{"id":79,"date":"2024-11-21T10:43:26","date_gmt":"2024-11-21T02:43:26","guid":{"rendered":"http:\/\/weitai1.globaldeepsea.site\/?post_type=product&p=79"},"modified":"2026-03-13T17:05:19","modified_gmt":"2026-03-13T09:05:19","slug":"china-manufacturer-sic-coated-graphite-mocvd-epitaxy-susceptor","status":"publish","type":"product","link":"https:\/\/www.cnvetenergy.com\/it\/product\/china-manufacturer-sic-coated-graphite-mocvd-epitaxy-susceptor\/","title":{"rendered":"China Manufacturer SiC Coated Graphite MOCVD Epitaxy Susceptor"},"content":{"rendered":"
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High quality MOCVD Susceptor Buy online in China<\/p>\n

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A wafer needs to pass through several steps before it is ready for use in electronic devices. One important process is silicon epitaxy, in which the wafers are carried on graphite susceptors. The properties and quality of the susceptors have a crucial effect on the quality of the wafer\u2019s epitaxial layer.<\/p>\n

For thin film deposition phases such as epitaxy or MOCVD, VET supplies ultra-pure graphiteequipment used to support substrates or “wafers”. At the core of the process, this equipment, epitaxy susceptors or satellite platforms for the MOCVD, are first subjected to the deposition environment:<\/p>\n

High temperature.
\nHigh vacuum.
\nUse of aggressive gaseous precursors.
\nZero contamination, absence of peeling.
\nResistance to strong acids during cleaning operations<\/p>\n

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VET Energy is\u00a0the\u00a0real manufacturer of customized graphite and silicon carbide products with coating for semiconductor and photovoltaic industry.\u00a0Our technical team comes from top domestic research institutions, can provide more professional material solutions\u00a0for you.<\/p>\n

We continuously develop advanced processes to provide more advanced materials,\u00a0and\u00a0have worked out an exclusive patented technology, which can make the bonding between the coating and the substrate tighter and less prone to detachment.<\/p>\n

Features of our products:<\/p>\n

1. High temperature oxidation resistance up to 1700\u2103.
\n2. High purity and\u00a0thermal uniformity
\n3. Excellent corrosion resistance: acid, alkali, salt and organic reagents.
\n4. High hardness, compact surface, fine particles.
\n5. Longer service life and more durable<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
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CVD<\/b>\u00a0<\/b>Si<\/b>C<\/b>\u8584\u819c\u57fa\u672c\u7269\u7406\u6027\u80fd<\/b><\/b><\/p>\n

Basic physical properties of CVD SiC <\/b>coating<\/b><\/b><\/p>\n<\/td>\n<\/tr>\n

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\u6027\u8d28 \/ Property<\/p>\n<\/td>\n

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\u5178\u578b\u6570\u503c \/ Typical Value<\/p>\n<\/td>\n<\/tr>\n

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\u6676\u4f53\u7ed3\u6784 \/ Crystal Structure<\/p>\n<\/td>\n

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FCC \u03b2 phase\u00a0\u591a\u6676\uff0c\u4e3b\u8981\u4e3a\uff08111\uff09\u53d6\u5411<\/p>\n<\/td>\n<\/tr>\n

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\u5bc6\u5ea6 \/ Density<\/p>\n<\/td>\n

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3.21 g\/cm\u00b3<\/p>\n<\/td>\n<\/tr>\n

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\u786c\u5ea6 \/ Hardness<\/p>\n<\/td>\n

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2500 \u7ef4\u6c0f\u786c\u5ea6\uff08500g load\uff09<\/p>\n<\/td>\n<\/tr>\n

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\u6676\u7c92\u5927\u5c0f \/ Grain SiZe<\/p>\n<\/td>\n

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2~10\u03bcm<\/p>\n<\/td>\n<\/tr>\n

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\u7eaf\u5ea6 \/ Chemical Purity<\/p>\n<\/td>\n

