{"id":758,"date":"2024-12-02T13:59:51","date_gmt":"2024-12-02T05:59:51","guid":{"rendered":"http:\/\/weitai1.globaldeepsea.site\/pancake-susceptors-in-cvd-systems\/"},"modified":"2024-12-02T13:59:51","modified_gmt":"2024-12-02T05:59:51","slug":"cvd%e3%82%b7%e3%82%b9%e3%83%86%e3%83%a0%e3%81%ab%e3%81%8a%e3%81%91%e3%82%8b%e3%83%91%e3%83%b3%e3%82%b1%e3%83%bc%e3%82%ad%e3%81%ae%e5%8f%97%e5%ae%b9%e4%bd%93","status":"publish","type":"post","link":"https:\/\/www.cnvetenergy.com\/ja\/cvd%e3%82%b7%e3%82%b9%e3%83%86%e3%83%a0%e3%81%ab%e3%81%8a%e3%81%91%e3%82%8b%e3%83%91%e3%83%b3%e3%82%b1%e3%83%bc%e3%82%ad%e3%81%ae%e5%8f%97%e5%ae%b9%e4%bd%93\/","title":{"rendered":"\u30d1\u30f3\u30b1\u30fc\u30ad\u30b9\u30bb\u30d7\u30bf\u30fc\u3068CVD\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u5f79\u5272\u306e\u7406\u89e3"},"content":{"rendered":"<p><\/p>\n<figure data-line=\"2\"><img decoding=\"async\" src=\"https:\/\/statics.mylandingpages.co\/static\/aaanxdmf26c522mp\/image\/88901e12ea804534b0a87300ef0f8539.webp\" alt=\"\u30d1\u30f3\u30b1\u30fc\u30ad\u30b9\u30bb\u30d7\u30bf\u30fc\u3068CVD\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u5f79\u5272\u306e\u7406\u89e3\" class=\"md-zoom\"><\/figure>\n<p><\/p>\n<p data-line=\"4\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306f\u5316\u5b66\u84b8\u6c17\u306e\u6c88\u6bbf\u7269(CVD)\u30b7\u30b9\u30c6\u30e0\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u62c5\u3044\u307e\u3059\u3002 \u5e73\u3089\u3067\u5186\u5f62\u306e\u8a2d\u8a08\u306f\u5e83\u3044\u533a\u57df\u3092\u6e21\u308b\u5747\u4e00\u6696\u623f\u3092\u4fdd\u969c\u3057\u307e\u3001\u305d\u308c\u3089\u3092\u7cbe\u5bc6\u306a\u6e29\u5ea6\u5236\u5fa1\u3092\u8981\u6c42\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u306e\u305f\u3081\u306b\u5fc5\u8981\u4e0d\u53ef\u6b20\u306a\u3088\u3046\u306b\u3057\u307e\u3059\u3002 \u52b9\u7387\u7684\u306a\u71b1\u4f1d\u9054\u3092\u53ef\u80fd\u306b\u3059\u308b\u3053\u3068\u3067\u3001\u57fa\u677f\u4e0a\u306e\u9ad8\u54c1\u8cea\u306e\u8584\u819c\u306e\u84b8\u7740\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u7279\u306b\u91cd\u8981\u3067\u3042\u308a\u3001\u5c0f\u578b\u306e\u77db\u76fe\u3067\u3082\u88fd\u54c1\u6027\u80fd\u306b\u5f71\u97ff\u3092\u53ca\u307c\u3059\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002 \u5f7c\u3089\u306e\u6c4e\u7528\u6027\u3068\u6709\u52b9\u6027\u306f\u3001\u305d\u308c\u3089\u3092\u73fe\u4ee3\u306e\u71b1\u30d7\u30ed\u30bb\u30b9\u3067\u30b3\u30fc\u30ca\u30fc\u30b9\u30c8\u30fc\u30f3\u3092\u4f5c\u308a\u307e\u3057\u305f, SiC-\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u611f\u53d7\u6027\u306e\u305f\u3081\u306e\u5e02\u5834\u3092\u652f\u914d\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h2 data-line=\"6\" id=\"Key Takeaways\">\u8981\u70b9<\/h2>\n<p><\/p>\n<ul data-line=\"8\"><\/p>\n<li data-line=\"8\">\u30d1\u30f3\u30b1\u30fc\u30ad\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u4e0d\u53ef\u6b20\u306a\u9ad8\u54c1\u8cea\u306e\u8584\u819c\u3092\u4f5c\u6210\u3059\u308b\u305f\u3081\u306b\u91cd\u8981\u306aCVD\u30b7\u30b9\u30c6\u30e0\u3067\u5747\u4e00\u306a\u52a0\u71b1\u3092\u4fdd\u8a3c\u3057\u307e\u3059.