \u0645\u0643\u0648\u0646 \u062f\u0648\u0631\u064b\u0627 \u062d\u064a\u0648\u064a\u064b\u0627 \u0641\u064a \u062a\u062d\u0642\u064a\u0642 \u0627\u0644\u062f\u0642\u0629 \u0648\u0627\u0644\u0643\u0641\u0627\u0621\u0629 \u0627\u0644\u062a\u064a \u064a\u062a\u0637\u0644\u0628\u0647\u0627 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627.<\/p>\n<p><\/p>\n<h3 data-line=\"37\" id=\"How Plasma Etching Works\">\u0643\u064a\u0641 \u064a\u0639\u0645\u0644 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627<\/h3>\n<p><\/p>\n<h4 data-line=\"39\" id=\"The role of plasma discharges in material removal.\">\u062f\u0648\u0631 \u062a\u0635\u0631\u064a\u0641 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0641\u064a \u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0645\u0648\u0627\u062f.<\/h4>\n<p><\/p>\n<p data-line=\"41\">\u062a\u0635\u0631\u064a\u0641 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u062a\u0642\u0639 \u0641\u064a \u0642\u0644\u0628 \u0639\u0645\u0644\u064a\u0629 \u0627\u0644\u062d\u0641\u0631. \u0639\u0646\u062f\u0645\u0627 \u062a\u062a\u0623\u064a\u0646 \u0627\u0644\u063a\u0627\u0632\u0627\u062a \u062f\u0627\u062e\u0644 \u063a\u0631\u0641\u0629 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u060c \u0641\u0625\u0646\u0647\u0627 \u062a\u0634\u0643\u0644 \u0645\u0632\u064a\u062c\u064b\u0627 \u0645\u0646 \u0627\u0644\u0623\u064a\u0648\u0646\u0627\u062a \u0648\u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u0627\u062a \u0648\u0627\u0644\u062c\u0632\u064a\u0626\u0627\u062a \u0627\u0644\u0645\u062d\u0627\u064a\u062f\u0629. \u0647\u0630\u0647 \u0627\u0644\u062c\u0632\u064a\u0626\u0627\u062a \u0627\u0644\u0645\u0634\u062d\u0648\u0646\u0629 \u062a\u0642\u0635\u0641 \u0633\u0637\u062d \u0627\u0644\u0631\u0643\u064a\u0632\u0629 \u060c \u0648\u0643\u0633\u0631 \u0627\u0644\u0631\u0648\u0627\u0628\u0637 \u0627\u0644\u062c\u0632\u064a\u0626\u064a\u0629 \u0648\u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0645\u0627\u062f\u064a\u0629 \u062d\u0633\u0628 \u0627\u0644\u0637\u0628\u0642\u0629. \u062a\u062a\u064a\u062d \u0647\u0630\u0647 \u0627\u0644\u0622\u0644\u064a\u0629 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0644\u062a\u062d\u0642\u064a\u0642 \u062f\u0642\u0629 \u0644\u0627 \u0645\u062b\u064a\u0644 \u0644\u0647\u0627 \u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647\u0627 \u0645\u062b\u0627\u0644\u064a\u0629 \u0644\u0635\u064a\u0627\u063a\u0629 \u0627\u0644\u0645\u064a\u0632\u0627\u062a \u0627\u0644\u0645\u0639\u0642\u062f\u0629 \u0627\u0644\u0645\u0648\u062c\u0648\u062f\u0629 \u0641\u064a \u062a\u0642\u0646\u064a\u0629 \u0627\u0644\u0642\u0631\u0635.<\/p>\n<p><\/p>\n<p data-line=\"43\">\u062a\u062d\u062f\u062f \u0637\u0627\u0642\u0629 \u062a\u0635\u0631\u064a\u0641 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0645\u0639\u062f\u0644 \u0627\u0644\u062d\u0641\u0631 \u0648\u0627\u0644\u0639\u0645\u0642. \u062a\u062a\u064a\u062d \u0623\u064a\u0648\u0646\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0623\u0639\u0645\u0642 \u060c \u0641\u064a \u062d\u064a\u0646 \u0623\u0646 \u0645\u0633\u062a\u0648\u064a\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0645\u0646\u062e\u0641\u0636\u0629 \u062a\u0633\u0645\u062d \u0628\u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0623\u0643\u062b\u0631 \u062d\u0633\u0627\u0633\u064a\u0629. \u062a\u0636\u0645\u0646 \u0647\u0630\u0647 \u0627\u0644\u0645\u0631\u0648\u0646\u0629 \u0623\u0646 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u064a\u0645\u0643\u0646 \u0623\u0646 \u062a\u0644\u0628\u064a \u0627\u0644\u0627\u062d\u062a\u064a\u0627\u062c\u0627\u062a \u0627\u0644\u0645\u062a\u0646\u0648\u0639\u0629 \u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635 \u060c \u0645\u0646 \u0625\u0646\u0634\u0627\u0621 \u0623\u0646\u0645\u0627\u0637 \u0636\u062d\u0644\u0629 \u0625\u0644\u0649 \u062a\u0634\u0643\u064a\u0644 \u0647\u064a\u0627\u0643\u0644 \u0639\u0645\u064a\u0642\u0629 \u0648\u0645\u0639\u0642\u062f\u0629.<\/p>\n<p><\/p>\n<h4 data-line=\"45\" id=\"Chemical and physical interactions during the etching process.\">\u0627\u0644\u062a\u0641\u0627\u0639\u0644\u0627\u062a \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a\u0629 \u0623\u062b\u0646\u0627\u0621 \u0639\u0645\u0644\u064a\u0629 \u0627\u0644\u062d\u0641\u0631.<\/h4>\n<p><\/p>\n<p data-line=\"47\">\u064a\u0639\u062a\u0645\u062f \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0639\u0644\u0649 \u0645\u0632\u064a\u062c \u0645\u0646 \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u0627\u062a \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a\u0629 \u0644\u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0645\u0648\u0627\u062f. \u0643\u064a\u0645\u064a\u0627\u0626\u064a\u0627 \u060c \u062a\u062a\u0641\u0627\u0639\u0644 \u0627\u0644\u0623\u0646\u0648\u0627\u0639 \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u064a\u0629 \u0641\u064a \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u060c \u0645\u062b\u0644 \u0627\u0644\u062c\u0630\u0648\u0631 \u060c \u0645\u0639 \u0645\u0627\u062f\u0629 \u0627\u0644\u0631\u0643\u064a\u0632\u0629 \u0644\u062a\u0634\u0643\u064a\u0644 \u0627\u0644\u0645\u0646\u062a\u062c\u0627\u062a \u0627\u0644\u062b\u0627\u0646\u0648\u064a\u0629 \u0627\u0644\u0645\u062a\u0637\u0627\u064a\u0631\u0629. \u062b\u0645 \u064a\u062a\u0645 \u0625\u062e\u0644\u0627\u0621 \u0647\u0630\u0647 \u0627\u0644\u0645\u0646\u062a\u062c\u0627\u062a \u0627\u0644\u062b\u0627\u0646\u0648\u064a\u0629 \u0645\u0646 \u0627\u0644\u063a\u0631\u0641\u0629 \u060c \u062a\u0627\u0631\u0643\u0629 \u0648\u0631\u0627\u0621\u0647\u0627 \u0627\u0644\u0646\u0645\u0637 \u0627\u0644\u0645\u0637\u0644\u0648\u0628. \u062c\u0633\u062f\u064a\u064b\u0627 \u060c \u064a\u0639\u0632\u0632 \u0627\u0644\u0642\u0635\u0641 \u0627\u0644\u0623\u064a\u0648\u0646\u064a \u0639\u0645\u0644\u064a\u0629 \u0627\u0644\u062d\u0641\u0631 \u0639\u0646 \u0637\u0631\u064a\u0642 \u0643\u0633\u0631 \u0627\u0644\u0631\u0648\u0627\u0628\u0637 \u0627\u0644\u062c\u0632\u064a\u0626\u064a\u0629 \u0648\u0632\u064a\u0627\u062f\u0629 \u0645\u0639\u062f\u0644 \u0627\u0644\u062a\u0641\u0627\u0639\u0644.