Long Service Life Silicon Carbide Wafer Cassette With SiC Coating

Short Description:

VET Energyย Silicon Carbide Wafer Cassette With SiC Coating is a high-performance product designed to provide consistent and reliable performance over an extended period.ย  It has super good heat resistance and thermal uniformity, high purity, erosion resistance, making it the perfect solution for wafer processing applications.

Properties of recrystallized silicon carbide

Recrystallized silicon carbide (R-SiC) is a high-performance material with hardness second only to diamond, which is formed at a high temperature above 2000โ„ƒ. It retains many excellent properties of SiC, such as high temperature strength, strong corrosion resistance, excellent oxidation resistance, good thermal shock resistance and so on.

โ— Excellent mechanical properties. Recrystallized silicon carbide has higher strength and stiffness than carbon fiber, high impact resistance, can play a good performance in extreme temperature environments, can play a better counterbalance performance in a variety of situations. In addition, it also has good flexibility and is not easily damaged by stretching and bending, which greatly improves its performance.

โ— High corrosion resistance. Recrystallized silicon carbide has high corrosion resistance to a variety of media, can prevent the erosion of a variety of corrosive media, can maintain its mechanical properties for a long time, has a strong adhesion, so that it has a longer service life. In addition, it also has good thermal stability, can adapt to a certain range of temperature changes, improve its application effect.

โ— Sintering does not shrink. Because the sintering process does not shrink, no residual stress will cause deformation or cracking of the product, and parts with complex shapes and high precision can be prepared.

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Physical properties of Recrystallized Silicon Carbide

ๆ€ง่ดจ / Property

ๅ…ธๅž‹ๆ•ฐๅ€ผ / Typical Value

ไฝฟ็”จๆธฉๅบฆย / Working temperature (ยฐC)

1600ยฐC (with oxygen), 1700ยฐC (reducing environment)

SiCๅซ้‡ / SiC content

> 99.96%

่‡ช็”ฑSiๅซ้‡ / Free Si content

< 0.1%

ไฝ“็งฏๅฏ†ๅบฆย /ย Bulk density

2.60-2.70ย g/cm3

ๆฐ”ๅญ”็އ / Apparent porosity

< 16%

ๆŠ—ๅŽ‹ๅผบๅบฆ / Compressionย strength

> 600ย MPa

ๅธธๆธฉๆŠ—ๅผฏๅผบๅบฆย /ย Cold bending strength

80-90 MPa (20ยฐC)

้ซ˜ๆธฉๆŠ—ๅผฏๅผบๅบฆ Hot bending strength

90-100 MPa (1400ยฐC)

็ƒญ่†จ่ƒ€็ณปๆ•ฐย / Thermal expansion @1500ยฐC

4.70 10-6/ยฐC

ๅฏผ็ƒญ็ณปๆ•ฐย /ย Thermal conductivity @1200ยฐC

23ย ย W/mโ€ขK

ๆจๆฐๆจก้‡ / Elastic modulus

240 GPa

ๆŠ—็ƒญ้œ‡ๆ€ง / Thermal shock resistance

Extremely good

VET Energy isย theย real manufacturer of customized graphite and silicon carbide products with CVD coating,ย can supplyย various customized parts for semiconductor and photovoltaic industry.ย Our technical team comes from top domestic research institutions, can provide more professional material solutionsย for you.

We continuously develop advanced processes to provide more advanced materials,ย andย have worked out an exclusive patented technology, which can make the bonding between the coating and the substrate tighter and less prone to detachment.

CVDย SiC่–„่†œๅŸบๆœฌ็‰ฉ็†ๆ€ง่ƒฝ

Basic physical properties of CVD SiC coating

ๆ€ง่ดจ / Property

ๅ…ธๅž‹ๆ•ฐๅ€ผ / Typical Value

ๆ™ถไฝ“็ป“ๆž„ / Crystal Structure

FCC ฮฒ phaseย ๅคšๆ™ถ๏ผŒไธป่ฆไธบ๏ผˆ111๏ผ‰ๅ–ๅ‘

ๅฏ†ๅบฆ / Density

3.21 g/cmยณ

็กฌๅบฆ / Hardness

2500 ็ปดๆฐ็กฌๅบฆ๏ผˆ500g load๏ผ‰

ๆ™ถ็ฒ’ๅคงๅฐ / Grain SiZe

2~10ฮผm

็บฏๅบฆ / Chemical Purity

99.99995%

็ƒญๅฎน / Heat Capacity

640 Jยทkg-1ยทK-1

ๅ‡ๅŽๆธฉๅบฆ / Sublimation Temperature

2700โ„ƒ

ๆŠ—ๅผฏๅผบๅบฆ / Flexural Strength

415 MPa RT 4-point

ๆจๆฐๆจก้‡ / Young’ s Modulus

430 Gpa 4pt bend, 1300โ„ƒ

ๅฏผ็ƒญ็ณปๆ•ฐ / Thermalย Conductivity

300Wยทm-1ยทK-1

็ƒญ่†จ่ƒ€็ณปๆ•ฐ / Thermal Expansion(CTE)

4.5ร—10-6K-1

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