<\/li>\n<p><\/p>\n<li data-line=\"9\">\u5e73\u3089\u3067\u5186\u5f62\u306e\u8a2d\u8a08\u306f\u6e29\u5ea6\u306e\u52fe\u914d\u3092\u6700\u5c0f\u306b\u3057\u307e\u3001\u4e00\u8cab\u3057\u305f\u6c88\u6bbf\u7269\u7387\u304a\u3088\u3073\u6539\u5584\u3055\u308c\u305f\u30d5\u30a3\u30eb\u30e0\u306e\u8cea\u306b\u5c0e\u304d\u307e\u3059.<\/li>\n<p><\/p>\n<li data-line=\"10\">\u70ad\u5316\u30b1\u30a4\u7d20\u3067\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u9ad8\u7d14\u5ea6\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u304b\u3089\u69cb\u6210\u3055\u308c\u3001\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306f\u6975\u7aef\u306a\u6761\u4ef6\u4e0b\u3067\u512a\u79c0\u306a\u71b1\u4f1d\u5c0e\u6027\u304a\u3088\u3073\u8010\u4e45\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059.<\/li>\n<p><\/p>\n<li data-line=\"11\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u3092CVD\u30d7\u30ed\u30bb\u30b9\u306b\u7d71\u5408\u3059\u308b\u3053\u3068\u3067\u3001\u71b1\u7ba1\u7406\u304c\u5411\u4e0a\u3057\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u6d88\u8cbb\u3092\u524a\u6e1b\u3057\u3001\u5168\u4f53\u7684\u306a\u88fd\u9020\u52b9\u7387\u3092\u5411\u4e0a\u3057\u307e\u3059.<\/li>\n<p><\/p>\n<li data-line=\"12\">\u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u3001\u534a\u5c0e\u4f53\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3060\u3051\u3067\u306a\u304f\u3001\u592a\u967d\u96fb\u6c60\u88fd\u9020\u3084\u9ad8\u5ea6\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306b\u3082\u4e0d\u53ef\u6b20\u3067\u3059\u3002\u3055\u307e\u3056\u307e\u306a\u696d\u754c\u306b\u304a\u3051\u308b\u9ad8\u54c1\u8cea\u306e\u6750\u6599\u306e\u9700\u8981\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u307e\u3059.<\/li>\n<p><\/p>\n<li data-line=\"13\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306f\u7cbe\u5bc6\u306a\u71b1\u5236\u5fa1\u304a\u3088\u3073\u7269\u8cea\u7684\u306a\u5b89\u5b9a\u6027\u3092\u4fdd\u969c\u3059\u308b\u3053\u3068\u306b\u3088\u3063\u3066\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u304a\u3088\u3073\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u9769\u65b0\u306b\u8457\u3057\u304f\u8ca2\u732e\u3057\u307e\u3059.<\/li>\n<p><\/ul>\n<p><\/p>\n<h2 data-line=\"15\" id=\"Overview of CVD Systems\">CVD\u30b7\u30b9\u30c6\u30e0\u306e\u6982\u8981<\/h2>\n<p><\/p>\n<p data-line=\"18\">\u5316\u5b66\u84b8\u6c17\u84b8\u7740\u88c5\u7f6e(CVD)\u30b7\u30b9\u30c6\u30e0\u306f\u6750\u6599\u306e\u88fd\u4f5c\u306e\u790e\u77f3\u3068\u3057\u3066\u5f79\u7acb\u3064\u3002 \u3053\u308c\u3089\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u5316\u5b66\u53cd\u5fdc\u3092\u4ecb\u3057\u3066\u6750\u6599\u3092\u57fa\u8cea\u306b\u5806\u7a4d\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u8584\u819c\u306e\u751f\u6210\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002 \u534a\u5c0e\u4f53\u3001\u5149\u5b66\u3001\u9ad8\u5ea6\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306a\u3069\u306e\u696d\u754c\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308bCVD\u30b7\u30b9\u30c6\u30e0\u304c\u3042\u308a\u307e\u3059\u3002 \u5747\u4e00\u3067\u9ad8\u54c1\u8cea\u306e\u30d5\u30a3\u30eb\u30e0\u3092\u88fd\u9020\u3059\u308b\u80fd\u529b\u306f\u3001\u73fe\u4ee3\u306e\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u4e0d\u53ef\u6b20\u3067\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"20\" id=\"Purpose and Functionality of CVD Systems\">CVD\u30b7\u30b9\u30c6\u30e0\u306e\u76ee\u7684\u3068\u6a5f\u80fd<\/h3>\n<p><\/p>\n<p data-line=\"22\">\u539f\u5b50\u7089\u30ac\u30b9\u3092\u30a8\u30cd\u30eb\u30ae\u30fc\u6e90\u3068\u76f8\u4e92\u4f5c\u7528\u3059\u308b\u30c1\u30e3\u30f3\u30d0\u30fc\u306b\u5c0e\u5165\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001CVD\u30b7\u30b9\u30c6\u30e0\u306f\u52d5\u4f5c\u3057\u307e\u3059\u3002 \u3053\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u6e90\u306f\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u71b1\u307e\u305f\u306f\u30d7\u30e9\u30ba\u30de\u30d9\u30fc\u30b9\u306e\u3001\u56fa\u4f53\u6750\u6599\u3092\u57fa\u8cea\u306b\u5806\u7a4d\u3055\u305b\u308b\u5316\u5b66\u53cd\u5fdc\u3092\u30c8\u30ea\u30ac\u30fc\u3057\u307e\u3059\u3002 \u30d7\u30ed\u30bb\u30b9\u306f\u30d5\u30a3\u30eb\u30e0\u306e\u539a\u3055\u3001\u69cb\u6210\u304a\u3088\u3073\u5747\u7b49\u6027\u4e0a\u306e\u7cbe\u5bc6\u306a\u5236\u5fa1\u3092\u4fdd\u969c\u3057\u307e\u3059\u3002 CVD\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3084\u5149\u8d77\u96fb\u7d30\u80de\u306a\u3069\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u3068\u3063\u3066\u91cd\u8981\u306a\u3001\u5353\u8d8a\u3057\u305f\u7d14\u5ea6\u3068\u69cb\u9020\u306e\u5b8c\u5168\u6027\u3092\u5099\u3048\u305f\u30d5\u30a3\u30eb\u30e0\u3092\u4f5c\u6210\u3059\u308b\u305f\u3081\u306bCVD\u30b7\u30b9\u30c6\u30e0\u306b\u4f9d\u5b58\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"24\">\u3053\u308c\u3089\u306e\u30b7\u30b9\u30c6\u30e0\u306e\u6a5f\u80fd\u306f\u3001\u84b8\u7740\u3092\u8d85\u3048\u3066\u62e1\u5f35\u3057\u307e\u3059\u3002 \u307e\u305f\u3001\u30d7\u30ed\u30bb\u30b9\u4e2d\u306b\u6c5a\u67d3\u3084\u6b20\u9665\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u307e\u3059\u3002 \u30ac\u30b9\u306e\u6d41\u308c\u3084\u6e29\u5ea6\u3092\u614e\u91cd\u306b\u7ba1\u7406\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001CVD\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u81ea\u52d5\u5316\u3084\u65ad\u5c64\u6c5a\u67d3\u306a\u3069\u306e\u554f\u984c\u3092\u8efd\u6e1b\u3057\u307e\u3059\u3002 \u3053\u306e\u7d30\u5fc3\u306e\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u306f\u3001\u6700\u7d42\u88fd\u54c1\u304c\u53b3\u683c\u306a\u54c1\u8cea\u57fa\u6e96\u3092\u6e80\u305f\u3057\u3066\u3044\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"26\" id=\"Role of Pancake Susceptors in CVD Systems\">CVD\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u30d1\u30f3\u30b1\u30fc\u30ad\u30b5\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u5f79\u5272<\/h3>\n<p><\/p>\n<p