{"id":617,"date":"2024-11-27T09:25:43","date_gmt":"2024-11-27T01:25:43","guid":{"rendered":"http:\/\/weitai1.globaldeepsea.site\/plasma-etching-disk-production\/"},"modified":"2024-11-27T09:25:43","modified_gmt":"2024-11-27T01:25:43","slug":"%e3%83%97%e3%83%a9%e3%82%ba%e3%83%9e%e3%82%a8%e3%83%83%e3%83%81%e3%83%b3%e3%82%b0%e3%83%87%e3%82%a3%e3%82%b9%e3%82%af%e8%a3%bd%e9%80%a0","status":"publish","type":"post","link":"https:\/\/www.cnvetenergy.com\/ja\/%e3%83%97%e3%83%a9%e3%82%ba%e3%83%9e%e3%82%a8%e3%83%83%e3%83%81%e3%83%b3%e3%82%b0%e3%83%87%e3%82%a3%e3%82%b9%e3%82%af%e8%a3%bd%e9%80%a0\/","title":{"rendered":"\u3069\u306e\u3088\u3046\u306b\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u5f62\u72b6\u30c7\u30a3\u30b9\u30af\u751f\u7523"},"content":{"rendered":"<p><\/p>\n<figure data-line=\"2\"><img decoding=\"async\" src=\"https:\/\/statics.mylandingpages.co\/static\/aaanxdmf26c522mp\/image\/309f38969f894792bafdd79a55928566.webp\" alt=\"\u3069\u306e\u3088\u3046\u306b\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u5f62\u72b6\u30c7\u30a3\u30b9\u30af\u751f\u7523\" class=\"md-zoom\"><\/figure>\n<p><\/p>\n<p data-line=\"4\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30c7\u30a3\u30b9\u30af\u6280\u8853\u306f\u3001\u6bd4\u985e\u306e\u306a\u3044\u7cbe\u5ea6\u3067\u8907\u96d1\u306a\u69cb\u9020\u306e\u5275\u9020\u3092\u53ef\u80fd\u306b\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306b\u9769\u547d\u3092\u8d77\u3053\u3057\u307e\u3059\u3002 \u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u30d7\u30e9\u30ba\u30de\u3092\u4f7f\u7528\u3057\u3066\u57fa\u677f\u304b\u3089\u6750\u6599\u3092\u524a\u9664\u3057\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u8fd1\u4ee3\u7684\u306a\u30c7\u30a3\u30b9\u30af\u6280\u8853\u306b\u5fc5\u8981\u306a\u7d30\u304b\u3044\u8a73\u7d30\u3092\u9054\u6210\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u9ad8\u7cbe\u5ea6\u3067\u5c0f\u3055\u306a\u6a5f\u80fd\u3092\u751f\u307f\u51fa\u3059\u80fd\u529b\u306f\u3001\u5927\u91cf\u751f\u7523\u306b\u6b20\u304b\u305b\u306a\u3044\u3082\u306e\u3002 \u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u3082\u751f\u7523\u30b5\u30a4\u30af\u30eb\u3092\u52a0\u901f\u3057\u3001\u6642\u9593\u3092\u7bc0\u7d04\u3057\u3001\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3057\u307e\u3059\u3002 \u30b9\u30d4\u30fc\u30c9\u3001\u6c4e\u7528\u6027\u3001\u7cbe\u5ea6\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u3067\u3001\u5148\u9032\u7684\u304b\u3064\u52b9\u7387\u7684\u306a\u30c7\u30a3\u30b9\u30af\u88fd\u54c1\u306b\u5bfe\u3059\u308b\u6210\u9577\u3059\u308b\u9700\u8981\u306b\u5fdc\u3048\u308b\u696d\u754c\u3092\u652f\u63f4\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h2 data-line=\"6\" id=\"Key Takeaways\">\u8981\u70b9<\/h2>\n<p><\/p>\n<ul data-line=\"8\"><\/p>\n<li data-line=\"8\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001\u8907\u96d1\u306a\u30c7\u30a3\u30b9\u30af\u69cb\u9020\u3092\u9ad8\u7cbe\u5ea6\u306b\u4f5c\u6210\u3057\u3001\u8fd1\u4ee3\u7684\u306a\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306e\u790e\u77f3\u3092\u4f5c\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059.<\/li>\n<p><\/p>\n<li data-line=\"9\">\u30d7\u30ed\u30bb\u30b9\u306f\u6750\u6599\u3092\u53d6\u9664\u304f\u305f\u3081\u306b\u30a4\u30aa\u30f3\u5316\u3055\u308c\u305f\u30ac\u30b9\u3092\u5229\u7528\u3057\u307e\u3001\u9ad8\u5ea6\u306e\u6280\u8853\u306e\u8981\u6c42\u306b\u5fdc\u3058\u308b\u9855\u5fae\u93e1\u6a5f\u80fd\u306e\u751f\u7523\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059.<\/li>\n<p><\/p>\n<li data-line=\"10\">\u30dc\u30c3\u30b7\u30e5\u30d7\u30ed\u30bb\u30b9\u3001RIE\u3001\u304a\u3088\u3073ICP-RIE\u306e\u3088\u3046\u306a\u6280\u8853\u306f\u3001\u30e1\u30fc\u30ab\u30fc\u304c\u7279\u5b9a\u306e\u751f\u7523\u30cb\u30fc\u30ba\u306b\u57fa\u3065\u3044\u3066\u305d\u306e\u30a2\u30d7\u30ed\u30fc\u30c1\u3092\u8abf\u6574\u3067\u304d\u308b\u3088\u3046\u306b\u3001\u305d\u308c\u305e\u308c\u30e6\u30cb\u30fc\u30af\u306a\u5229\u70b9\u3092\u63d0\u4f9b\u3057\u307e\u3059.<\/li>\n<p><\/p>\n<li data-line=\"11\">ICP-RIE\u306f\u3001\u3088\u308a\u9ad8\u901f\u306a\u30a8\u30c3\u30c1\u30f3\u30b0\u901f\u5ea6\u3068\u512a\u308c\u305f\u7cbe\u5ea6\u3092\u5b9f\u73fe\u3057\u3001\u8907\u96d1\u306a\u8a2d\u8a08\u3084\u5927\u91cf\u751f\u7523\u306b\u6700\u9069\u3067\u3059.<\/li>\n<p><\/p>\n<li data-line=\"12\">\u9069\u5207\u306a\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853\u3092\u9078\u629e\u3059\u308b\u3068\u3001\u8a2d\u8a08\u8907\u96d1\u6027\u3001\u6750\u6599\u7d44\u6210\u3001\u751f\u7523\u91cf\u3001\u30b3\u30b9\u30c8\u306a\u3069\u306e\u30d0\u30e9\u30f3\u30b9\u8981\u56e0\u304c\u4f34\u3044\u307e\u3059.<\/li>\n<p><\/p>\n<li data-line=\"13\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853\u306f\u3001\u30e1\u30fc\u30ab\u30fc\u304c\u6025\u901f\u306b\u9032\u5316\u3059\u308b\u6280\u8853\u9762\u3067\u3001\u30c7\u30a3\u30b9\u30af\u88fd\u54c1\u306e\u6027\u80fd\u3092\u9769\u65b0\u3057\u3001\u9ad8\u3081\u308b\u3053\u3068\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059.<\/li>\n<p><\/ul>\n<p><\/p>\n<h2 data-line=\"15\" id=\"Understanding Plasma Etching Disk Processes\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30c7\u30a3\u30b9\u30af\u30d7\u30ed\u30bb\u30b9\u306e\u7406\u89e3<\/h2>\n<p><\/p>\n<figure data-line=\"17\"><img decoding=\"async\" src=\"https:\/\/statics.mylandingpages.co\/static\/aaanxdmf26c522mp\/image\/a2fbfb34c6424c79add7499613f00730.webp\" alt=\"\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30c7\u30a3\u30b9\u30af\u30d7\u30ed\u30bb\u30b9\u306e\u7406\u89e3\" class=\"md-zoom\"><\/figure>\n<p><\/p>\n<p data-line=\"21\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001\u8fd1\u4ee3\u7684\u306a\u30c7\u30a3\u30b9\u30af\u306e\u751f\u7523\u306b\u790e\u77f3\u306b\u306a\u308a\u307e\u3057\u305f\u3002 \u9ad8\u5ea6\u306a\u6280\u8853\u3092\u6d3b\u7528\u3059\u308b\u3053\u3068\u3067\u3001\u4eca\u65e5\u306e\u9ad8\u6027\u80fd\u30c7\u30a3\u30b9\u30af\u6280\u8853\u306b\u5fc5\u8981\u306a\u7cbe\u5ea6\u3068\u8907\u96d1\u3055\u3092\u5b9f\u73fe\u3067\u304d\u307e\u3059\u3002 \u3053\u306e\u30bb\u30af\u30b7\u30e7\u30f3\u3067\u306f\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u305d\u306e\u52d5\u4f5c\u539f\u7406\u306e\u6839\u672c\u7684\u306a\u90e8\u5206\u306b\u5c55\u958b\u3057\u3001\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306b\u304a\u3051\u308b\u5909\u9769\u7684\u306a\u5f79\u5272\u3092\u660e\u78ba\u306b\u7406\u89e3\u3057\u3066\u3044\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"23\" id=\"What is Plasma Etching?