<\/p>\n<p><\/p>\n<p data-line=\"49\">\u064a\u0636\u0645\u0646 \u0647\u0630\u0627 \u0627\u0644\u0646\u0647\u062c \u0627\u0644\u0645\u0632\u062f\u0648\u062c \u0627\u0644\u0639\u0645\u0644 \u0623\u0646 \u064a\u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u064a\u0648\u0641\u0631 \u0627\u0644\u062f\u0642\u0629 \u0648\u0627\u0644\u0643\u0641\u0627\u0621\u0629. \u062a\u0648\u0641\u0631 \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u0627\u062a \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a\u0629 \u0627\u0644\u0627\u0646\u062a\u0642\u0627\u0626\u064a\u0629 \u060c \u0645\u0645\u0627 \u064a\u0633\u0645\u062d \u0644\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u0628\u0627\u0633\u062a\u0647\u062f\u0627\u0641 \u0645\u0648\u0627\u062f \u0645\u0639\u064a\u0646\u0629 \u060c \u0641\u064a \u062d\u064a\u0646 \u0623\u0646 \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u0627\u062a \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a\u0629 \u062a\u0639\u0632\u0632 \u0627\u0644\u0641\u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0643\u0644\u064a\u0629 \u0644\u0644\u0639\u0645\u0644\u064a\u0629. \u0645\u0639\u0627 \u060c \u062a\u062c\u0639\u0644 \u0647\u0630\u0647 \u0627\u0644\u0622\u0644\u064a\u0627\u062a \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0623\u062f\u0627\u0629 \u0642\u0648\u064a\u0629 \u0644\u062a\u0634\u0643\u064a\u0644 \u0645\u0633\u062a\u0642\u0628\u0644 \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635.<\/p>\n<p><\/p>\n<h2 data-line=\"51\" id=\"Techniques of Plasma Etching in Disk Production\">\u062a\u0642\u0646\u064a\u0627\u062a \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635<\/h2>\n<p><\/p>\n<figure data-line=\"53\"><img decoding=\"async\" src=\"https:\/\/statics.mylandingpages.co\/static\/aaanxdmf26c522mp\/image\/25e76b118c474f28aa026462a6428fa7.webp\" alt=\"\u062a\u0642\u0646\u064a\u0627\u062a \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635\" class=\"md-zoom\"><\/figure>\n<p><\/p>\n<p data-line=\"57\">\u062a\u0639\u062a\u0645\u062f \u062a\u0642\u0646\u064a\u0629 \u0642\u0631\u0635 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0639\u0644\u0649 \u0627\u0644\u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0644\u062a\u062d\u0642\u064a\u0642 \u0627\u0644\u062f\u0642\u0629 \u0648\u0627\u0644\u062a\u0639\u0642\u064a\u062f \u0627\u0644\u0645\u0637\u0644\u0648\u0628 \u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0642\u0631\u0635 \u0627\u0644\u062d\u062f\u064a\u062b. \u062a\u0642\u062f\u0645 \u0643\u0644 \u0637\u0631\u064a\u0642\u0629 \u0645\u0632\u0627\u064a\u0627 \u0641\u0631\u064a\u062f\u0629 \u060c \u0645\u0645\u0627 \u064a\u062a\u064a\u062d \u0644\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u062a\u0644\u0628\u064a\u0629 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0625\u0646\u062a\u0627\u062c \u0645\u062d\u062f\u062f\u0629. \u064a\u0633\u062a\u0643\u0634\u0641 \u0647\u0630\u0627 \u0627\u0644\u0642\u0633\u0645 \u062b\u0644\u0627\u062b \u062a\u0642\u0646\u064a\u0627\u062a \u0628\u0627\u0631\u0632\u0629: \u0639\u0645\u0644\u064a\u0629 \u0628\u0648\u0634 \u060c \u062d\u0641\u0631 \u0627\u0644\u0623\u064a\u0648\u0646\u0627\u062a \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u064a\u0629 (RIE) \u060c \u0648\u062d\u0641\u0631 \u0623\u064a\u0648\u0646 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0627\u0644\u0645\u062a\u0641\u0627\u0639\u0644 (ICP-RIE).<\/p>\n<p><\/p>\n<h3 data-line=\"59\" id=\"The Bosch Process\">\u0639\u0645\u0644\u064a\u0629 \u0628\u0648\u0634<\/h3>\n<p><\/p>\n<h4 data-line=\"61\" id=\"Overview and applications of the Bosch process in disk manufacturing.\">\u0646\u0638\u0631\u0629 \u0639\u0627\u0645\u0629 \u0648\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0639\u0645\u0644\u064a\u0629 BOSCH \u0641\u064a \u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0642\u0631\u0635.<\/h4>\n<p><\/p>\n<p data-line=\"63\">\u062a\u0628\u0631\u0632 \u0639\u0645\u0644\u064a\u0629 Bosch \u0643\u062a\u0642\u0646\u064a\u0629 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0627\u0644\u0645\u062a\u062e\u0635\u0635\u0629 \u0627\u0644\u0645\u0635\u0645\u0645\u0629 \u0644\u0625\u0646\u0634\u0627\u0621 \u0647\u064a\u0627\u0643\u0644 \u0631\u0627\u062a\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0627\u062d\u062a\u0628\u0627\u0633. \u062a\u062a\u0646\u0627\u0648\u0628 \u0647\u0630\u0647 \u0627\u0644\u0637\u0631\u064a\u0642\u0629 \u0628\u064a\u0646 \u062e\u0637\u0648\u0627\u062a \u0627\u0644\u062d\u0641\u0631 \u0648\u0627\u0644\u062a\u062e\u0645\u064a\u0644 \u060c \u0645\u0645\u0627 \u064a\u0636\u0645\u0646 \u0627\u0644\u062a\u062d\u0643\u0645 \u0627\u0644\u062f\u0642\u064a\u0642 \u0639\u0644\u0649 \u0645\u0644\u0641\u0627\u062a \u0627\u0644\u062a\u0639\u0645\u0651\u0642 \u0648\u0627\u0644\u062c\u062f\u0627\u0631 \u0627\u0644\u062c\u0627\u0646\u0628\u064a. \u0641\u064a \u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0642\u0631\u0635 \u060c \u062a\u062b\u0628\u062a \u0639\u0645\u0644\u064a\u0629 BOSCH \u0644\u0627 \u062a\u0642\u062f\u0631 \u0628\u062b\u0645\u0646 \u0644\u0625\u0646\u062a\u0627\u062c \u0623\u0646\u0645\u0627\u0637 \u0645\u0639\u0642\u062f\u0629 \u0648\u0627\u0644\u0628\u0646\u064a\u0629 \u0627\u0644\u0645\u062c\u0647\u0631\u064a\u0629 \u0627\u0644\u0639\u0645\u064a\u0642\u0629 \u0627\u0644\u0636\u0631\u0648\u0631\u064a\u0629 \u0644\u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u0642\u0631\u0635 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629.