{"id":109,"date":"2024-11-21T11:05:29","date_gmt":"2024-11-21T03:05:29","guid":{"rendered":"http:\/\/weitai1.globaldeepsea.site\/?post_type=product&p=109"},"modified":"2026-03-13T17:05:18","modified_gmt":"2026-03-13T09:05:18","slug":"sic-coating-carrier-for-rtp-rta","status":"publish","type":"product","link":"https:\/\/www.cnvetenergy.com\/da\/product\/sic-coating-carrier-for-rtp-rta\/","title":{"rendered":"SiC Coating Carrier For RTP\/RTA"},"content":{"rendered":"

SiC Coating Carrier For RTP\/RTA\u00a0is a key component used in the semiconductor manufacturing processes called\u00a0Rapid Thermal Processing & Annealing,\u00a0we use our patented technology to make the silicon carbide carrier with extremely high purity, good coating\u00a0uniformity\u00a0and an excellent service life, as well as high chemical resistance and thermal stability properties.<\/p>\n

\"\"<\/p>\n

Features of our products:<\/p>\n

1. High temperature oxidation resistance up to 1700\u2103.
\n2. High purity and\u00a0thermal uniformity
\n3. Excellent corrosion resistance: acid, alkali, salt and organic reagents.
\n4. High hardness, compact surface, fine particles.
\n5. Longer service life and more durable<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\n

CVD<\/b>\u00a0<\/b>Si<\/b>C<\/b>\u8584\u819c\u57fa\u672c\u7269\u7406\u6027\u80fd<\/b><\/b><\/p>\n

Basic physical properties of CVD SiC <\/b>coating<\/b><\/b><\/p>\n<\/td>\n<\/tr>\n

\n

\u6027\u8d28 \/ Property<\/p>\n<\/td>\n

\n

\u5178\u578b\u6570\u503c \/ Typical Value<\/p>\n<\/td>\n<\/tr>\n

\n

\u6676\u4f53\u7ed3\u6784 \/ Crystal Structure<\/p>\n<\/td>\n

\n

FCC \u03b2 phase\u00a0\u591a\u6676\uff0c\u4e3b\u8981\u4e3a\uff08111\uff09\u53d6\u5411<\/p>\n<\/td>\n<\/tr>\n

\n

\u5bc6\u5ea6 \/ Density<\/p>\n<\/td>\n

\n

3.21 g\/cm\u00b3<\/p>\n<\/td>\n<\/tr>\n

\n

\u786c\u5ea6 \/ Hardness<\/p>\n<\/td>\n

\n

2500 \u7ef4\u6c0f\u786c\u5ea6\uff08500g load\uff09<\/p>\n<\/td>\n<\/tr>\n

\n

\u6676\u7c92\u5927\u5c0f \/ Grain SiZe<\/p>\n<\/td>\n

\n

2~10\u03bcm<\/p>\n<\/td>\n<\/tr>\n

\n

\u7eaf\u5ea6 \/ Chemical Purity<\/p>\n<\/td>\n

\n

99.99995%<\/p>\n<\/td>\n<\/tr>\n

\n

\u70ed\u5bb9 \/ Heat Capacity<\/p>\n<\/td>\n

\n

640 J\u00b7kg-1<\/sup>\u00b7K-1<\/sup><\/p>\n<\/td>\n<\/tr>\n

\n

\u5347\u534e\u6e29\u5ea6 \/ Sublimation Temperature<\/p>\n<\/td>\n

\n

2700\u2103<\/p>\n<\/td>\n<\/tr>\n

\n

\u6297\u5f2f\u5f3a\u5ea6 \/ Flexural Strength<\/p>\n<\/td>\n

\n

415 MPa RT 4-point<\/p>\n<\/td>\n<\/tr>\n

\n

\u6768\u6c0f\u6a21\u91cf \/ Young’ s Modulus<\/p>\n<\/td>\n

\n

430 Gpa 4pt bend, 1300\u2103<\/p>\n<\/td>\n<\/tr>\n

\n

\u5bfc\u70ed\u7cfb\u6570 \/ Thermal\u00a0Conductivity<\/p>\n<\/td>\n

\n

300W\u00b7m-1<\/sup>\u00b7K-1<\/sup><\/p>\n<\/td>\n<\/tr>\n

\n

\u70ed\u81a8\u80c0\u7cfb\u6570 \/ Thermal Expansion(CTE)<\/p>\n<\/td>\n

\n

4.5\u00d710-6<\/sup>K-1<\/sup><\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\"1\"<\/a><\/p>\n