\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u306f?<\/h3>\n<p><\/p>\n<h4 data-line=\"25\" id=\"Definition and principles of plasma etching in disk production.\">\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306b\u304a\u3051\u308b\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306e\u5b9a\u7fa9\u3068\u539f\u7406.<\/h4>\n<p><\/p>\n<p data-line=\"27\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u306f\u3001\u30a4\u30aa\u30f3\u5316\u30ac\u30b9\u3001\u30d7\u30e9\u30ba\u30de\u3001\u57fa\u677f\u304b\u3089\u6750\u6599\u3092\u9664\u53bb\u3059\u308b\u4e7e\u71e5\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u3092\u6307\u3057\u307e\u3059\u3002 \u30c7\u30a3\u30b9\u30af\u751f\u7523\u3067\u306f\u3001\u3053\u306e\u65b9\u6cd5\u306f\u3001\u975e\u5e38\u306b\u7cbe\u5ea6\u306e\u9ad8\u3044\u8907\u96d1\u306a\u30d1\u30bf\u30fc\u30f3\u3068\u69cb\u9020\u306e\u4f5c\u6210\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002 \u30d7\u30ed\u30bb\u30b9\u306f\u3001\u30d7\u30e9\u30ba\u30de\u3068\u6750\u6599\u8868\u9762\u306e\u9593\u306e\u76f8\u4e92\u4f5c\u7528\u306b\u4f9d\u5b58\u3057\u307e\u3059\u3002, \u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30a4\u30aa\u30f3\u3068\u53cd\u5fdc\u7a2e\u304c\u5206\u89e3\u3057\u3001\u4e0d\u8981\u306a\u5c64\u3092\u524a\u9664\u3057\u307e\u3059\u3002. \u3053\u306e\u7cbe\u5bc6\u306f\u3001\u8fd1\u4ee3\u7684\u306a\u30c7\u30a3\u30b9\u30af\u3067\u5fc5\u8981\u306a\u9855\u5fae\u93e1\u6a5f\u80fd\u3092\u4f5c\u6210\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u306a\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u884c\u3044\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"29\">\u8840\u6f3f\u30a8\u30c3\u30c1\u30f3\u30b0\u306e\u539f\u7406\u306f\u3001\u5236\u5fa1\u3055\u308c\u305f\u5316\u5b66\u304a\u3088\u3073\u7269\u7406\u7684\u53cd\u5fdc\u3092\u5dfb\u304d\u8d77\u3053\u3057\u307e\u3059\u3002 \u30ac\u30b9\u7d44\u6210\u3001\u5727\u529b\u3001\u96fb\u529b\u306a\u3069\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u3092\u8abf\u6574\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u3001\u7279\u5b9a\u306e\u8981\u4ef6\u3092\u6e80\u305f\u3059\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u3092\u8abf\u6574\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u3053\u306e\u9069\u5fdc\u6027\u306f\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u304c\u30c7\u30a3\u30b9\u30af\u57fa\u677f\u4e0a\u306b\u8907\u96d1\u306a\u30c7\u30b6\u30a4\u30f3\u3092\u4f5c\u6210\u3059\u308b\u305f\u3081\u306e\u6c4e\u7528\u6027\u306e\u9ad8\u3044\u30c4\u30fc\u30eb\u3067\u3042\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h4 data-line=\"31\" id=\"Key components and their roles in the plasma etching process.\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u4e3b\u8981\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3068\u305d\u306e\u5f79\u5272.<\/h4>\n<p><\/p>\n<p data-line=\"33\">\u8907\u6570\u306e\u91cd\u8981\u306a\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u3092\u99c6\u52d5\u3057\u307e\u3059\u3002 \u30b6\u30fb\u30aa\u30d6\u30fb\u30b6\u30fb <strong>\u30d7\u30e9\u30ba\u30de\u30c1\u30e3\u30f3\u30d0\u30fc<\/strong> \u30a8\u30c3\u30c1\u30f3\u30b0\u304c\u8d77\u3053\u308b\u74b0\u5883\u3068\u3057\u3066\u6a5f\u80fd\u3057\u3001\u30d7\u30e9\u30ba\u30de\u751f\u6210\u306b\u5fc5\u8981\u306a\u6761\u4ef6\u3092\u7dad\u6301\u3057\u307e\u3059\u3002 \u5ba4\u5185\u3067\u306f\u3001\u30d5\u30c3\u7d20\u3084\u5869\u7d20\u306a\u3069\u306e\u30ac\u30b9\u304c\u5c0e\u5165\u3055\u308c\u3001\u30d7\u30e9\u30ba\u30de\u3092\u5f62\u6210\u3057\u307e\u3059\u3002 \u30b6\u30fb\u30aa\u30d6\u30fb\u30b6\u30fb <strong>\u7121\u7dda\u5468\u6ce2\u6570(RF)\u96fb\u6e90<\/strong> \u30ac\u30b9\u5206\u5b50\u3092\u6d3b\u6027\u5316\u3057\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u306b\u5fc5\u8981\u306a\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30a4\u30aa\u30f3\u3092\u4f5c\u308b.<\/p>\n<p><\/p>\n<p data-line=\"35\">\u306b\u3064\u3044\u3066 <strong>\u57fa\u6750\u30db\u30eb\u30c0\u30fc<\/strong>\u3001\u307e\u305f\u306f\u30c1\u30e3\u30c3\u30af\u306f\u30d7\u30ed\u30bb\u30b9\u306e\u9593\u306b\u30c7\u30a3\u30b9\u30af\u6750\u6599\u3092\u3057\u3063\u304b\u308a\u6b62\u3081\u307e\u3059\u3002 \u904e\u71b1\u3092\u9632\u3050\u305f\u3081\u306e\u6e29\u5ea6\u5236\u5fa1\u6a5f\u80fd\u304c\u983b\u7e41\u306b\u542b\u307e\u308c\u3066\u304a\u308a\u3001\u57fa\u677f\u3092\u640d\u50b7\u3055\u305b\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002 \u3055\u3089\u306b\u3001 <strong>\u771f\u7a7a\u30b7\u30b9\u30c6\u30e0<\/strong> \u4e0d\u7d14\u7269\u3092\u53d6\u9664\u304d\u3001\u4f4e\u5727\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u306b\u3088\u3063\u3066\u5236\u5fa1\u3055\u308c\u305f\u5927\u6c17\u3092\u4fdd\u969c\u3057\u307e\u3059\u3002 \u5404\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u8981\u6c42\u306e\u7cbe\u5ea6\u3068\u52b9\u7387\u6027\u3092\u5b9f\u73fe\u3059\u308b\u305f\u3081\u306b\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"37\" id=\"How Plasma Etching Works\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306e\u4ed5\u7d44\u307f<\/h3>\n<p><\/p>\n<h4 data-line=\"39\" id=\"The role of plasma discharges in material removal.\">\u7269\u8cea\u9664\u53bb\u306b\u304a\u3051\u308b\u30d7\u30e9\u30ba\u30de\u653e\u96fb\u306e\u5f79\u5272.