<\/p>\n<p><\/p>\n<p data-line=\"65\">\u063a\u0627\u0644\u0628\u064b\u0627 \u0645\u0627 \u064a\u0633\u062a\u062e\u062f\u0645 \u0627\u0644\u0645\u0635\u0646\u0639\u0648\u0646 \u0639\u0645\u0644\u064a\u0629 BOSCH \u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u062a\u064a \u062a\u062a\u0637\u0644\u0628 \u062a\u0641\u0627\u0635\u064a\u0644 \u0627\u0633\u062a\u062b\u0646\u0627\u0626\u064a\u0629 \u0648\u062a\u0648\u062d\u064a\u062f. \u0625\u0646 \u0642\u062f\u0631\u062a\u0647\u0627 \u0639\u0644\u0649 \u0625\u0646\u0634\u0627\u0621 \u062c\u062f\u0631\u0627\u0646 \u062c\u0627\u0646\u0628\u064a\u0629 \u0631\u0623\u0633\u064a\u0629 \u0645\u0639 \u0627\u0644\u062d\u062f \u0627\u0644\u0623\u062f\u0646\u0649 \u0645\u0646 \u0627\u0644\u062a\u0642\u0648\u064a\u0636 \u062a\u062c\u0639\u0644\u0647\u0627 \u0645\u062b\u0627\u0644\u064a\u0629 \u0644\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u062a\u064a \u062a\u062a\u0637\u0644\u0628 \u062f\u0642\u0629 \u0639\u0627\u0644\u064a\u0629. \u0623\u0635\u0628\u062d\u062a \u0647\u0630\u0647 \u0627\u0644\u062a\u0642\u0646\u064a\u0629 \u062d\u062c\u0631 \u0627\u0644\u0632\u0627\u0648\u064a\u0629 \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0623\u062c\u0647\u0632\u0629 \u0623\u0646\u0638\u0645\u0629 \u0643\u0647\u0631\u0648\u062f\u064a\u0629 \u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u0629 (MEMS) \u0648\u0623\u062c\u0647\u0632\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u060c \u0648\u0627\u0644\u062a\u064a \u062a\u0634\u062a\u0631\u0643 \u0641\u064a \u0623\u0648\u062c\u0647 \u0627\u0644\u062a\u0634\u0627\u0628\u0647 \u0645\u0639 \u0639\u0645\u0644\u064a\u0627\u062a \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635.<\/p>\n<p><\/p>\n<h4 data-line=\"67\" id=\"Advantages of the Bosch process for achieving deep and precise etching.\">\u0645\u0632\u0627\u064a\u0627 \u0639\u0645\u0644\u064a\u0629 \u0628\u0648\u0634 \u0644\u062a\u062d\u0642\u064a\u0642 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0639\u0645\u064a\u0642 \u0648\u0627\u0644\u062f\u0642\u064a\u0642.<\/h4>\n<p><\/p>\n<p data-line=\"69\">\u062a\u0642\u062f\u0645 \u0639\u0645\u0644\u064a\u0629 Bosch \u0627\u0644\u0639\u062f\u064a\u062f \u0645\u0646 \u0627\u0644\u0645\u0632\u0627\u064a\u0627 \u0627\u0644\u062a\u064a \u062a\u062c\u0639\u0644\u0647\u0627 \u0644\u0627 \u063a\u0646\u0649 \u0639\u0646\u0647\u0627 \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635. \u064a\u0636\u0645\u0646 \u0646\u0647\u062c\u0647 \u0627\u0644\u0645\u062a\u0646\u0627\u0648\u0628 \u0639\u0644\u0649 \u062a\u0646\u0634\u064a\u0637\u0647 \u0627\u0644\u0633\u064a\u0637\u0631\u0629 \u0627\u0644\u062a\u064a \u0644\u0627 \u0645\u062b\u064a\u0644 \u0644\u0647\u0627 \u0639\u0644\u0649 \u0639\u0645\u0642 \u0627\u0644\u062d\u0641\u0631 \u0648\u0632\u0648\u0627\u064a\u0627 \u0627\u0644\u062c\u062f\u0627\u0631 \u0627\u0644\u062c\u0627\u0646\u0628\u064a. \u062a\u062a\u064a\u062d \u0647\u0630\u0647 \u0627\u0644\u062f\u0642\u0629 \u0644\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u062a\u062d\u0642\u064a\u0642 \u0646\u062a\u0627\u0626\u062c \u0645\u062a\u0633\u0642\u0629 \u060c \u062d\u062a\u0649 \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0644\u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0627\u0644\u0645\u0639\u0642\u062f\u0629.<\/p>\n<p><\/p>\n<p data-line=\"71\">\u062a\u0643\u0645\u0646 \u0641\u0627\u0626\u062f\u0629 \u0631\u0626\u064a\u0633\u064a\u0629 \u0623\u062e\u0631\u0649 \u0641\u064a \u0642\u062f\u0631\u062a\u0647\u0627 \u0639\u0644\u0649 \u0625\u0646\u062a\u0627\u062c \u0647\u064a\u0627\u0643\u0644 \u0646\u0633\u0628\u0629 \u0639\u0627\u0644\u064a\u0629 \u0645\u0646 \u0627\u0644\u0627\u062d\u062a\u0628\u0627\u0633. \u0645\u0646 \u062e\u0644\u0627\u0644 \u0627\u0644\u062d\u0641\u0627\u0638 \u0639\u0644\u0649 \u0627\u0644\u062c\u062f\u0631\u0627\u0646 \u0627\u0644\u062c\u0627\u0646\u0628\u064a\u0629 \u0627\u0644\u0631\u0623\u0633\u064a\u0629 \u0648\u062a\u0642\u0644\u064a\u0644 \u0641\u0642\u062f\u0627\u0646 \u0627\u0644\u0645\u0648\u0627\u062f \u060c \u062a\u062a\u064a\u062d \u0639\u0645\u0644\u064a\u0629 BOSCH \u0625\u0646\u0634\u0627\u0621 \u0645\u064a\u0632\u0627\u062a \u0645\u0639\u0642\u062f\u0629 \u062f\u0648\u0646 \u0627\u0644\u0645\u0633\u0627\u0633 \u0628\u0627\u0644\u0633\u0644\u0627\u0645\u0629 \u0627\u0644\u0647\u064a\u0643\u0644\u064a\u0629. \u0647\u0630\u0647 \u0627\u0644\u0642\u062f\u0631\u0629 \u062a\u0639\u0632\u0632 \u0623\u062f\u0627\u0621 \u0648\u0645\u0648\u062b\u0648\u0642\u064a\u0629 \u0627\u0644\u0623\u0642\u0631\u0627\u0635 \u060c \u0648\u062a\u0644\u0628\u064a\u0629 \u0627\u0644\u0645\u0637\u0627\u0644\u0628 \u0627\u0644\u0635\u0627\u0631\u0645\u0629 \u0644\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0627\u0644\u062d\u062f\u064a\u062b\u0629.<\/p>\n<p><\/p>\n<h3 data-line=\"73\" id=\"Reactive Ion Etching (RIE)\">\u062d\u0641\u0631 \u0627\u0644\u0623\u064a\u0648\u0646\u0627\u062a \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u064a\u0629 (RIE)<\/h3>\n<p><\/p>\n<h4 data-line=\"75\" id=\"How RIE combines chemical and physical etching for disk production.\">\u0643\u064a\u0641 \u064a\u062c\u0645\u0639 RIE \u0628\u064a\u0646 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a \u0648\u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a \u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635.<\/h4>\n<p><\/p>\n<p data-line=\"77\">\u064a\u062c\u0645\u0639 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0623\u064a\u0648\u0646\u064a \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u064a (RIE) \u0628\u064a\u0646 \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u0627\u062a \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u0642\u0635\u0641 \u0627\u0644\u0623\u064a\u0648\u0646\u064a \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a \u0644\u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0645\u0648\u0627\u062f \u0645\u0646 \u0627\u0644\u0631\u0643\u0627\u0626\u0632. \u064a\u062a\u064a\u062d \u0646\u0647\u062c \u0627\u0644\u0639\u0645\u0644 \u0627\u0644\u0645\u0632\u062f\u0648\u062c \u0647\u0630\u0627 RIE \u0644\u062a\u0642\u062f\u064a\u0645 \u0627\u0644\u0627\u0646\u062a\u0642\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u062f\u0642\u0629 \u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647 \u0623\u062f\u0627\u0629 \u0645\u062a\u0639\u062f\u062f\u0629 \u0627\u0644\u0627\u0633\u062a\u062e\u062f\u0627\u0645\u0627\u062a \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0642\u0631\u0635 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627. \u0645\u0646 \u062e\u0644\u0627\u0644 \u0636\u0628\u0637 \u0627\u0644\u0645\u0639\u0644\u0645\u0627\u062a \u0645\u062b\u0644 \u062a\u0643\u0648\u064a\u0646 \u0627\u0644\u063a\u0627\u0632 \u0648\u0645\u0633\u062a\u0648\u064a\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u060c \u064a\u0645\u0643\u0646 \u0644\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u062a\u0635\u0645\u064a\u0645 \u0627\u0644\u0639\u0645\u0644\u064a\u0629 \u0644\u062a\u0644\u0628\u064a\u0629 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u062a\u0635\u0645\u064a\u0645 \u0645\u062d\u062f\u062f\u0629.