タンタル炭化物のコーティングが付いているハーフムーン部分

The VET Energy Half-moon part with Tantalum Carbide coating, offering high performance with long-term stable and reliable operation. It boasts excellent heat resistance, thermal uniformity, high purity, and corrosion resistance, making it an ideal choice for wafer processing applications.

TaC coating, made using physical vapor deposition technology, offers:

High hardness (2500-3000HV), making it an excellent hard coating.
Superior wear resistance, reducing mechanical part wear and damage.
Outstanding high-temperature performance.
Excellent chemical stability, resisting reactions with acids and alkalis.

TaC涂层1
TaC涂层5

化学品

タック涂层的物理性能  

密度 / 密度

14.3 (克/立方厘米)

放射線治療の割合 / 特定の免除

0.3

 膨胀系数/ Thermal expansion coefficient

6.3 10 -6 /Kについて

氏の硬度  硬度(HK)

2000年香港

临界温度(°C) / 抵抗

10⁻⁵ 欧姆·厘米

 稳定性/ Thermal stability

<2500℃

 石墨尺寸变化/ グラファイトのサイズ変更

-10~-20微米

 /厚さのコーティング

≥20μm 典型值(35μm±10μm)

 

 

Ningbo VET Energy Technology Co., Ltd. is a high-tech enterprise specializing in the production and sales of advanced materials, including graphite, silicon carbide, ceramics, and surface treatments. Our products are widely used in industries such as photovoltaics, semiconductors, new energy, and metallurgy.
Our technical team, composed of experts from top domestic research institutions, can provide you with professional material solutions.
We warmly welcome you to visit our factory for guidance and further discussions!

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