<\/h4>\n<p><\/p>\n<p data-line=\"41\">\u30d7\u30e9\u30ba\u30de\u653e\u96fb\u306f\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306e\u5fc3\u81d3\u306b\u5618\u3092\u3064\u304f\u3002 \u30d7\u30e9\u30ba\u30de\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u3067\u30ac\u30b9\u304c\u30a4\u30aa\u30f3\u5316\u3055\u308c\u308b\u3068\u3001\u30a4\u30aa\u30f3\u3001\u96fb\u5b50\u3001\u30cb\u30e5\u30fc\u30c8\u30e9\u30eb\u7c92\u5b50\u306e\u6df7\u5408\u7269\u3092\u5f62\u6210\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306f\u57fa\u8cea\u306e\u8868\u9762\u3092\u7206\u7834\u3057\u3001\u5206\u5b50\u306e\u7d50\u675f\u3092\u58ca\u3057\u3001\u5c64\u306b\u3088\u3063\u3066\u6750\u6599\u306e\u5c64\u3092\u53d6\u9664\u304f\u7c92\u5b50\u3092\u6e80\u305f\u3057\u307e\u3057\u305f\u3002 \u3053\u306e\u30e1\u30ab\u30cb\u30ba\u30e0\u306f\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u304c\u6bd4\u985e\u306e\u306a\u3044\u7cbe\u5ea6\u3092\u9054\u6210\u3057\u3001\u30c7\u30a3\u30b9\u30af\u6280\u8853\u3067\u898b\u3064\u304b\u3063\u305f\u8907\u96d1\u306a\u6a5f\u80fd\u3092\u4f5c\u6210\u3059\u308b\u306e\u306b\u7406\u60f3\u7684\u3067\u3059.<\/p>\n<p><\/p>\n<p data-line=\"43\">\u30d7\u30e9\u30ba\u30de\u653e\u96fb\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u306f\u30a8\u30c3\u30c1\u30f3\u30b0\u901f\u5ea6\u3068\u6df1\u3055\u3092\u6c7a\u5b9a\u3057\u307e\u3059\u3002 \u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30a4\u30aa\u30f3\u306f\u3088\u308a\u6df1\u3044\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u304c\u3001\u3088\u308a\u4f4e\u3044\u30a8\u30cd\u30eb\u30ae\u30fc \u30ec\u30d9\u30eb\u306f\u3088\u308a\u654f\u611f\u306a\u7269\u8cea\u7684\u306a\u53d6\u308a\u5916\u3057\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002 \u3053\u306e\u67d4\u8edf\u6027\u306b\u3088\u308a\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001\u6d45\u3044\u30d1\u30bf\u30fc\u30f3\u306e\u4f5c\u6210\u304b\u3089\u3001\u6df1\u3044\u8907\u96d1\u306a\u69cb\u9020\u306e\u5f62\u6210\u307e\u3067\u3001\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306e\u591a\u69d8\u306a\u30cb\u30fc\u30ba\u3092\u6e80\u305f\u3059\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p><\/p>\n<h4 data-line=\"45\" id=\"Chemical and physical interactions during the etching process.\">\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u4e2d\u306e\u5316\u5b66\u7684\u304a\u3088\u3073\u7269\u7406\u7684\u76f8\u4e92\u4f5c\u7528.<\/h4>\n<p><\/p>\n<p data-line=\"47\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001\u6750\u6599\u3092\u9664\u53bb\u3059\u308b\u305f\u3081\u306e\u5316\u5b66\u7684\u304a\u3088\u3073\u7269\u7406\u7684\u76f8\u4e92\u4f5c\u7528\u306e\u7d44\u307f\u5408\u308f\u305b\u306b\u4f9d\u5b58\u3057\u307e\u3059\u3002 \u30d7\u30e9\u30ba\u30de\u4e2d\u306e\u5316\u5b66\u53cd\u5fdc\u6027\u7a2e\u3001\u30e9\u30b8\u30ab\u30eb\u306a\u3069\u3001\u63ee\u767a\u6027\u526f\u7523\u7269\u3092\u5f62\u6210\u3059\u308b\u305f\u3081\u306b\u57fa\u6750\u3068\u53cd\u5fdc\u3059\u308b\u3002 \u3053\u308c\u3089\u306e\u526f\u7523\u7269\u306f\u3001\u76ee\u7684\u306e\u30d1\u30bf\u30fc\u30f3\u306e\u80cc\u5f8c\u306b\u3042\u308b\u30c1\u30e3\u30f3\u30d0\u30fc\u304b\u3089\u907f\u96e3\u3057\u307e\u3059\u3002 \u7269\u7406\u7684\u306b\u3001\u30a4\u30aa\u30f3\u30dc\u30f3\u30c9\u306f\u5206\u5b50\u7d50\u5408\u3092\u58ca\u3057\u3001\u53cd\u5fdc\u901f\u5ea6\u3092\u5897\u52a0\u3055\u305b\u308b\u3053\u3068\u306b\u3088\u3063\u3066\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u3092\u9ad8\u3081\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"49\">\u3053\u306e\u30c7\u30e5\u30a2\u30eb\u30a2\u30af\u30b7\u30e7\u30f3\u30a2\u30d7\u30ed\u30fc\u30c1\u306b\u3088\u308a\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u304c\u7cbe\u5ea6\u3068\u52b9\u7387\u6027\u3092\u4e21\u7acb\u3055\u305b\u308b\u3053\u3068\u304c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3059\u3002 \u5316\u5b66\u53cd\u5fdc\u306f\u9078\u629e\u6027\u3092\u63d0\u4f9b\u3057\u3001\u88fd\u9020\u696d\u8005\u304c\u7279\u5b9a\u306e\u6750\u6599\u3092\u30bf\u30fc\u30b2\u30c3\u30c8\u306b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u304c\u3001\u7269\u7406\u7684\u306a\u76f8\u4e92\u4f5c\u7528\u306f\u30d7\u30ed\u30bb\u30b9\u306e\u5168\u4f53\u7684\u306a\u6709\u52b9\u6027\u3092\u9ad8\u3081\u307e\u3059\u3002 \u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001\u30c7\u30a3\u30b9\u30af\u88fd\u9020\u306e\u672a\u6765\u3092\u5f62\u4f5c\u308b\u305f\u3081\u306e\u5f37\u529b\u306a\u30c4\u30fc\u30eb\u3067\u3059.<\/p>\n<p><\/p>\n<h2 data-line=\"51\" id=\"Techniques of Plasma Etching in Disk Production\">\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306b\u304a\u3051\u308b\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853<\/h2>\n<p><\/p>\n<figure data-line=\"53\"><img decoding=\"async\" src=\"https:\/\/statics.mylandingpages.co\/static\/aaanxdmf26c522mp\/image\/25e76b118c474f28aa026462a6428fa7.webp\" alt=\"\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306b\u304a\u3051\u308b\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853\" class=\"md-zoom\"><\/figure>\n<p><\/p>\n<p data-line=\"57\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30c7\u30a3\u30b9\u30af\u6280\u8853\u306f\u3001\u8fd1\u4ee3\u7684\u306a\u30c7\u30a3\u30b9\u30af\u88fd\u9020\u306b\u5fc5\u8981\u306a\u7cbe\u5ea6\u3068\u8907\u96d1\u6027\u3092\u5b9f\u73fe\u3059\u308b\u9ad8\u5ea6\u306a\u6280\u8853\u306b\u4f9d\u5b58\u3057\u3066\u3044\u307e\u3059\u3002 \u5404\u65b9\u6cd5\u306f\u3001\u30e1\u30fc\u30ab\u30fc\u304c\u7279\u5b9a\u306e\u751f\u7523\u8981\u6c42\u3092\u6e80\u305f\u3059\u3053\u3068\u3092\u53ef\u80fd\u306b\u3059\u308b\u3001\u30e6\u30cb\u30fc\u30af\u306a\u5229\u70b9\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002 \u3053\u306e\u30bb\u30af\u30b7\u30e7\u30f3\u3067\u306f\u3001Bosch \u30d7\u30ed\u30bb\u30b9\u3001Reactive Ion Etching (RIE)\u3001\u304a\u3088\u3073 Inductively coupled Plasma Reactive Ion Etching (ICP-RIE) \u306e 3 \u3064\u306e\u8457\u540d\u306a\u6280\u8853\u3092\u63a2\u308a\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"59\" id=\"The Bosch Process\">\u30dc\u30c3\u30b7\u30e5\u30d7\u30ed\u30bb\u30b9<\/h3>\n<p><\/p>\n<h4 data-line=\"61\" id=\"Overview and applications of the Bosch process in disk manufacturing.