<\/p>\n<p><\/p>\n<p data-line=\"79\">\u064a\u062a\u0641\u0648\u0642 Rie \u0641\u064a \u0625\u0646\u0634\u0627\u0621 \u062a\u0641\u0627\u0635\u064a\u0644 \u062f\u0642\u064a\u0642\u0629 \u0648\u0623\u0646\u0645\u0627\u0637 \u0645\u0639\u0642\u062f\u0629 \u0639\u0644\u0649 \u0623\u0633\u0637\u062d \u0627\u0644\u0642\u0631\u0635. \u062a\u0636\u0645\u0646 \u0642\u062f\u0631\u062a\u0647\u0627 \u0639\u0644\u0649 \u0627\u0633\u062a\u0647\u062f\u0627\u0641 \u0645\u0648\u0627\u062f \u0645\u062d\u062f\u062f\u0629 \u0623\u0646 \u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u0645\u0637\u0644\u0648\u0628\u0629 \u0641\u0642\u0637 \u0645\u062d\u0641\u0648\u0631\u0629 \u060c \u062a\u0627\u0631\u0643\u0629 \u0645\u0646\u0627\u0637\u0642 \u0623\u062e\u0631\u0649 \u062f\u0648\u0646 \u0645\u0633\u0627\u0633. \u062a\u0642\u0644\u0644 \u0647\u0630\u0647 \u0627\u0644\u0627\u0646\u062a\u0642\u0627\u0626\u064a\u0629 \u0645\u0646 \u0646\u0641\u0627\u064a\u0627\u062a \u0627\u0644\u0645\u0648\u0627\u062f \u0648\u062a\u0639\u0632\u0632 \u0643\u0641\u0627\u0621\u0629 \u0627\u0644\u0625\u0646\u062a\u0627\u062c \u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644 RIE \u062e\u064a\u0627\u0631\u064b\u0627 \u0645\u0641\u0636\u0644\u0627\u064b \u0644\u0644\u0639\u062f\u064a\u062f \u0645\u0646 \u062a\u0637\u0628\u064a\u0642\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0642\u0631\u0635.<\/p>\n<p><\/p>\n<h4 data-line=\"81\" id=\"Applications of RIE in creating intricate disk structures.\">\u062a\u0637\u0628\u064a\u0642\u0627\u062a RIE \u0641\u064a \u0625\u0646\u0634\u0627\u0621 \u0647\u064a\u0627\u0643\u0644 \u0642\u0631\u0635 \u0645\u0639\u0642\u062f\u0629.<\/h4>\n<p><\/p>\n<p data-line=\"83\">\u064a\u0644\u0639\u0628 Rie \u062f\u0648\u0631\u064b\u0627 \u0645\u0647\u0645\u064b\u0627 \u0641\u064a \u0635\u064a\u0627\u063a\u0629 \u0627\u0644\u0647\u064a\u0627\u0643\u0644 \u0627\u0644\u0645\u0639\u0642\u062f\u0629 \u0627\u0644\u0645\u0648\u062c\u0648\u062f\u0629 \u0641\u064a \u0627\u0644\u0623\u0642\u0631\u0627\u0635 \u0627\u0644\u062d\u062f\u064a\u062b\u0629. \u062a\u062a\u064a\u062d \u062f\u0642\u062a\u0647\u0627 \u062a\u0643\u0648\u064a\u0646 \u0645\u064a\u0632\u0627\u062a \u0645\u062c\u0647\u0631\u064a\u0629 \u0636\u0631\u0648\u0631\u064a\u0629 \u0644\u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u0642\u0631\u0635 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0623\u062f\u0627\u0621. \u064a\u0639\u062a\u0645\u062f \u0627\u0644\u0634\u0631\u0643\u0627\u062a \u0627\u0644\u0645\u0635\u0646\u0639\u0629 \u0639\u0644\u0649 RIE \u0644\u0625\u0646\u062a\u0627\u062c \u0645\u0643\u0648\u0646\u0627\u062a \u0630\u0627\u062a \u0627\u0644\u062a\u062d\u0645\u0644 \u0627\u0644\u0636\u064a\u0642 \u0648\u0627\u0644\u0647\u0646\u062f\u0633\u0629 \u0627\u0644\u0645\u0639\u0642\u062f\u0629 \u060c \u0645\u0645\u0627 \u064a\u0636\u0645\u0646 \u0627\u0644\u0648\u0638\u0627\u0626\u0641 \u0627\u0644\u0645\u062b\u0644\u0649 \u0648\u0627\u0644\u0645\u062a\u0627\u0646\u0629.<\/p>\n<p><\/p>\n<p data-line=\"85\">\u062a\u062f\u0639\u0645 \u0647\u0630\u0647 \u0627\u0644\u062a\u0642\u0646\u064a\u0629 \u0623\u064a\u0636\u064b\u0627 \u062a\u0637\u0648\u064a\u0631 \u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0627\u0644\u0642\u0631\u0635 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u060c \u0645\u062b\u0644 \u062a\u0644\u0643 \u0627\u0644\u0645\u0633\u062a\u062e\u062f\u0645\u0629 \u0641\u064a \u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0628\u0635\u0631\u064a\u0629 \u0648\u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629. \u0645\u0646 \u062e\u0644\u0627\u0644 \u0627\u0644\u062c\u0645\u0639 \u0628\u064a\u0646 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a \u0648\u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a \u060c \u064a\u0648\u0641\u0631 RIE \u0627\u0644\u0645\u0631\u0648\u0646\u0629 \u0627\u0644\u0644\u0627\u0632\u0645\u0629 \u0644\u062a\u0644\u0628\u064a\u0629 \u0627\u0644\u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u0645\u062a\u0637\u0648\u0631\u0629 \u0644\u0635\u0646\u0627\u0639\u0629 \u0627\u0644\u0642\u0631\u0635. \u0625\u0646 \u0642\u0627\u0628\u0644\u064a\u062a\u0647\u0627 \u0644\u0644\u062a\u0643\u064a\u0641 \u0648\u0641\u0639\u0627\u0644\u064a\u062a\u0647\u0627 \u062a\u062c\u0639\u0644\u0647\u0627 \u062d\u062c\u0631 \u0627\u0644\u0632\u0627\u0648\u064a\u0629 \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0642\u0631\u0635 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627.<\/p>\n<p><\/p>\n<h3 data-line=\"87\" id=\"Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE)\">\u062d\u0641\u0631 \u0623\u064a\u0648\u0646 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0627\u0644\u0645\u0642\u062a\u0631\u0646 \u0628\u0627\u0644\u062d\u062f\u0648\u062f (ICP-RIE)<\/h3>\n<p><\/p>\n<h4 data-line=\"89\" id=\"Features and benefits of ICP-RIE in disk production.\">\u0645\u064a\u0632\u0627\u062a \u0648\u0641\u0648\u0627\u0626\u062f ICP-RIE \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635.<\/h4>\n<p><\/p>\n<p data-line=\"91\">\u064a\u0645\u062b\u0644 \u062d\u0641\u0631 \u0627\u0644\u0623\u064a\u0648\u0646\u0627\u062a \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u064a\u0629 \u0644\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0627\u0644\u0645\u0642\u062a\u0631\u0646\u0629 (ICP-RIE) \u062a\u0642\u062f\u0645\u064b\u0627 \u0645\u062a\u0637\u0648\u0631\u064b\u0627 \u0641\u064a \u062a\u0642\u0646\u064a\u0629 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627. \u062a\u0648\u0644\u062f \u0647\u0630\u0647 \u0627\u0644\u0637\u0631\u064a\u0642\u0629 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0643\u062b\u0627\u0641\u0629 \u060c \u0645\u0645\u0627 \u064a\u062a\u064a\u062d \u0645\u0639\u062f\u0644\u0627\u062a \u0627\u0644\u062d\u0641\u0631 \u0628\u0634\u0643\u0644 \u0623\u0633\u0631\u0639 \u0648\u062a\u062d\u0633\u064a\u0646 \u0627\u0644\u062a\u0648\u062d\u064a\u062f. \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635 \u060c \u064a\u0648\u0641\u0631 ICP-RIE \u0627\u0646\u062a\u0642\u0627\u0626\u064a\u0629 \u0648\u062f\u0642\u0629 \u0641\u0627\u0626\u0642\u064a\u0646 \u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647\u0627 \u0645\u062b\u0627\u0644\u064a\u0629 \u0644\u0644\u0645\u0647\u0627\u0645 \u0627\u0644\u0645\u0639\u0642\u062f\u0629 \u0627\u0644\u062a\u064a \u062a\u062a\u0636\u0645\u0646 \u0645\u0648\u0627\u062f \u0645\u062a\u0639\u062f\u062f\u0629 \u0623\u0648 \u0623\u0646\u0645\u0627\u0637 \u0645\u0639\u0642\u062f\u0629.