\"2\"<\/a><\/p>\n

VET Energy is\u00a0the\u00a0real manufacturer of customized graphite and silicon carbide products with different coatings like SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc.,\u00a0can supply\u00a0various\u00a0customized parts for semiconductor and photovoltaic industry.<\/p>\n

Our technical team comes from top domestic research institutions, can provide more professional material solutions\u00a0for you.<\/p>\n

We continuously develop advanced processes to provide more advanced materials,\u00a0and\u00a0have worked out an exclusive patented technology, which can make the bonding between the coating and the substrate tighter and less prone to detachment.<\/p>\n

Varmt velkommen dig til at bes\u00f8ge vores fabrik, lad os have yderligere diskussion!<\/strong><\/p>\n

\"F<\/a><\/p>\n

 <\/p>\n

\"Produktionsudstyr\"<\/a><\/p>\n

 <\/p>\n

\"Virksomhedskunder\"<\/a><\/p>","protected":false},"excerpt":{"rendered":"

\n

kort beskrivelse:<\/h3>\n

VET Energy\u00a0SiC Coating Carrier For RTP\/RTA is a high-performance product designed to provide consistent and reliable performance over an extended period. It has super good heat resistance and thermal uniformity, high purity, erosion resistance, making it the perfect solution for wafer processing applications.<\/p>\n

    \n
  • Place of Origin : <\/em> China<\/li>\n
  • Crystal Structure : <\/em> FCC\u03b2phase<\/li>\n
  • Density : <\/em> 3.21 g\/cm;<\/li>\n
  • Hardness : <\/em> 2500 Vickers;<\/li>\n
  • Grain Size : <\/em> 2~10\u03bcm;<\/li>\n
  • Chemical Purity : <\/em> 99.99995%;<\/li>\n
  • Heat Capacity : <\/em> 640J\u00b7kg-1\u00b7K-1;<\/li>\n
  • Sublimation Temperature : <\/em> 2700\u2103;<\/li>\n
  • Felexural Strength : <\/em> 415 Mpa (RT 4-Point);<\/li>\n
  • Young’ s Modulus: <\/em> 430 Gpa (4pt bend, 1300\u2103);<\/li>\n
  • Thermal Expansion (C.T.E) : <\/em> 4.5 10-6K-1;<\/li>\n
  • Thermal Conductivity: <\/em> 300\uff08W\/MK\uff09;<\/li>\n<\/ul>\n<\/div>","protected":false},"featured_media":113,"template":"","meta":[],"product_cat":[16,27],"product_tag":[22,24,26],"class_list":{"0":"post-109","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-cvd-coating","7":"product_cat-etching-process-parts","8":"product_tag-epitaxial-epi-graphite-barrel-susceptor","9":"product_tag-sic-coated-graphite-base-carriers","10":"product_tag-sic-coated-graphite-mocvd-epitaxy-susceptor","12":"first","13":"instock","14":"shipping-taxable","15":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.cnvetenergy.com\/da\/wp-json\/wp\/v2\/product\/109","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.cnvetenergy.com\/da\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.cnvetenergy.com\/da\/wp-json\/wp\/v2\/types\/product"}],"version-history":[{"count":1,"href":"https:\/\/www.cnvetenergy.com\/da\/wp-json\/wp\/v2\/product\/109\/revisions"}],"predecessor-version":[{"id":2621,"href":"https:\/\/www.cnvetenergy.com\/da\/wp-json\/wp\/v2\/product\/109\/revisions\/2621"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/da\/wp-json\/wp\/v2\/media\/113"}],"wp:attachment":[{"href":"https:\/\/www.cnvetenergy.com\/da\/wp-json\/wp\/v2\/media?parent=109"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/da\/wp-json\/wp\/v2\/product_cat?post=109"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/da\/wp-json\/wp\/v2\/product_tag?post=109"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}