\">\u30c7\u30a3\u30b9\u30af\u88fd\u9020\u306b\u304a\u3051\u308bBosch\u30d7\u30ed\u30bb\u30b9\u306e\u6982\u8981\u3068\u9069\u7528.<\/h4>\n<p><\/p>\n<p data-line=\"63\">\u30dc\u30c3\u30b7\u30e5\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u30fb\u30e9\u30c6\u30a3\u30aa\u69cb\u9020\u3092\u4f5c\u6210\u3059\u308b\u305f\u3081\u306b\u8a2d\u8a08\u3055\u308c\u305f\u7279\u6b8a\u306a\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853\u3068\u3057\u3066\u969b\u7acb\u3063\u3066\u3044\u307e\u3059\u3002 \u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u30d1\u30c3\u30b7\u30d9\u30fc\u30b7\u30e7\u30f3\u306e\u30b9\u30c6\u30c3\u30d7\u3092\u4ea4\u4e92\u306b\u3057\u3001\u6df1\u3055\u3068\u30b5\u30a4\u30c9\u30a6\u30a9\u30fc\u30eb\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u306e\u6b63\u78ba\u306a\u5236\u5fa1\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002 \u30c7\u30a3\u30b9\u30af\u88fd\u9020\u3067\u306f\u3001Bosch\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u9ad8\u5ea6\u306a\u30c7\u30a3\u30b9\u30af\u6280\u8853\u306b\u4e0d\u53ef\u6b20\u306a\u8907\u96d1\u306a\u30d1\u30bf\u30fc\u30f3\u3068\u6df1\u3044\u5fae\u7d30\u69cb\u9020\u3092\u88fd\u9020\u3059\u308b\u305f\u3081\u306b\u6709\u610f\u3067\u3042\u308b\u3053\u3068\u3092\u8a3c\u660e\u3057\u3066\u3044\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"65\">\u30e1\u30fc\u30ab\u30fc\u306f\u3001Bosch \u30d7\u30ed\u30bb\u30b9\u3092\u4f7f\u7528\u3057\u3066\u3001\u4f8b\u5916\u7684\u306a\u8a73\u7d30\u3068\u5747\u4e00\u6027\u3092\u5fc5\u8981\u3068\u3059\u308b\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3092\u88fd\u9020\u3057\u307e\u3059\u3002 \u6700\u5c0f\u9650\u306e\u30a2\u30f3\u30c0\u30fc\u30ab\u30c3\u30c8\u3067\u5782\u76f4\u30b5\u30a4\u30c9\u30a6\u30a9\u30fc\u30eb\u3092\u4f5c\u6210\u3059\u308b\u80fd\u529b\u306f\u3001\u9ad8\u3044\u7cbe\u5ea6\u3092\u8981\u6c42\u3059\u308b\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u6700\u9069\u3067\u3059\u3002 \u3053\u306e\u6280\u8853\u306f\u3001\u30de\u30a4\u30af\u30ed\u96fb\u5149\u6a5f\u68b0\u30b7\u30b9\u30c6\u30e0(MEMS)\u3068\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u88fd\u9020\u306b\u304a\u3044\u3066\u3001\u30c7\u30a3\u30b9\u30af\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3068\u985e\u4f3c\u6027\u3092\u5171\u6709\u3057\u3066\u3044\u307e\u3059.<\/p>\n<p><\/p>\n<h4 data-line=\"67\" id=\"Advantages of the Bosch process for achieving deep and precise etching.\">\u30dc\u30c3\u30b7\u30e5\u30d7\u30ed\u30bb\u30b9\u306e\u5229\u70b9\u306f\u3001\u6df1\u304f\u7cbe\u5bc6\u306a\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u5b9f\u73fe\u3057\u307e\u3059.<\/h4>\n<p><\/p>\n<p data-line=\"69\">\u30dc\u30c3\u30b7\u30e5\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u30c7\u30a3\u30b9\u30af\u306e\u751f\u7523\u306b\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u3044\u304f\u3064\u304b\u306e\u5229\u70b9\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002 \u305d\u306e\u5909\u66f4\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u30d1\u30c3\u30b7\u30d6\u30a2\u30d7\u30ed\u30fc\u30c1\u306f\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u6df1\u3055\u3068\u30b5\u30a4\u30c9\u30a6\u30a9\u30fc\u30eb\u306e\u89d2\u5ea6\u306e\u6bd4\u985e\u306e\u306a\u3044\u5236\u5fa1\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002 \u3053\u306e\u7cbe\u5ea6\u306b\u3088\u308a\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u8907\u96d1\u306a\u8a2d\u8a08\u3067\u3082\u4e00\u8cab\u3057\u305f\u7d50\u679c\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"71\">\u3082\u3046\u4e00\u3064\u306e\u91cd\u8981\u306a\u5229\u70b9\u306f\u3001\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u30fb\u30e9\u30c6\u30a3\u30aa\u69cb\u9020\u7269\u3092\u4f5c\u308a\u51fa\u3059\u80fd\u529b\u306b\u3042\u308a\u307e\u3059\u3002 \u5782\u76f4\u30b5\u30a4\u30c9\u30a6\u30a9\u30fc\u30eb\u3092\u7dad\u6301\u3057\u3001\u6750\u6599\u306e\u640d\u5931\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u3053\u3068\u306b\u3088\u308a\u3001Bosch \u30d7\u30ed\u30bb\u30b9\u306f\u3001\u69cb\u9020\u7684\u5b8c\u5168\u6027\u3092\u640d\u306a\u3046\u3053\u3068\u306a\u304f\u3001\u8907\u96d1\u306a\u6a5f\u80fd\u306e\u4f5c\u6210\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002 \u30c7\u30a3\u30b9\u30af\u306e\u6027\u80fd\u304a\u3088\u3073\u4fe1\u983c\u6027\u3092\u9ad8\u3081\u3001\u73fe\u4ee3\u6280\u8853\u306e\u53b3\u5bc6\u306a\u8981\u6c42\u3092\u6e80\u305f\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"73\" id=\"Reactive Ion Etching (RIE)\">\u53cd\u5fdc\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0(RIE)<\/h3>\n<p><\/p>\n<h4 data-line=\"75\" id=\"How RIE combines chemical and physical etching for disk production.\">RIE\u306f\u3001\u30c7\u30a3\u30b9\u30af\u306e\u751f\u7523\u306e\u305f\u3081\u306b\u5316\u5b66\u304a\u3088\u3073\u7269\u7406\u7684\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u7d44\u307f\u5408\u308f\u305b\u305f\u65b9\u6cd5.