<\/p>\n<p><\/p>\n<p data-line=\"93\">\u062a\u062a\u0645\u062b\u0644 \u0625\u062d\u062f\u0649 \u0627\u0644\u0645\u064a\u0632\u0627\u062a \u0627\u0644\u0628\u0627\u0631\u0632\u0629 \u0641\u064a ICP-Rie \u0641\u064a \u0642\u062f\u0631\u062a\u0647\u0627 \u0639\u0644\u0649 \u062a\u062d\u0642\u064a\u0642 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0639\u0645\u064a\u0642 \u0645\u0639 \u0627\u0644\u062d\u062f \u0627\u0644\u0623\u062f\u0646\u0649 \u0645\u0646 \u0627\u0644\u0623\u0636\u0631\u0627\u0631 \u0627\u0644\u062a\u064a \u0644\u062d\u0642\u062a \u0628\u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u0645\u062d\u064a\u0637\u0629. \u062a\u0636\u0645\u0646 \u0647\u0630\u0647 \u0627\u0644\u0642\u062f\u0631\u0629 \u0623\u0646 \u064a\u062a\u0645\u0643\u0646 \u0627\u0644\u0645\u0635\u0646\u0639\u0648\u0646 \u0645\u0646 \u0625\u0646\u0634\u0627\u0621 \u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0645\u0641\u0635\u0644\u0629 \u062f\u0648\u0646 \u0627\u0644\u0645\u0633\u0627\u0633 \u0628\u062a\u0643\u0627\u0645\u0644 \u0627\u0644\u0631\u0643\u064a\u0632\u0629. \u0628\u0627\u0644\u0625\u0636\u0627\u0641\u0629 \u0625\u0644\u0649 \u0630\u0644\u0643 \u060c \u064a\u062f\u0639\u0645 ICP-RIE \u0627\u0644\u062d\u0641\u0631 \u0639\u0627\u0644\u064a \u0627\u0644\u0627\u062d\u062a\u0628\u0627\u0633 \u060c \u0645\u0645\u0627 \u064a\u0633\u0645\u062d \u0628\u0625\u0646\u062a\u0627\u062c \u0647\u064a\u0627\u0643\u0644 \u0627\u0644\u0642\u0631\u0635 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0628\u062f\u0642\u0629 \u0627\u0633\u062a\u062b\u0646\u0627\u0626\u064a\u0629.<\/p>\n<p><\/p>\n<h4 data-line=\"95\" id=\"Comparison of ICP-RIE with other plasma etching techniques.\">\u0645\u0642\u0627\u0631\u0646\u0629 ICP-RIE \u0645\u0639 \u062a\u0642\u0646\u064a\u0627\u062a \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0627\u0644\u0623\u062e\u0631\u0649.<\/h4>\n<p><\/p>\n<p data-line=\"97\">\u0639\u0646\u062f \u0645\u0642\u0627\u0631\u0646\u062a\u0647\u0627 \u0628\u0627\u0644\u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u0623\u062e\u0631\u0649 \u060c \u062a\u0648\u0636\u062d ICP-RIE \u0645\u0632\u0627\u064a\u0627 \u0648\u0627\u0636\u062d\u0629 \u0645\u0646 \u062d\u064a\u062b \u0627\u0644\u062f\u0642\u0629 \u0648\u0627\u0644\u0643\u0641\u0627\u0621\u0629. \u0639\u0644\u0649 \u0639\u0643\u0633 RIE \u060c \u0627\u0644\u062a\u064a \u062a\u0639\u0645\u0644 \u0628\u0643\u062b\u0627\u0641\u0629 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0627\u0644\u0645\u0646\u062e\u0641\u0636\u0629 \u060c \u064a\u0648\u0644\u062f ICP-RIE \u0628\u0644\u0627\u0632\u0645\u0627 \u0623\u0643\u062b\u0631 \u062a\u0631\u0643\u064a\u0632\u064b\u0627 \u060c \u0645\u0645\u0627 \u064a\u0624\u062f\u064a \u0625\u0644\u0649 \u062d\u0641\u0631 \u0623\u0633\u0631\u0639 \u0648\u062a\u062d\u0643\u0645 \u0623\u0641\u0636\u0644 \u0641\u064a \u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0645\u0648\u0627\u062f. \u0647\u0630\u0627 \u064a\u062c\u0639\u0644 ICP-RIE \u0645\u0646\u0627\u0633\u0628\u064b\u0627 \u0628\u0634\u0643\u0644 \u062e\u0627\u0635 \u0644\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u062a\u064a \u062a\u062a\u0637\u0644\u0628 \u062d\u0641\u0631\u064b\u0627 \u0639\u0645\u064a\u0642\u064b\u0627 \u0644\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0648\u0646\u0642\u0644 \u0627\u0644\u0623\u0646\u0645\u0627\u0637 \u0627\u0644\u062f\u0642\u064a\u0642\u0629.<\/p>\n<p><\/p>\n<p data-line=\"99\">\u062a\u0641\u062a\u0642\u0631 \u0639\u0645\u0644\u064a\u0629 BOSCH \u060c \u0639\u0644\u0649 \u0627\u0644\u0631\u063a\u0645 \u0645\u0646 \u0641\u0639\u0627\u0644\u064a\u062a\u0647\u0627 \u0644\u0644\u0647\u064a\u0627\u0643\u0644 \u0630\u0627\u062a \u0627\u0644\u0631\u0627\u062a\u064a\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 \u060c \u0625\u0644\u0649 \u062a\u0639\u062f\u062f \u0627\u0633\u062a\u062e\u062f\u0627\u0645\u0627\u062a ICP-RIE. \u0625\u0646 \u0642\u062f\u0631\u0629 \u0627\u0644\u0623\u062e\u064a\u0631\u0629 \u0639\u0644\u0649 \u0627\u0644\u062a\u0639\u0627\u0645\u0644 \u0645\u0639 \u0645\u0648\u0627\u062f \u0645\u062a\u0639\u062f\u062f\u0629 \u0648\u0627\u0644\u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0627\u0644\u0645\u0639\u0642\u062f\u0629 \u062a\u0645\u0646\u062d\u0647\u0627 \u0645\u064a\u0632\u0629 \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635 \u0627\u0644\u062d\u062f\u064a\u062b. \u0645\u0646 \u062e\u0644\u0627\u0644 \u0627\u0644\u062c\u0645\u0639 \u0628\u064a\u0646 \u0627\u0644\u0633\u0631\u0639\u0629 \u0648\u0627\u0644\u062f\u0642\u0629 \u0648\u0627\u0644\u0642\u062f\u0631\u0629 \u0639\u0644\u0649 \u0627\u0644\u062a\u0643\u064a\u0641 \u060c \u064a\u0636\u0639 ICP-RIE \u0645\u0639\u064a\u0627\u0631\u064b\u0627 \u062c\u062f\u064a\u062f\u064b\u0627 \u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0642\u0631\u0635 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627.<\/p>\n<p><\/p>\n<h2 data-line=\"101\" id=\"Comparing Plasma Etching Methods for Disk Manufacturing\">\u0645\u0642\u0627\u0631\u0646\u0629 \u0637\u0631\u0642 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0642\u0631\u0635<\/h2>\n<p><\/p>\n<h3 data-line=\"104\" id=\"RIE vs. ICP-RIE\">\u0631\u064a \u0645\u0642\u0627\u0628\u0644 ICP-Rie<\/h3>\n<p><\/p>\n<h4 data-line=\"106\" id=\"Differences in precision, efficiency, and control for disk production.\">\u0627\u0644\u0627\u062e\u062a\u0644\u0627\u0641\u0627\u062a \u0641\u064a \u0627\u0644\u062f\u0642\u0629 \u0648\u0627\u0644\u0643\u0641\u0627\u0621\u0629 \u0648\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635.