data-line=\"28\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001CVD\u30b7\u30b9\u30c6\u30e0\u306e\u52b9\u7387\u6027\u3092\u9ad8\u3081\u308b\u305f\u3081\u306b\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u3001\u901a\u5e38\u3001\u30b7\u30ea\u30b3\u30f3\u30ab\u30fc\u30d0\u30a4\u30c9\u3067\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u9ad8\u7d14\u5ea6\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u304b\u3089\u4f5c\u3089\u308c\u3001\u5806\u7a4d\u30d7\u30ed\u30bb\u30b9\u4e2d\u306b\u57fa\u8cea\u306e\u305f\u3081\u306e\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u3068\u3057\u3066\u6a5f\u80fd\u3057\u307e\u3059\u3002 \u305d\u306e\u8a2d\u8a08\u306f\u5747\u4e00\u8584\u819c\u306e\u6c88\u7740\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u5fc5\u8981\u3067\u3042\u308b\u57fa\u8cea\u3092\u6e21\u308b\u71b1\u914d\u5206\u3092\u4fdd\u969c\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"30\">\u30d1\u30f3\u30b1\u30fc\u30adCVD\u306e\u539f\u5b50\u7089\u3067\u306f\u3001\u30ac\u30b9\u306e\u6d41\u308c\u306fsusceptor\u306b\u5e73\u884c\u79fb\u52d5\u3057\u307e\u3059\u3002 \u3053\u306e\u69cb\u6210\u306f\u4e00\u8cab\u3057\u305f\u6c88\u6bbf\u7269\u7387\u304a\u3088\u3073\u30d5\u30a3\u30eb\u30e0\u306e\u8cea\u3092\u4fc3\u9032\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u30b7\u30b9\u30c6\u30e0\u5185\u306eRF\u30b3\u30a4\u30eb\u306e\u5e7e\u4f55\u5b66\u306f\u3001\u611f\u53d7\u6027\u306e\u8a2d\u8a08\u3092\u88dc\u5b8c\u3057\u3001\u6e29\u5ea6\u306e\u5747\u7b49\u6027\u3092\u3055\u3089\u306b\u6539\u5584\u3059\u308b\u3053\u3068\u304c\u591a\u3044\u3053\u3068\u306b\u6c17\u3065\u304f\u3067\u3057\u3087\u3046\u3002 \u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u7cbe\u5bc6\u306a\u6e29\u5ea6\u5236\u5fa1\u304c\u6c88\u6bbf\u7269\u6750\u6599\u306e\u8cea\u306b\u76f4\u63a5\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u30a6\u30a8\u30cf\u306e\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u306e\u3088\u3046\u306a\u9069\u7528\u3067\u5305\u3093\u3067\u3044\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"32\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u3092CVD\u30b7\u30b9\u30c6\u30e0\u306b\u7d71\u5408\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u3088\u308a\u826f\u3044\u71b1\u7ba1\u7406\u3068\u30d7\u30ed\u30bb\u30b9\u52b9\u7387\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u3001\u30b7\u30b9\u30c6\u30e0\u306e\u6027\u80fd\u3092\u9ad8\u3081\u308b\u3060\u3051\u3067\u306a\u304f\u3001\u9ad8\u5ea6\u306a\u6280\u8853\u306e\u305f\u3081\u306e\u9ad8\u54c1\u8cea\u306e\u6750\u6599\u306e\u751f\u7523\u306b\u8ca2\u732e\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h2 data-line=\"34\" id=\"Design and Functionality of Pancake Susceptors\">\u30d1\u30f3\u30b1\u30fc\u30ad\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u30c7\u30b6\u30a4\u30f3\u3068\u6a5f\u80fd\u6027<\/h2>\n<p><\/p>\n<figure data-line=\"36\"><img decoding=\"async\" src=\"https:\/\/statics.mylandingpages.co\/static\/aaanxdmf26c522mp\/image\/ab68aa9c4961485c8fe9d34833854f0f.webp\" alt=\"\u30d1\u30f3\u30b1\u30fc\u30ad\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u30c7\u30b6\u30a4\u30f3\u3068\u6a5f\u80fd\u6027\" class=\"md-zoom\"><\/figure>\n<p><\/p>\n<h3 