<\/h4>\n<p><\/p>\n<p data-line=\"77\">\u53cd\u5fdc\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0(RIE)\u306f\u3001\u5316\u5b66\u53cd\u5fdc\u3068\u7269\u7406\u7684\u306a\u30a4\u30aa\u30f3\u30dc\u30f3\u30d0\u30fc\u30e1\u30f3\u30c8\u3092\u7d44\u307f\u5408\u308f\u305b\u3001\u57fa\u677f\u304b\u3089\u6750\u6599\u3092\u9664\u53bb\u3057\u307e\u3059\u3002 \u3053\u306e\u30c7\u30e5\u30a2\u30eb\u30a2\u30af\u30b7\u30e7\u30f3\u30a2\u30d7\u30ed\u30fc\u30c1\u306b\u3088\u308a\u3001RIE\u306f\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306b\u304a\u3051\u308b\u6c4e\u7528\u6027\u306e\u9ad8\u3044\u30c4\u30fc\u30eb\u3068\u3057\u3066\u3001\u9078\u629e\u6027\u3068\u7cbe\u5ea6\u306e\u4e21\u65b9\u3092\u5b9f\u73fe\u3067\u304d\u307e\u3059\u3002 \u30ac\u30b9\u7d44\u6210\u3084\u96fb\u529b\u30ec\u30d9\u30eb\u306a\u3069\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u3092\u8abf\u6574\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u3001\u7279\u5b9a\u306e\u8a2d\u8a08\u8981\u4ef6\u3092\u6e80\u305f\u3059\u305f\u3081\u306b\u30d7\u30ed\u30bb\u30b9\u3092\u8abf\u6574\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"79\">RIE\u306f\u3001\u30c7\u30a3\u30b9\u30af\u8868\u9762\u306b\u7d30\u304b\u3044\u8a73\u7d30\u3068\u8907\u96d1\u306a\u30d1\u30bf\u30fc\u30f3\u3092\u4f5c\u6210\u3059\u308b\u969b\u306b\u512a\u308c\u3066\u3044\u307e\u3059\u3002 \u7279\u5b9a\u306e\u6750\u6599\u3092\u30bf\u30fc\u30b2\u30c6\u30a3\u30f3\u30b0\u3059\u308b\u80fd\u529b\u306f\u3001\u6240\u671b\u306e\u9818\u57df\u306e\u307f\u304c\u30a8\u30c3\u30c1\u30f3\u30b0\u3055\u308c\u3001\u4ed6\u306e\u9818\u57df\u304c\u7121\u63a5\u89e6\u3067\u3042\u308b\u3053\u3068\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002 \u3053\u306e\u9078\u629e\u6027\u306f\u3001\u6750\u6599\u5ec3\u68c4\u7269\u3092\u524a\u6e1b\u3057\u3001\u751f\u7523\u52b9\u7387\u3092\u9ad8\u3081\u3001RIE\u3092\u591a\u304f\u306e\u30c7\u30a3\u30b9\u30af\u88fd\u9020\u7528\u9014\u306b\u597d\u307e\u3057\u3044\u9078\u629e\u306b\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h4 data-line=\"81\" id=\"Applications of RIE in creating intricate disk structures.\">\u8907\u96d1\u306a\u30c7\u30a3\u30b9\u30af\u69cb\u9020\u3092\u4f5c\u6210\u3059\u308bRIE\u306e\u9069\u7528.<\/h4>\n<p><\/p>\n<p data-line=\"83\">RIE\u306f\u3001\u8fd1\u4ee3\u7684\u306a\u30c7\u30a3\u30b9\u30af\u306b\u898b\u3089\u308c\u308b\u8907\u96d1\u306a\u69cb\u9020\u3092\u4f5c\u308b\u4e0a\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002 \u305d\u306e\u7cbe\u5ea6\u306f\u3001\u9ad8\u6027\u80fd\u30c7\u30a3\u30b9\u30af\u6280\u8853\u306b\u6b20\u304b\u305b\u306a\u3044\u30de\u30a4\u30af\u30ed\u30b9\u30b3\u30fc\u30d7\u6a5f\u80fd\u306e\u5f62\u6210\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002 \u88fd\u9020\u696d\u8005\u306fRIE\u306b\u5805\u3044\u8a31\u5bb9\u304a\u3088\u3073\u8907\u96d1\u306a\u5e7e\u4f55\u5b66\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3092\u3001\u6700\u9069\u6a5f\u80fd\u6027\u304a\u3088\u3073\u8010\u4e45\u6027\u3092\u4fdd\u969c\u3057\u307e\u3059\u4f5c\u308a\u51fa\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"85\">\u3053\u306e\u6280\u8853\u306f\u3001\u5149\u5b66\u304a\u3088\u3073\u96fb\u5b50\u5fdc\u7528\u3067\u4f7f\u7528\u3055\u308c\u308b\u3082\u306e\u306e\u3088\u3046\u306a\u9ad8\u5ea6\u306e\u30c7\u30a3\u30b9\u30af\u8a2d\u8a08\u306e\u958b\u767a\u3092\u3001\u652f\u3048\u307e\u3059\u3002 \u5316\u5b66\u30fb\u7269\u7406\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u3067\u3001\u30c7\u30a3\u30b9\u30af\u696d\u754c\u306e\u9032\u5316\u3059\u308b\u8981\u6c42\u306b\u5fdc\u3048\u308b\u305f\u3081\u306b\u5fc5\u8981\u306a\u67d4\u8edf\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002 \u305d\u306e\u9069\u5fdc\u6027\u3068\u6709\u52b9\u6027\u306f\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30c7\u30a3\u30b9\u30af\u306e\u751f\u7523\u306e\u790e\u77f3\u306b\u306a\u308a\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"87\" id=\"Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE)\">\u8a98\u5c0e\u30ab\u30c3\u30d7\u30eb \u30d7\u30e9\u30ba\u30de\u53cd\u5fdc\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0(ICP-RIE)<\/h3>\n<p><\/p>\n<h4 data-line=\"89\" id=\"Features and benefits of ICP-RIE in disk production.\">\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306b\u304a\u3051\u308bICP-RIE\u306e\u7279\u5fb4\u3068\u5229\u70b9.<\/h4>\n<p><\/p>\n<p data-line=\"91\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853\u306e\u6700\u5148\u7aef\u9032\u6b69\u3092\u8868\u3059\u3001\u8a98\u5c0e\u7d50\u5408\u30d7\u30e9\u30ba\u30de\u53cd\u5fdc\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0(ICP-RIE)\u3002 \u9ad8\u5bc6\u5ea6\u30d7\u30e9\u30ba\u30de\u3092\u751f\u6210\u3057\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u901f\u5ea6\u306e\u77ed\u7e2e\u3068\u5747\u4e00\u6027\u306e\u5411\u4e0a\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002 \u30c7\u30a3\u30b9\u30af\u751f\u7523\u3067\u306f\u3001ICP-RIE\u306f\u512a\u308c\u305f\u9078\u629e\u6027\u3068\u7cbe\u5ea6\u3092\u63d0\u4f9b\u3057\u3001\u8907\u6570\u306e\u6750\u6599\u3084\u8907\u96d1\u306a\u30d1\u30bf\u30fc\u30f3\u3092\u542b\u3080\u8907\u96d1\u306a\u30bf\u30b9\u30af\u306b\u6700\u9069\u3067\u3059.<\/p>\n<p><\/p>\n<p data-line=\"93\">ICP-RIE\u306e\u30b9\u30bf\u30f3\u30c9\u30a2\u30a6\u30c8\u6a5f\u80fd\u306e1\u3064\u306f\u3001\u5468\u56f2\u306e\u9818\u57df\u306b\u6700\u5c0f\u9650\u306e\u30c0\u30e1\u30fc\u30b8\u3067\u6df1\u304f\u30a8\u30c3\u30c1\u30f3\u30b0\u3059\u308b\u80fd\u529b\u3067\u3059\u3002 \u3053\u306e\u6a5f\u80fd\u306b\u3088\u308a\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u57fa\u677f\u306e\u5b8c\u5168\u6027\u3092\u640d\u306a\u3046\u3053\u3068\u306a\u304f\u3001\u8a73\u7d30\u306a\u8a2d\u8a08\u3092\u4f5c\u6210\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u307e\u305f\u3001ICP-RIE\u306f\u3001\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u30fb\u30e9\u30c6\u30a3\u30aa\u30fb\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3001\u9ad8\u5ea6\u30c7\u30a3\u30b9\u30af\u69cb\u9020\u306e\u88fd\u4f5c\u306b\u512a\u308c\u305f\u7cbe\u5ea6\u3092\u767a\u63ee\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h4 data-line=\"95\" id=\"Comparison of ICP-RIE with other plasma etching techniques.\">ICP-RIE\u3068\u4ed6\u306e\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853\u3068\u306e\u6bd4\u8f03.