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99.99995%<\/p>\n<\/td>\n<\/tr>\n

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\u70ed\u5bb9 \/ Heat Capacity<\/p>\n<\/td>\n

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640 J\u00b7kg-1<\/sup>\u00b7K-1<\/sup><\/p>\n<\/td>\n<\/tr>\n

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\u5347\u534e\u6e29\u5ea6 \/ Sublimation Temperature<\/p>\n<\/td>\n

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2700\u2103<\/p>\n<\/td>\n<\/tr>\n

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\u6297\u5f2f\u5f3a\u5ea6 \/ Flexural Strength<\/p>\n<\/td>\n

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415 MPa RT 4-point<\/p>\n<\/td>\n<\/tr>\n

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\u6768\u6c0f\u6a21\u91cf \/ Young’ s Modulus<\/p>\n<\/td>\n

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430 Gpa 4pt bend, 1300\u2103<\/p>\n<\/td>\n<\/tr>\n

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\u5bfc\u70ed\u7cfb\u6570 \/ Thermal\u00a0Conductivity<\/p>\n<\/td>\n

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300W\u00b7m-1<\/sup>\u00b7K-1<\/sup><\/p>\n<\/td>\n<\/tr>\n

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\u70ed\u81a8\u80c0\u7cfb\u6570 \/ Thermal Expansion(CTE)<\/p>\n<\/td>\n

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4.5\u00d710-6<\/sup>K-1<\/sup><\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

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Warmly welcome you to visit our factory, let’s have further discussion!<\/strong><\/p>\n

\"\u7814\u53d1\u56e2\u961f\"<\/a><\/p>\n

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\"\u751f\u4ea7\u8bbe\u5907\"<\/a><\/p>\n

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\"\u516c\u53f8\u5ba2\u6237\"<\/a><\/p>\n

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Purity < 5ppm
\n\u2023 Good doping uniformity
\n\u2023 High density and adhesion
\n\u2023 Good anti-corrosive and carbon resistence<\/p>\n

\u2023 Professional customization
\n\u2023 Short lead time
\n\u2023 Stable supply
\n\u2023 Quality control and continual improvement<\/p>\n

Epitaxy of GaN on Sapphire\u00a0(RGB\/Mini\/Micro LED);
\nEpitaxy of GaN on Si Substrate(UVC);
\nEpitaxy of GaN on Si Substrate(Electronical Device);
\nEpitaxy of Si on Si Substrate(Integrated circuit);
\nEpitaxy of SiC on SiC Substrate\u00a0(Substrate);
\nEpitaxy of InP on InP<\/p>","protected":false},"featured_media":80,"template":"","meta":[],"product_cat":[16,25],"product_tag":[22,24,26],"class_list":{"0":"post-79","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-cvd-coating","7":"product_cat-mocvd-epitaxial-parts","8":"product_tag-epitaxial-epi-graphite-barrel-susceptor","9":"product_tag-sic-coated-graphite-base-carriers","10":"product_tag-sic-coated-graphite-mocvd-epitaxy-susceptor","12":"first","13":"instock","14":"shipping-taxable","15":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.cnvetenergy.com\/it\/wp-json\/wp\/v2\/product\/79","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.cnvetenergy.com\/it\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.cnvetenergy.com\/it\/wp-json\/wp\/v2\/types\/product"}],"version-history":[{"count":1,"href":"https:\/\/www.cnvetenergy.com\/it\/wp-json\/wp\/v2\/product\/79\/revisions"}],"predecessor-version":[{"id":2622,"href":"https:\/\/www.cnvetenergy.com\/it\/wp-json\/wp\/v2\/product\/79\/revisions\/2622"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/it\/wp-json\/wp\/v2\/media\/80"}],"wp:attachment":[{"href":"https:\/\/www.cnvetenergy.com\/it\/wp-json\/wp\/v2\/media?parent=79"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/it\/wp-json\/wp\/v2\/product_cat?post=79"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/it\/wp-json\/wp\/v2\/product_tag?post=79"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}