data-line=\"40\" id=\"Materials and Structure of Pancake Susceptors\">\u30d1\u30f3\u30b1\u30fc\u30ad\u30b5\u30bb\u30d7\u30bf\u30fc\u306e\u6750\u6599\u3068\u69cb\u9020<\/h3>\n<p><\/p>\n<p data-line=\"42\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u5bb9\u5668\u3067\u4f7f\u7528\u3055\u308c\u308b\u6750\u6599\u306f\u8010\u4e45\u6027\u304a\u3088\u3073\u52b9\u7387\u3092\u4fdd\u969c\u3059\u308b\u305f\u3081\u306b\u6ce8\u610f\u6df1\u304f\u9078\u3070\u308c\u307e\u3059\u3002 \u307b\u3068\u3093\u3069\u306e\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u5bb9\u5668\u306f\u6975\u5ea6\u306a\u6e29\u5ea6\u306e\u4e0b\u3067\u512a\u79c0\u306a\u71b1\u4f1d\u5c0e\u6027\u304a\u3088\u3073\u5b89\u5b9a\u6027\u3092\u63d0\u4f9b\u3059\u308b\u9ad8\u7d14\u5ea6\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u304b\u3089\u306a\u3055\u308c\u307e\u3059\u3002 \u6027\u80fd\u3092\u9ad8\u3081\u308b\u305f\u3081\u306b\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u3001\u3053\u308c\u3089\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u69cb\u9020\u3092\u30b7\u30ea\u30b3\u30f3\u30ab\u30fc\u30d0\u30a4\u30c9(SiC)\u3067\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3059\u308b\u3053\u3068\u304c\u591a\u3044\u3002 \u3053\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u8010\u85ac\u54c1\u53cd\u5fdc\u3084\u6469\u8017\u306b\u5bfe\u3059\u308b\u611f\u53d7\u6027\u306e\u62b5\u6297\u3092\u6539\u5584\u3057\u3001\u53b3\u3057\u3044\u74b0\u5883\u3067\u306e\u9577\u671f\u4f7f\u7528\u306b\u9069\u3057\u3066\u3044\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"44\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306e\u69cb\u9020\u306f\u7b49\u3057\u304f\u91cd\u8981\u3067\u3059\u3002 \u5e73\u3089\u306b\u3001\u5186\u306e\u8a2d\u8a08\u306f\u57fa\u8cea\u3092\u6e21\u308b\u71b1\u914d\u5206\u3092\u4fdd\u969c\u3057\u307e\u3059\u3002 \u3053\u306e\u5e7e\u4f55\u5b66\u306f\u6e29\u5ea6\u306e\u52fe\u914d\u3092\u3001\u305d\u3046\u3067\u306a\u3051\u308c\u3070\u4e0d\u5747\u7b49\u306a\u8584\u819c\u306e\u6c88\u6bbf\u7269\u306b\u5c0e\u304f\u3053\u3068\u304c\u3067\u304d\u308b\u6700\u5c0f\u306b\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u611f\u53d7\u6027\u5668\u306e\u5bf8\u6cd5\u5b89\u5b9a\u6027\u306f\u3001\u305d\u308c\u3089\u304c\u8868\u8ef8\u84b8\u7740\u30d7\u30ed\u30bb\u30b9\u3067\u898b\u3064\u3051\u3089\u308c\u305f\u3088\u3046\u306a\u9ad8\u6e29\u6761\u4ef6\u3067\u3082\u3001\u305d\u306e\u5f62\u72b6\u3068\u6a5f\u80fd\u6027\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p><\/p>\n<blockquote data-line=\"46\"><p><\/p>\n<p data-line=\"46\"><strong>\u79d1\u5b66\u7684\u7814\u7a76\u30d5\u30a1\u30a4\u30f3\u30c7\u30a3\u30f3\u30b0<\/strong>: \u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u304c120W\/m\u30fbK\u307e\u3067\u306e\u71b1\u4f1d\u5c0e\u6027\u30ec\u30d9\u30eb\u3092\u5c55\u793a\u3057\u3001\u4f5c\u696d\u4e2d\u306b\u52b9\u7387\u7684\u306a\u71b1\u4f1d\u9054\u3092\u78ba\u4fdd\u3059\u308b\u3068\u3044\u3046\u70b9\u3092\u8abf\u67fb\u3057\u307e\u3059\u3002 \u3053\u306e\u30d7\u30ed\u30d1\u30c6\u30a3\u306f\u3001\u7cbe\u5bc6\u306a\u71b1\u7ba1\u7406\u3092\u5fc5\u8981\u3068\u3059\u308b\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u4e0d\u53ef\u6b20\u3067\u3059.