<\/h4>\n<p><\/p>\n<p data-line=\"97\">\u4ed6\u306e\u6280\u8853\u3068\u6bd4\u8f03\u3059\u308b\u3068\u3001ICP-RIE\u306f\u7cbe\u5ea6\u3068\u52b9\u7387\u306e\u9762\u3067\u660e\u78ba\u306a\u5229\u70b9\u3092\u793a\u3057\u307e\u3059\u3002 \u4f4e\u30d7\u30e9\u30ba\u30de\u5bc6\u5ea6\u3067\u52d5\u4f5c\u3059\u308b RIE \u3068\u306f\u7570\u306a\u308a\u3001ICP-RIE \u306f\u3001\u3088\u308a\u6fc3\u7e2e\u3055\u308c\u305f\u30d7\u30e9\u30ba\u30de\u3092\u751f\u6210\u3057\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u9ad8\u901f\u5316\u3057\u3001\u6750\u6599\u9664\u53bb\u306e\u5236\u5fa1\u3092\u6539\u5584\u3057\u307e\u3059\u3002 \u3053\u308c\u306b\u3088\u308a\u3001ICP-RIE\u306f\u3001\u6df1\u3044\u30b7\u30ea\u30b3\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u7cbe\u5bc6\u306a\u30d1\u30bf\u30fc\u30f3\u8ee2\u9001\u3092\u5fc5\u8981\u3068\u3059\u308b\u8981\u6c42\u306e\u53b3\u3057\u3044\u7528\u9014\u306b\u7279\u306b\u9069\u3057\u3066\u3044\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"99\">\u30dc\u30c3\u30b7\u30e5\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u30fb\u30e9\u30c6\u30a3\u30aa\u69cb\u9020\u306b\u6709\u52b9\u3067\u3042\u308a\u306a\u304c\u3089\u3001ICP-RIE\u306e\u6c4e\u7528\u6027\u304c\u6b20\u3051\u3066\u3044\u307e\u3059\u3002 \u8907\u6570\u306e\u6750\u6599\u3068\u8907\u96d1\u306a\u8a2d\u8a08\u3092\u51e6\u7406\u3059\u308b\u5f8c\u8005\u306e\u80fd\u529b\u306f\u3001\u8fd1\u4ee3\u7684\u306a\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306e\u30a8\u30c3\u30b8\u3092\u4e0e\u3048\u307e\u3059\u3002 \u901f\u5ea6\u3001\u7cbe\u5ea6\u3001\u9069\u5fdc\u6027\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u3067\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30c7\u30a3\u30b9\u30af\u6280\u8853\u306e\u65b0\u305f\u306a\u57fa\u6e96\u3092\u30bb\u30c3\u30c8.<\/p>\n<p><\/p>\n<h2 data-line=\"101\" id=\"Comparing Plasma Etching Methods for Disk Manufacturing\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u6cd5\u306e\u6bd4\u8f03<\/h2>\n<p><\/p>\n<h3 data-line=\"104\" id=\"RIE vs. ICP-RIE\">RIE\u5bfeICP-RIE<\/h3>\n<p><\/p>\n<h4 data-line=\"106\" id=\"Differences in precision, efficiency, and control for disk production.\">\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306e\u7cbe\u5ea6\u3001\u52b9\u7387\u6027\u3001\u5236\u5fa1\u306e\u9055\u3044.<\/h4>\n<p><\/p>\n<p data-line=\"108\">\u53cd\u5fdc\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0(RIE)\u3068\u8a98\u5c0e\u7d50\u5408\u30d7\u30e9\u30ba\u30de\u53cd\u5fdc\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0(ICP-RIE)\u306f\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306e2\u3064\u306e\u7570\u306a\u308b\u30a2\u30d7\u30ed\u30fc\u30c1\u3092\u8868\u3057\u3066\u3044\u307e\u3059\u3002 \u5404\u65b9\u6cd5\u306f\u7570\u306a\u3063\u305f\u88fd\u9020\u696d\u306e\u5fc5\u8981\u6027\u306e\u305f\u3081\u306b\u9069\u3057\u305f\u305d\u308c\u3089\u3092\u4f5c\u308b\u72ec\u7279\u306a\u5229\u70b9\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002 RIE\u306f\u30ac\u30b9\u69cb\u6210\u3001\u5727\u529b\u304a\u3088\u3073RF\u529b\u306e\u3088\u3046\u306a\u5909\u6570\u3092\u6700\u9069\u5316\u3059\u308b\u3053\u3068\u306b\u3088\u3063\u3066\u512a\u79c0\u306a\u9078\u629e\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002 \u3053\u306e\u6a5f\u80fd\u306b\u3088\u308a\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u7279\u5b9a\u306e\u6750\u6599\u3092\u7cbe\u5bc6\u306b\u30bf\u30fc\u30b2\u30c3\u30c8\u306b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u3057\u304b\u3057\u3001RIE\u306f\u30d7\u30e9\u30ba\u30de\u5bc6\u5ea6\u3068\u30a4\u30aa\u30f3\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u4f4e\u4e0b\u3055\u305b\u3001\u3088\u308a\u9045\u3044\u30a8\u30c3\u30c1\u30f3\u30b0\u901f\u5ea6\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002 \u3053\u306e\u5236\u9650\u306f\u3001\u3088\u308a\u6df1\u3044\u30a8\u30c3\u30c1\u30f3\u30b0\u304c\u5fc5\u8981\u306a\u3068\u304d\u306b\u30d7\u30ed\u30bb\u30b9\u6642\u9593\u3092\u5ef6\u9577\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"110\">\u4e00\u65b9\u3001ICP-RIE\u306f\u3001\u30a4\u30aa\u30f3\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u9ad8\u5bc6\u5ea6\u30d7\u30e9\u30ba\u30de\u3092\u767a\u751f\u3055\u305b\u307e\u3059\u3002 \u3053\u306e\u6a5f\u80fd\u306b\u3088\u308a\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u901f\u5ea6\u304c\u901f\u304f\u306a\u308a\u3001\u9078\u629e\u6027\u304c\u5411\u4e0a\u3057\u307e\u3059\u3002\u7279\u306b\u3001\u8907\u96d1\u306a\u30d1\u30bf\u30fc\u30f3\u3084\u8907\u6570\u306e\u6750\u6599\u3092\u95a2\u4e0e\u3059\u308b\u30bf\u30b9\u30af\u306b\u6700\u9069\u3067\u3059\u3002 ICP-RIE\u306f\u30d7\u30ed\u30d5\u30a3\u30fc\u30eb\u5236\u5fa1\u3067\u307e\u305fexcels\u3001\u5b8c\u5168\u306b\u7e26\u306e\u7279\u5fb4\u3092\u4f5c\u308a\u51fa\u3057\u3001\u9ad8\u3044anisotropy\u3092\u7dad\u6301\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u8cc7\u8cea\u306f\u7cbe\u5bc6\u304a\u3088\u3073\u52b9\u7387\u3092\u4e21\u65b9\u8981\u6c42\u3059\u308b\u8907\u96d1\u306a\u8a2d\u8a08\u306e\u305f\u3081\u306b\u305d\u308c\u3092\u7406\u60f3\u7684\u306b\u3057\u307e\u3059\u3002 RIE\u306f\u3001\u3088\u308a\u30b7\u30f3\u30d7\u30eb\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u6709\u52b9\u306e\u307e\u307e\u3067\u3059\u304c\u3001ICP-RIE\u306f\u3001\u9ad8\u5ea6\u306a\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306e\u305f\u3081\u306e\u3088\u308a\u9ad8\u3044\u57fa\u6e96\u3092\u8a2d\u5b9a\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h4 data-line=\"112\" id=\"Suitability of each method for specific disk manufacturing needs.\">\u7279\u5b9a\u306e\u30c7\u30a3\u30b9\u30af\u88fd\u9020\u30cb\u30fc\u30ba\u306b\u5fdc\u3058\u305f\u5404\u65b9\u6cd5\u306e\u9069\u5408\u6027.