<\/h4>\n<p><\/p>\n<p data-line=\"108\">\u064a\u0645\u062b\u0644 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0623\u064a\u0648\u0646\u064a \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u064a (RIE) \u0648\u062d\u0641\u0631 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0623\u064a\u0648\u0646\u064a \u0627\u0644\u0645\u062a\u0641\u0627\u0639\u0644 \u0644\u0644\u0628\u0644\u0627\u0632\u0645\u0627 (ICP-RIE) \u0646\u0647\u062c\u064a\u0646 \u0645\u062a\u0645\u064a\u0632\u064a\u0646 \u0644\u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627. \u062a\u0648\u0641\u0631 \u0643\u0644 \u0637\u0631\u064a\u0642\u0629 \u0645\u0632\u0627\u064a\u0627 \u0641\u0631\u064a\u062f\u0629 \u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647\u0627 \u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u062a\u0644\u0628\u064a\u0629 \u0627\u062d\u062a\u064a\u0627\u062c\u0627\u062a \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0645\u062e\u062a\u0644\u0641\u0629. \u064a\u0648\u0641\u0631 RIE \u0627\u0646\u062a\u0642\u0627\u0626\u064a\u0629 \u0645\u0645\u062a\u0627\u0632\u0629 \u0639\u0646 \u0637\u0631\u064a\u0642 \u062a\u062d\u0633\u064a\u0646 \u0627\u0644\u0645\u0639\u0644\u0645\u0627\u062a \u0645\u062b\u0644 \u062a\u0643\u0648\u064a\u0646 \u0627\u0644\u063a\u0627\u0632 \u0648\u0627\u0644\u0636\u063a\u0637 \u0648\u0637\u0627\u0642\u0629 RF. \u062a\u062a\u064a\u062d \u0647\u0630\u0647 \u0627\u0644\u0642\u062f\u0631\u0629 \u0644\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u0627\u0633\u062a\u0647\u062f\u0627\u0641 \u0645\u0648\u0627\u062f \u0645\u062d\u062f\u062f\u0629 \u0628\u062f\u0642\u0629. \u0648\u0645\u0639 \u0630\u0644\u0643 \u060c \u062a\u0639\u0645\u0644 RIE \u0645\u0639 \u0643\u062b\u0627\u0641\u0627\u062a \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0627\u0644\u0645\u0646\u062e\u0641\u0636\u0629 \u0648\u0637\u0627\u0642\u0627\u062a \u0627\u0644\u0623\u064a\u0648\u0646\u0627\u062a \u060c \u0645\u0645\u0627 \u064a\u0624\u062f\u064a \u0625\u0644\u0649 \u062d\u0641\u0631 \u0623\u0628\u0637\u0623. \u0642\u062f \u064a\u0645\u062a\u062f \u0647\u0630\u0627 \u0627\u0644\u0642\u064a\u062f \u0623\u0648\u0642\u0627\u062a \u0627\u0644\u0639\u0645\u0644\u064a\u0629 \u0639\u0646\u062f\u0645\u0627 \u064a\u0643\u0648\u0646 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0623\u0639\u0645\u0642 \u0645\u0637\u0644\u0648\u0628\u064b\u0627.<\/p>\n<p><\/p>\n<p data-line=\"110\">ICP-Rie \u060c \u0645\u0646 \u0646\u0627\u062d\u064a\u0629 \u0623\u062e\u0631\u0649 \u060c \u064a\u0648\u0644\u062f \u0628\u0644\u0627\u0632\u0645\u0627 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0643\u062b\u0627\u0641\u0629 \u0645\u0639 \u0637\u0627\u0642\u0627\u062a \u0623\u064a\u0648\u0646 \u0623\u0643\u0628\u0631. \u062a\u062a\u064a\u062d \u0647\u0630\u0647 \u0627\u0644\u0645\u064a\u0632\u0629 \u0645\u0639\u062f\u0644\u0627\u062a \u0627\u0644\u062d\u0641\u0631 \u0628\u0634\u0643\u0644 \u0623\u0633\u0631\u0639 \u0648\u062a\u062d\u0633\u064a\u0646 \u0627\u0644\u0627\u0646\u062a\u0642\u0627\u0626\u064a\u0629 \u060c \u062e\u0627\u0635\u0629 \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0644\u0623\u0646\u0645\u0627\u0637 \u0623\u0648 \u0627\u0644\u0645\u0647\u0627\u0645 \u0627\u0644\u0645\u0639\u0642\u062f\u0629 \u0627\u0644\u062a\u064a \u062a\u062a\u0636\u0645\u0646 \u0645\u0648\u0627\u062f \u0645\u062a\u0639\u062f\u062f\u0629. \u064a\u062a\u0641\u0648\u0642 ICP-Rie \u0623\u064a\u0636\u064b\u0627 \u0641\u064a \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0645\u0644\u0641 \u0627\u0644\u0634\u062e\u0635\u064a \u060c \u0645\u0645\u0627 \u064a\u0646\u062a\u062c \u0639\u0646\u0647 \u0645\u064a\u0632\u0627\u062a \u0631\u0623\u0633\u064a\u0629 \u062a\u0645\u0627\u0645\u064b\u0627 \u0648\u0627\u0644\u062d\u0641\u0627\u0638 \u0639\u0644\u0649 \u062a\u0628\u0627\u064a\u0646 \u0639\u0627\u0644\u064a. \u0647\u0630\u0647 \u0627\u0644\u0635\u0641\u0627\u062a \u062a\u062c\u0639\u0644\u0647\u0627 \u0645\u062b\u0627\u0644\u064a\u0629 \u0644\u0644\u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0627\u0644\u0645\u0639\u0642\u062f\u0629 \u0627\u0644\u062a\u064a \u062a\u062a\u0637\u0644\u0628 \u0627\u0644\u062f\u0642\u0629 \u0648\u0627\u0644\u0643\u0641\u0627\u0621\u0629. \u0641\u064a \u062d\u064a\u0646 \u0623\u0646 RIE \u0644\u0627 \u064a\u0632\u0627\u0644 \u0641\u0639\u0627\u0644\u064b\u0627 \u0644\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0623\u0643\u062b\u0631 \u0628\u0633\u0627\u0637\u0629 \u060c \u0641\u0625\u0646 ICP-Rie \u062a\u062d\u062f\u062f \u0645\u0633\u062a\u0648\u0649 \u0623\u0639\u0644\u0649 \u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635 \u0627\u0644\u0645\u062a\u0642\u062f\u0645.<\/p>\n<p><\/p>\n<h4 data-line=\"112\" id=\"Suitability of each method for specific disk manufacturing needs.\">\u0645\u0644\u0627\u0621\u0645\u0629 \u0643\u0644 \u0637\u0631\u064a\u0642\u0629 \u0644\u0627\u062d\u062a\u064a\u0627\u062c\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0642\u0631\u0635 \u0627\u0644\u0645\u062d\u062f\u062f\u0629.<\/h4>\n<p><\/p>\n<p data-line=\"114\">\u064a\u0639\u062a\u0645\u062f \u0627\u0644\u0627\u062e\u062a\u064a\u0627\u0631 \u0628\u064a\u0646 RIE \u0648 ICP-RIE \u0639\u0644\u0649 \u0627\u0644\u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u0645\u062d\u062f\u062f\u0629 \u0644\u0639\u0645\u0644\u064a\u0629 \u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0642\u0631\u0635. \u062a\u0646\u0627\u0633\u0628 RIE \u062a\u0637\u0628\u064a\u0642\u0627\u062a \u062d\u064a\u062b \u0627\u0644\u0627\u0646\u062a\u0642\u0627\u0626\u064a\u0629 \u0648\u0627\u0633\u062a\u0647\u062f\u0627\u0641 \u0627\u0644\u0645\u0648\u0627\u062f \u0623\u0645\u0631 \u0628\u0627\u0644\u063a \u0627\u0644\u0623\u0647\u0645\u064a\u0629. \u062a\u062c\u0639\u0644 \u0628\u0633\u0627\u0637\u062a\u0647\u0627 \u0648\u0641\u0639\u0627\u0644\u064a\u062a\u0647\u0627 \u062e\u064a\u0627\u0631\u064b\u0627 \u0645\u0648\u062b\u0648\u0642\u064b\u0627 \u0628\u0647 \u0644\u0644\u0645\u0647\u0627\u0645 \u0627\u0644\u062a\u064a \u0644\u0627 \u062a\u062a\u0637\u0644\u0628 \u0645\u0639\u062f\u0644\u0627\u062a \u062d\u0641\u0631 \u0639\u0627\u0644\u064a\u0629 \u0623\u0648 \u062f\u0642\u0629 \u0634\u062f\u064a\u062f\u0629. \u0639\u0644\u0649 \u0633\u0628\u064a\u0644 \u0627\u0644\u0645\u062b\u0627\u0644 \u060c \u0642\u062f \u062a\u0633\u062a\u062e\u062f\u0645 \u0627\u0644\u0634\u0631\u0643\u0627\u062a \u0627\u0644\u0645\u0635\u0646\u0639\u0629 RIE \u0644\u0625\u0646\u0634\u0627\u0621 \u0623\u0646\u0645\u0627\u0637 \u0636\u062d\u0644\u0629 \u0623\u0648 \u0627\u0644\u0639\u0645\u0644 \u0645\u0639 \u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0623\u0642\u0644 \u062a\u0639\u0642\u064a\u062f\u064b\u0627.