<\/h4>\n<p><\/p>\n<p data-line=\"114\">RIE \u3068 ICP-RIE \u306e\u9593\u306e\u9078\u629e\u306f\u3001\u30c7\u30a3\u30b9\u30af\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306e\u7279\u5b9a\u306e\u8981\u4ef6\u306b\u4f9d\u5b58\u3057\u307e\u3059\u3002 RIE\u306f\u3001\u9078\u629e\u6027\u3068\u6750\u6599\u306e\u30bf\u30fc\u30b2\u30c6\u30a3\u30f3\u30b0\u304c\u91cd\u8981\u3067\u3042\u308b\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002 \u305d\u306e\u30b7\u30f3\u30d7\u30eb\u3055\u3068\u6709\u52b9\u6027\u306f\u3001\u9ad8\u3044\u30a8\u30c3\u30c1\u30f3\u30b0\u901f\u5ea6\u3084\u6975\u7aef\u306a\u7cbe\u5ea6\u3092\u8981\u6c42\u3057\u306a\u3044\u30bf\u30b9\u30af\u306e\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u30aa\u30d7\u30b7\u30e7\u30f3\u306b\u306a\u308a\u307e\u3059\u3002 \u305f\u3068\u3048\u3070\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u3001\u6d45\u3044\u30d1\u30bf\u30fc\u30f3\u3092\u4f5c\u6210\u3057\u305f\u308a\u3001\u8907\u96d1\u306a\u8a2d\u8a08\u3067\u4f5c\u696d\u3057\u305f\u308a\u3059\u308b\u305f\u3081\u306bRIE\u3092\u4f7f\u7528\u3059\u308b\u3053\u3068\u304c\u3042\u308a\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"116\">ICP-RIE\u306f\u3001\u3088\u308a\u8981\u6c42\u306e\u53b3\u3057\u3044\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u3053\u3068\u3092\u8a3c\u660e\u3057\u307e\u3059\u3002 \u6700\u5c0f\u9650\u306e\u30c0\u30e1\u30fc\u30b8\u3067\u6df1\u3044\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u5b9f\u73fe\u3059\u308b\u80fd\u529b\u306f\u3001\u8907\u96d1\u306a\u69cb\u9020\u306e\u5b8c\u5168\u6027\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002 \u3053\u306e\u65b9\u6cd5\u306f\u3001\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u30fb\u30e9\u30c6\u30a3\u30aa\u306e\u30c7\u30b6\u30a4\u30f3\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3001\u30c1\u30e3\u30ec\u30f3\u30b8\u30f3\u30b0\u306a\u30bf\u30b9\u30af\u3067\u3082\u3001\u5353\u8d8a\u3057\u305f\u5747\u4e00\u6027\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002 \u30e1\u30fc\u30ab\u30fc\u306f\u3001\u30bf\u30a4\u30c8\u306a\u516c\u5dee\u3068\u8907\u96d1\u306a\u5e7e\u4f55\u5b66\u3092\u5fc5\u8981\u3068\u3059\u308b\u9ad8\u5ea6\u306a\u30c7\u30a3\u30b9\u30af\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3092\u4f5c\u6210\u3059\u308b\u305f\u3081\u306b\u3001\u3057\u3070\u3057\u3070ICP-RIE\u306b\u4f9d\u5b58\u3057\u3066\u3044\u307e\u3059\u3002 \u512a\u308c\u305f\u5236\u5fa1\u3068\u9069\u5fdc\u6027\u3092\u63d0\u4f9b\u3059\u308b\u3053\u3068\u3067\u3001ICP-RIE\u306f\u73fe\u4ee3\u306e\u30c7\u30a3\u30b9\u30af\u6280\u8853\u306e\u53b3\u683c\u306a\u8981\u6c42\u3092\u6e80\u305f\u3057\u3066\u3044\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"118\" id=\"Choosing the Right Plasma Etching Technique\">\u53f3\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853\u306e\u9078\u629e<\/h3>\n<p><\/p>\n<h4 data-line=\"120\" id=\"Factors influencing the choice of plasma etching methods in disk production.\">\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306b\u304a\u3051\u308b\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u65b9\u6cd5\u306e\u9078\u629e\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u8981\u56e0.<\/h4>\n<p><\/p>\n<p data-line=\"122\">\u9069\u5207\u306a\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853\u3092\u9078\u629e\u3059\u308b\u3068\u3001\u3044\u304f\u3064\u304b\u306e\u8981\u56e0\u3092\u8a55\u4fa1\u3057\u307e\u3059\u3002 \u8a2d\u8a08\u306e\u8907\u96d1\u3055\u306f\u91cd\u8981\u306a\u5f79\u5272\u3092\u62c5\u3044\u307e\u3059\u3002 \u8907\u96d1\u306a\u30d1\u30bf\u30fc\u30f3\u3084\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u30fb\u30e9\u30c6\u30a3\u30aa\u69cb\u9020\u7269\u306f\u3001\u3057\u3070\u3057\u3070ICP-RIE\u306e\u7cbe\u5ea6\u3068\u52b9\u7387\u6027\u3092\u5fc5\u8981\u3068\u3057\u307e\u3059\u3002 \u9006\u306b\u3001\u3088\u308a\u30b7\u30f3\u30d7\u30eb\u306a\u30c7\u30b6\u30a4\u30f3\u306f\u3001RIE\u306e\u7c21\u5358\u306a\u30a2\u30d7\u30ed\u30fc\u30c1\u304b\u3089\u5229\u76ca\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u6750\u6599\u7d44\u6210\u3082\u6c7a\u5b9a\u306b\u5f71\u97ff\u3092\u53ca\u307c\u3057\u307e\u3059\u3002 RIE\u306e\u512a\u308c\u305f\u9078\u629e\u6027\u306f\u3001\u7279\u5b9a\u306e\u6750\u6599\u3092\u9032\u5316\u3055\u305b\u308b\u30d7\u30ed\u30bb\u30b9\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002ICP-RIE\u306f\u8907\u6570\u306e\u6750\u6599\u3092\u5bb9\u6613\u306b\u51e6\u7406\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"124\">\u751f\u7523\u91cf\u304a\u3088\u3073\u6642\u9593\u306e\u5236\u7d04\u306f\u66f4\u306b\u9078\u629e\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u307e\u3059\u3002 ICP-RIE\u306e\u901f\u3044\u30a8\u30c3\u30c1\u30f3\u30b0\u7387\u306f\u52b9\u7387\u304c\u30d1\u30e9\u30de\u30a6\u30f3\u30c8\u3067\u3042\u308b\u5927\u91cf\u751f\u7523\u306b\u3068\u3063\u3066\u7406\u60f3\u7684\u3067\u3059\u3002 RIE\u306f\u3001\u3088\u308a\u9045\u3044\u30ec\u30fc\u30c8\u3067\u3001\u3088\u308a\u5c0f\u898f\u6a21\u306a\u64cd\u4f5c\u3084\u3001\u3088\u308a\u53b3\u3057\u3044\u30bf\u30a4\u30e0\u30e9\u30a4\u30f3\u3067\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u306b\u9069\u3057\u3066\u3044\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002 \u8cbb\u7528\u5bfe\u52b9\u679c\u3082\u671f\u5f85\u3067\u304d\u307e\u3059\u3002 ICP-RIE\u306f\u9ad8\u5ea6\u306a\u6a5f\u80fd\u3092\u63d0\u4f9b\u3057\u3066\u3044\u307e\u3059\u304c\u3001\u305d\u306e\u30b7\u30b9\u30c6\u30e0\u3068\u30d7\u30ed\u30bb\u30b9\u306f\u3088\u308a\u9ad8\u3044\u8cbb\u7528\u3092\u4f34\u3046\u5834\u5408\u304c\u3042\u308a\u307e\u3059\u3002 \u30e1\u30fc\u30ab\u30fc\u306f\u3001\u3053\u308c\u3089\u306e\u8981\u56e0\u3092\u91cf\u308a\u3001\u30cb\u30fc\u30ba\u306b\u6700\u9069\u306a\u65b9\u6cd5\u3092\u6c7a\u5b9a\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059.<\/p>\n<p><\/p>\n<h4 data-line=\"126\" id=\"Balancing cost, precision, and production efficiency.\">\u30b3\u30b9\u30c8\u30fb\u7cbe\u5ea6\u30fb\u751f\u7523\u52b9\u7387\u306e\u4e21\u7acb.<\/h4>\n<p><\/p>\n<p data-line=\"128\">\u30b3\u30b9\u30c8\u3001\u7cbe\u5ea6\u3001\u52b9\u7387\u6027\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u3068\u308a\u3001\u30c7\u30a3\u30b9\u30af\u751f\u7523\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u306e\u304c\u73fe\u72b6\u3067\u3059\u3002 RIE\u306f\u3001\u30cf\u30a4\u30a8\u30f3\u30c9\u306e\u6a5f\u80fd\u3092\u5fc5\u8981\u3068\u3057\u306a\u3044\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u305f\u3081\u306e\u8cbb\u7528\u5bfe\u52b9\u679c\u306e\u9ad8\u3044\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002 \u30b7\u30f3\u30d7\u30eb\u3055\u306f\u3001\u904b\u7528\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3057\u3001\u4e88\u7b97\u91cd\u8996\u306e\u30e1\u30fc\u30ab\u30fc\u306b\u3068\u3063\u3066\u9b45\u529b\u7684\u306a\u9078\u629e\u80a2\u3068\u306a\u308a\u307e\u3059\u3002 \u3057\u304b\u3057\u306a\u304c\u3089\u3001\u305d\u306e\u4f4e\u901f\u30a8\u30c3\u30c1\u30f3\u30b0\u901f\u5ea6\u306f\u3001\u5168\u4f53\u7684\u306a\u751f\u7523\u52b9\u7387\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"130\">ICP-RIE\u306f\u9ad8\u4fa1\u3067\u3059\u304c\u3001\u6bd4\u985e\u306e\u306a\u3044\u7cbe\u5ea6\u3068\u901f\u5ea6\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002 \u8907\u96d1\u306a\u8a2d\u8a08\u3092\u51e6\u7406\u3057\u3001\u6df1\u3044\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u9054\u6210\u3059\u308b\u80fd\u529b\u306f\u9ad8\u5ea6\u306e\u9069\u7528\u306e\u305f\u3081\u306e\u6295\u8cc7\u3092\u6b63\u5f53\u5316\u3057\u307e\u3059\u3002 \u30e1\u30fc\u30ab\u30fc\u306f\u3001\u8981\u6c42\u306e\u53b3\u3057\u3044\u30d7\u30ed\u30bb\u30b9\u306e\u305f\u3081\u306bRIE\u3092\u4f7f\u7528\u3057\u306a\u304c\u3089\u3001\u72ec\u81ea\u306e\u5f37\u307f\u3092\u8981\u6c42\u3059\u308b\u30bf\u30b9\u30af\u306e\u305f\u3081\u306b\u3001ICP-RIE\u3092\u4fdd\u5b58\u3059\u308b\u3053\u3068\u3067\u30b3\u30b9\u30c8\u3092\u6700\u9069\u5316\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u3053\u306e\u6226\u7565\u7684\u30a2\u30d7\u30ed\u30fc\u30c1\u306f\u3001\u30ea\u30bd\u30fc\u30b9\u304c\u52b9\u679c\u7684\u306b\u5272\u308a\u5f53\u3066\u3089\u308c\u3066\u3044\u308b\u3053\u3068\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002\u88fd\u9020\u696d\u8005\u306f\u54c1\u8cea\u3092\u59a5\u5354\u3059\u308b\u3053\u3068\u306a\u304f\u751f\u7523\u76ee\u6a19\u3092\u9054\u6210\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p><\/p>\n<blockquote data-line=\"132\"><p><\/p>\n<p data-line=\"132\">\u300c\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u6280\u8853\u306f\u3001\u30c7\u30a3\u30b9\u30af\u306e\u751f\u7523\u3092\u5909\u9769\u3057\u3001\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u3092\u5b9f\u8df5\u3057\u3001\u5353\u8d8a\u6027\u3092\u5b9f\u73fe\u300d<\/p>\n<p><\/p><\/blockquote>\n<p><\/p>\n<p data-line=\"134\">RIE\u3068ICP-RIE\u306e\u5f37\u307f\u3068\u9650\u754c\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u3067\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u60c5\u5831\u306b\u57fa\u3065\u3044\u305f\u6c7a\u5b9a\u3092\u884c\u3046\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u3053\u306e\u77e5\u8b58\u306f\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306e\u53ef\u80fd\u6027\u3092\u6700\u5927\u9650\u306b\u6d3b\u7528\u3057\u3001\u30c7\u30a3\u30b9\u30af\u6280\u8853\u306e\u9032\u6b69\u3092\u4fc3\u9032\u3057\u3001\u696d\u754c\u306e\u6210\u9577\u3092\u7d9a\u3051\u308b\u8981\u6c42\u306b\u5fdc\u3048\u308b\u3053\u3068\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<hr data-line=\"136\"><\/p>\n<p data-line=\"138\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u3001\u6bd4\u985e\u306e\u306a\u3044\u7cbe\u5ea6\u3068\u52b9\u7387\u6027\u3092\u767a\u63ee\u3057\u3001\u30c7\u30a3\u30b9\u30af\u88fd\u9020\u3092\u518d\u5b9a\u7fa9\u3057\u307e\u3057\u305f\u3002 \u30dc\u30c3\u30b7\u30e5\u30d7\u30ed\u30bb\u30b9\u3001RIE\u3001\u304a\u3088\u3073ICP-RIE\u306a\u3069\u306e\u6280\u8853\u306f\u3001\u8fd1\u4ee3\u7684\u306a\u30c7\u30a3\u30b9\u30af\u6280\u8853\u306e\u8907\u96d1\u306a\u8981\u6c42\u3092\u6e80\u305f\u3059\u305f\u3081\u306b\u30e1\u30fc\u30ab\u30fc\u306b\u6a29\u9650\u3092\u4e0e\u3048\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u65b9\u6cd5\u306f\u3001\u5353\u8d8a\u3057\u305f\u54c1\u8cea\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u3001\u9ad8\u5ea6\u306a\u30c7\u30b6\u30a4\u30f3\u306e\u4f5c\u6210\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002 3\u6b21\u5143\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u3068\u539f\u5b50\u30b9\u30b1\u30fc\u30eb\u306e\u7cbe\u5bc6\u306b\u696d\u754c\u304c\u9032\u5316\u3059\u308b\u4e2d\u3001\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u306f\u4eca\u5f8c\u3082\u9069\u5fdc\u3057\u7d9a\u3051\u3001\u30c7\u30a3\u30b9\u30af\u88fd\u9020\u306e\u672a\u6765\u3092\u5f62\u3065\u3051\u308b\u3068\u3044\u3046\u95a2\u9023\u6027\u3092\u78ba\u4fdd\u3057\u3066\u3044\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u6280\u8853\u3092\u7fd2\u5f97\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u3001\u512a\u308c\u305f\u6027\u80fd\u3092\u9054\u6210\u3057\u3001\u6025\u901f\u306b\u9032\u6b69\u3059\u308b\u6280\u8853\u9762\u3067\u306e\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u3092\u63a8\u9032\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30c7\u30a3\u30b9\u30af\u6280\u8853\u306f\u3001RIE\u3084ICP-RIE\u306a\u3069\u306e\u9ad8\u5ea6\u306a\u65b9\u6cd5\u3092\u4f7f\u7528\u3057\u3066\u3001\u6b63\u78ba\u306a\u3001\u8907\u96d1\u306a\u30c7\u30a3\u30b9\u30af\u69cb\u9020\u306e\u52b9\u7387\u7684\u306a\u751f\u7523\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059.<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[107],"tags":[120],"class_list":["post-617","post","type-post","status-publish","format-standard","hentry","category-blog","tag-plasma-etching-disk"],"_links":{"self":[{"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/posts\/617","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/comments?post=617"}],"version-history":[{"count":0,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/posts\/617\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/media?parent=617"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/categories?post=617"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/tags?post=617"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}