<\/p>\n<p><\/p>\n<p data-line=\"116\">\u0648\u0645\u0639 \u0630\u0644\u0643 \u060c \u0641\u0625\u0646 ICP-Rie \u064a\u062b\u0628\u062a \u0623\u0646\u0647 \u0644\u0627 \u063a\u0646\u0649 \u0639\u0646\u0647 \u0644\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0623\u0643\u062b\u0631 \u062a\u0637\u0644\u0628\u064b\u0627. \u0625\u0646 \u0642\u062f\u0631\u062a\u0647\u0627 \u0639\u0644\u0649 \u062a\u062d\u0642\u064a\u0642 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0639\u0645\u064a\u0642 \u0645\u0639 \u0627\u0644\u062d\u062f \u0627\u0644\u0623\u062f\u0646\u0649 \u0645\u0646 \u0627\u0644\u0636\u0631\u0631 \u064a\u0636\u0645\u0646 \u0633\u0644\u0627\u0645\u0629 \u0627\u0644\u0647\u064a\u0627\u0643\u0644 \u0627\u0644\u0645\u0639\u0642\u062f\u0629. \u062a\u062f\u0639\u0645 \u0647\u0630\u0647 \u0627\u0644\u0637\u0631\u064a\u0642\u0629 \u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0646\u0633\u0628\u0629 \u0639\u0627\u0644\u064a\u0629 \u0645\u0646 \u0627\u0644\u0627\u062d\u062a\u0631\u0627\u0645 \u0648\u062a\u0648\u0641\u0631 \u062a\u0648\u062d\u064a\u062f\u064b\u0627 \u0627\u0633\u062a\u062b\u0646\u0627\u0626\u064a\u064b\u0627 \u060c \u062d\u062a\u0649 \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0644\u0645\u0647\u0627\u0645 \u0627\u0644\u0635\u0639\u0628\u0629. \u063a\u0627\u0644\u0628\u064b\u0627 \u0645\u0627 \u064a\u0639\u062a\u0645\u062f \u0627\u0644\u0634\u0631\u0643\u0627\u062a \u0627\u0644\u0645\u0635\u0646\u0639\u0629 \u0639\u0644\u0649 ICP-RIE \u0644\u0625\u0646\u062a\u0627\u062c \u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0642\u0631\u0635 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0627\u0644\u062a\u064a \u062a\u062a\u0637\u0644\u0628 \u0627\u0644\u062a\u062d\u0645\u0644 \u0627\u0644\u0636\u064a\u0642 \u0648\u0627\u0644\u0647\u0646\u062f\u0633\u0629 \u0627\u0644\u0645\u0639\u0642\u062f\u0629. \u0645\u0646 \u062e\u0644\u0627\u0644 \u062a\u0642\u062f\u064a\u0645 \u062a\u062d\u0643\u0645 \u0641\u0627\u0626\u0642 \u0648\u0642\u0627\u0628\u0644\u064a\u0629 \u0644\u0644\u062a\u0643\u064a\u0641 \u060c \u062a\u0644\u0628\u064a ICP-Rie \u0627\u0644\u0645\u0637\u0627\u0644\u0628 \u0627\u0644\u0635\u0627\u0631\u0645\u0629 \u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0627\u0644\u0642\u0631\u0635 \u0627\u0644\u062d\u062f\u064a\u062b\u0629.<\/p>\n<p><\/p>\n<h3 data-line=\"118\" id=\"Choosing the Right Plasma Etching Technique\">\u0627\u062e\u062a\u064a\u0627\u0631 \u062a\u0642\u0646\u064a\u0629 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0627\u0644\u0635\u062d\u064a\u062d\u0629<\/h3>\n<p><\/p>\n<h4 data-line=\"120\" id=\"Factors influencing the choice of plasma etching methods in disk production.\">\u0627\u0644\u0639\u0648\u0627\u0645\u0644 \u0627\u0644\u062a\u064a \u062a\u0624\u062b\u0631 \u0639\u0644\u0649 \u0627\u062e\u062a\u064a\u0627\u0631 \u0623\u0633\u0627\u0644\u064a\u0628 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635.<\/h4>\n<p><\/p>\n<p data-line=\"122\">\u064a\u062a\u0636\u0645\u0646 \u0627\u062e\u062a\u064a\u0627\u0631 \u062a\u0642\u0646\u064a\u0629 \u062d\u0641\u0631 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0627\u0644\u0645\u0646\u0627\u0633\u0628\u0629 \u062a\u0642\u064a\u064a\u0645 \u0639\u062f\u0629 \u0639\u0648\u0627\u0645\u0644. \u062a\u0639\u0642\u064a\u062f \u0627\u0644\u062a\u0635\u0645\u064a\u0645 \u064a\u0644\u0639\u0628 \u062f\u0648\u0631\u064b\u0627 \u0645\u0647\u0645\u064b\u0627. \u063a\u0627\u0644\u0628\u064b\u0627 \u0645\u0627 \u062a\u062a\u0637\u0644\u0628 \u0627\u0644\u0623\u0646\u0645\u0627\u0637 \u0627\u0644\u0645\u0639\u0642\u062f\u0629 \u0623\u0648 \u0647\u064a\u0627\u0643\u0644 \u0627\u0644\u0646\u0645\u0627\u0630\u062c \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062a\u062d\u0644\u064a\u0642 \u062f\u0642\u0629 \u0648\u0643\u0641\u0627\u0621\u0629 ICP-INE. \u0639\u0644\u0649 \u0627\u0644\u0639\u0643\u0633 \u060c \u0642\u062f \u062a\u0633\u062a\u0641\u064a\u062f \u0627\u0644\u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0627\u0644\u0623\u0643\u062b\u0631 \u0628\u0633\u0627\u0637\u0629 \u0645\u0646 \u0627\u0644\u0646\u0647\u062c \u0627\u0644\u0645\u0628\u0627\u0634\u0631 \u0644\u0640 RIE. \u064a\u0624\u062b\u0631 \u0627\u0644\u062a\u0643\u0648\u064a\u0646 \u0627\u0644\u0645\u0627\u062f\u064a \u0623\u064a\u0636\u064b\u0627 \u0639\u0644\u0649 \u0627\u0644\u0642\u0631\u0627\u0631. \u0625\u0646 \u0627\u0644\u0627\u0646\u062a\u0642\u0627\u0626\u064a\u0629 \u0627\u0644\u0645\u0645\u062a\u0627\u0632\u0629 \u0644\u0640 RIE \u062a\u062c\u0639\u0644\u0647\u0627 \u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u062a\u064a \u062a\u062a\u0636\u0645\u0646 \u0645\u0648\u0627\u062f \u0645\u062d\u062f\u062f\u0629 \u060c \u0641\u064a \u062d\u064a\u0646 \u0623\u0646 ICP-RIE \u062a\u062a\u0639\u0627\u0645\u0644 \u0645\u0639 \u0645\u0648\u0627\u062f \u0645\u062a\u0639\u062f\u062f\u0629 \u0628\u0633\u0647\u0648\u0644\u0629.<\/p>\n<p><\/p>\n<p data-line=\"124\">\u064a\u0624\u062b\u0631 \u062d\u062c\u0645 \u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0648\u0627\u0644\u0642\u064a\u0648\u062f \u0627\u0644\u0632\u0645\u0646\u064a\u0629 \u0639\u0644\u0649 \u0627\u0644\u0627\u062e\u062a\u064a\u0627\u0631. \u062a\u062c\u0639\u0644 \u0645\u0639\u062f\u0644\u0627\u062a \u0627\u0644\u0646\u0642\u0634 \u0627\u0644\u0623\u0633\u0631\u0639 \u0645\u0646 ICP-Rie \u0623\u0646\u0647\u0627 \u0645\u062b\u0627\u0644\u064a\u0629 \u0644\u0644\u062a\u0635\u0646\u064a\u0639 \u0630\u0627\u062a \u0627\u0644\u062d\u062c\u0645 \u0627\u0644\u0643\u0628\u064a\u0631 \u060c \u062d\u064a\u062b \u062a\u0643\u0648\u0646 \u0627\u0644\u0643\u0641\u0627\u0621\u0629 \u0630\u0627\u062a \u0623\u0647\u0645\u064a\u0629 \u0642\u0635\u0648\u0649. \u0642\u062f \u062a\u062a\u0646\u0627\u0633\u0628 Rie \u060c \u0628\u0623\u0633\u0639\u0627\u0631\u0647\u0627 \u0623\u0628\u0637\u0623 \u060c \u0628\u0639\u0645\u0644\u064a\u0627\u062a \u0623\u0648 \u0645\u0634\u0627\u0631\u064a\u0639 \u0623\u0635\u063a\u0631 \u062d\u062c\u0645\u0627\u064b \u0630\u0627\u062a \u062c\u062f\u0627\u0648\u0644 \u0632\u0645\u0646\u064a\u0629 \u0623\u0642\u0644 \u0635\u0631\u0627\u0645\u0629. \u0627\u0639\u062a\u0628\u0627\u0631\u0627\u062a \u0627\u0644\u062a\u0643\u0644\u0641\u0629 \u062a\u0644\u0639\u0628 \u062f\u0648\u0631\u0647\u0627 \u0623\u064a\u0636\u064b\u0627. \u0639\u0644\u0649 \u0627\u0644\u0631\u063a\u0645 \u0645\u0646 \u0623\u0646 ICP-RIE \u062a\u0642\u062f\u0645 \u0642\u062f\u0631\u0627\u062a \u0645\u062a\u0642\u062f\u0645\u0629 \u060c \u0625\u0644\u0627 \u0623\u0646 \u0623\u0646\u0638\u0645\u062a\u0647\u0627 \u0648\u0639\u0645\u0644\u064a\u0627\u062a\u0647\u0627 \u0642\u062f \u062a\u062a\u0636\u0645\u0646 \u0646\u0641\u0642\u0627\u062a \u0623\u0639\u0644\u0649. \u064a\u062c\u0628 \u0623\u0646 \u064a\u0632\u0646 \u0627\u0644\u0645\u0635\u0646\u0639\u0648\u0646 \u0647\u0630\u0647 \u0627\u0644\u0639\u0648\u0627\u0645\u0644 \u0644\u062a\u062d\u062f\u064a\u062f \u0627\u0644\u0637\u0631\u064a\u0642\u0629 \u0627\u0644\u0623\u0646\u0633\u0628 \u0644\u0627\u062d\u062a\u064a\u0627\u062c\u0627\u062a\u0647\u0645.<\/p>\n<p><\/p>\n<h4 data-line=\"126\" id=\"Balancing cost, precision, and production efficiency.\">\u0645\u0648\u0627\u0632\u0646\u0629 \u0627\u0644\u062a\u0643\u0644\u0641\u0629 \u0648\u0627\u0644\u062f\u0642\u0629 \u0648\u0643\u0641\u0627\u0621\u0629 \u0627\u0644\u0625\u0646\u062a\u0627\u062c.<\/h4>\n<p><\/p>\n<p data-line=\"128\">\u064a\u0639\u062f \u062a\u062d\u0642\u064a\u0642 \u0627\u0644\u062a\u0648\u0627\u0632\u0646 \u0627\u0644\u0635\u062d\u064a\u062d \u0628\u064a\u0646 \u0627\u0644\u062a\u0643\u0644\u0641\u0629 \u0648\u0627\u0644\u062f\u0642\u0629 \u0648\u0627\u0644\u0643\u0641\u0627\u0621\u0629 \u0623\u0645\u0631\u064b\u0627 \u0628\u0627\u0644\u063a \u0627\u0644\u0623\u0647\u0645\u064a\u0629 \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0642\u0631\u0635. \u064a\u0648\u0641\u0631 RIE \u062d\u0644\u0627\u064b \u0641\u0639\u0627\u0644\u064b\u0627 \u0645\u0646 \u062d\u064a\u062b \u0627\u0644\u062a\u0643\u0644\u0641\u0629 \u0644\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u062a\u064a \u0644\u0627 \u062a\u062a\u0637\u0644\u0628 \u0625\u0645\u0643\u0627\u0646\u0627\u062a \u0645\u062a\u0637\u0648\u0631\u0629. \u0625\u0646 \u0628\u0633\u0627\u0637\u062a\u0647\u0627 \u062a\u0642\u0644\u0644 \u0645\u0646 \u0646\u0641\u0642\u0627\u062a \u0627\u0644\u062a\u0634\u063a\u064a\u0644 \u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647\u0627 \u062e\u064a\u0627\u0631\u064b\u0627 \u062c\u0630\u0627\u0628\u064b\u0627 \u0644\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u0627\u0644\u0648\u0627\u0639\u064a \u0644\u0644\u0645\u064a\u0632\u0627\u0646\u064a\u0629. \u0648\u0645\u0639 \u0630\u0644\u0643 \u060c \u0642\u062f \u062a\u0624\u062b\u0631 \u0645\u0639\u062f\u0644\u0627\u062a \u0627\u0644\u062d\u0641\u0631 \u0623\u0628\u0637\u0623 \u0639\u0644\u0649 \u0643\u0641\u0627\u0621\u0629 \u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0643\u0644\u064a\u0629.<\/p>\n<p><\/p>\n<p data-line=\"130\">\u064a\u0648\u0641\u0631 ICP-Rie \u060c \u0639\u0644\u0649 \u0627\u0644\u0631\u063a\u0645 \u0645\u0646 \u0623\u063a\u0644\u0649 \u062b\u0645\u0646\u0627\u064b \u060c \u062f\u0642\u0629 \u0648\u0633\u0631\u0639\u0629 \u0644\u0627 \u0645\u062b\u064a\u0644 \u0644\u0647\u0627. \u062a\u0628\u0631\u0631 \u0642\u062f\u0631\u062a\u0647\u0627 \u0639\u0644\u0649 \u0627\u0644\u062a\u0639\u0627\u0645\u0644 \u0645\u0639 \u0627\u0644\u062a\u0635\u0645\u064a\u0645\u0627\u062a \u0627\u0644\u0645\u0639\u0642\u062f\u0629 \u0648\u062a\u062d\u0642\u064a\u0642 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0639\u0645\u064a\u0642 \u0627\u0644\u0627\u0633\u062a\u062b\u0645\u0627\u0631 \u0641\u064a \u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629. \u064a\u0645\u0643\u0646 \u0644\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u062a\u062d\u0633\u064a\u0646 \u0627\u0644\u062a\u0643\u0627\u0644\u064a\u0641 \u0639\u0646 \u0637\u0631\u064a\u0642 \u0627\u0644\u062d\u0641\u0627\u0638 \u0639\u0644\u0649 ICP-RIE \u0644\u0644\u0645\u0647\u0627\u0645 \u0627\u0644\u062a\u064a \u062a\u062a\u0637\u0644\u0628 \u0646\u0642\u0627\u0637 \u0642\u0648\u062a\u0647 \u0627\u0644\u0641\u0631\u064a\u062f\u0629 \u0623\u062b\u0646\u0627\u0621 \u0627\u0633\u062a\u062e\u062f\u0627\u0645 RIE \u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0623\u0642\u0644 \u062a\u0637\u0644\u0628\u064b\u0627. \u064a\u0636\u0645\u0646 \u0647\u0630\u0627 \u0627\u0644\u0646\u0647\u062c \u0627\u0644\u0627\u0633\u062a\u0631\u0627\u062a\u064a\u062c\u064a \u062a\u062e\u0635\u064a\u0635 \u0627\u0644\u0645\u0648\u0627\u0631\u062f \u0628\u0634\u0643\u0644 \u0641\u0639\u0627\u0644 \u060c 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\u0647\u064a\u0627\u0643\u0644 \u0623\u0642\u0631\u0627\u0635 \u0645\u0639\u0642\u062f\u0629 \u0639\u0644\u0649 \u0646\u062d\u0648 \u062f\u0642\u064a\u0642 \u0648\u0643\u0641\u0624\u060c \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0623\u0633\u0627\u0644\u064a\u0628 \u0645\u062a\u0637\u0648\u0631\u0629 \u0645\u062b\u0644 \u0645\u0628\u0627\u062f\u0631\u0629 RIE \u0648 ICP-RIE \u0644\u062a\u0644\u0628\u064a\u0629 \u0627\u0644\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u062d\u062f\u064a\u062b\u0629.<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[107],"tags":[120],"class_list":["post-617","post","type-post","status-publish","format-standard","hentry","category-blog","tag-plasma-etching-disk"],"_links":{"self":[{"href":"https:\/\/www.cnvetenergy.com\/ar\/wp-json\/wp\/v2\/posts\/617","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.cnvetenergy.com\/ar\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cnvetenergy.com\/ar\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ar\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ar\/wp-json\/wp\/v2\/comments?post=617"}],"version-history":[{"count":0,"href":"https:\/\/www.cnvetenergy.com\/ar\/wp-json\/wp\/v2\/posts\/617\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.cnvetenergy.com\/ar\/wp-json\/wp\/v2\/media?parent=617"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ar\/wp-json\/wp\/v2\/categories?post=617"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ar\/wp-json\/wp\/v2\/tags?post=617"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}