<\/p>\n<p><\/p><\/blockquote>\n<p><\/p>\n<p data-line=\"48\">\u5805\u7262\u306a\u6750\u6599\u3068\u3088\u304f\u8a2d\u8a08\u3055\u308c\u305f\u69cb\u9020\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u3067\u3001\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u5316\u5b66\u84b8\u6c17\u84b8\u7740(CVD)\u30b7\u30b9\u30c6\u30e0\u3067\u4e00\u8cab\u3057\u305f\u7d50\u679c\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306e\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u3092\u63d0\u4f9b\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"50\" id=\"Mechanism of Heat Transfer and Uniform Heating\">\u71b1\u4f1d\u9054\u304a\u3088\u3073\u5747\u4e00\u71b1\u306e\u30e1\u30ab\u30cb\u30ba\u30e0<\/h3>\n<p><\/p>\n<p data-line=\"52\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u71b1\u3092\u5747\u4e00\u306b\u79fb\u3059\u80fd\u529b\u3092\u767a\u63ee\u3057\u307e\u3059\u3002 SiC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3068\u7d44\u307f\u5408\u308f\u305b\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027\u306b\u3088\u308a\u3001\u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u8868\u9762\u5168\u4f53\u306b\u5747\u7b49\u306b\u71b1\u3092\u5206\u914d\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u3053\u306e\u5747\u4e00\u306a\u52a0\u71b1\u306f\u3001\u8584\u819c\u84b8\u7740\u306e\u3088\u3046\u306a\u30d7\u30ed\u30bb\u30b9\u306b\u3068\u3063\u3066\u91cd\u8981\u3067\u3059\u3002\u6e29\u5ea6\u306e\u4e00\u8cab\u6027\u306f\u6700\u7d42\u88fd\u54c1\u306e\u54c1\u8cea\u3092\u59a5\u5354\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"54\">\u30d1\u30f3\u30b1\u30fc\u30adCVD\u306e\u539f\u5b50\u7089\u3067\u306f\u3001\u30ac\u30b9\u306e\u6d41\u308c\u306fsusceptor\u306e\u8868\u9762\u306b\u5e73\u884c\u79fb\u52d5\u3057\u307e\u3059\u3002 \u71b1\u4f1d\u9054\u306e\u52b9\u7387\u3092\u9ad8\u3081\u3001\u57fa\u8cea\u304c\u4e00\u8cab\u3057\u305f\u71b1\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u53d7\u3051\u53d6\u308b\u3053\u3068\u3092\u4fdd\u969c\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u30b7\u30b9\u30c6\u30e0\u5185\u306eRF\u30b3\u30a4\u30eb\u30b8\u30aa\u30e1\u30c8\u30ea\u306f\u3001\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u8a2d\u8a08\u3092\u88dc\u5b8c\u3057\u3001\u6e29\u5ea6\u306e\u5747\u4e00\u6027\u3092\u3055\u3089\u306b\u5411\u4e0a\u3057\u307e\u3059\u3002 \u30b9\u30bb\u30d7\u30bf\u30fc\u3068\u30ea\u30a2\u30af\u30bf\u30fc\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u9593\u306e\u3053\u306e\u76f8\u4e57\u52b9\u679c\u306f\u3001\u5806\u7a4d\u7387\u3068\u30d5\u30a3\u30eb\u30e0\u306e\u54c1\u8cea\u3092\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<blockquote data-line=\"56\"><p><\/p>\n<p data-line=\"56\"><strong>\u79d1\u5b66\u7684\u7814\u7a76\u30d5\u30a1\u30a4\u30f3\u30c7\u30a3\u30f3\u30b0<\/strong>:\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306f\u9ad8\u6e29\u74b0\u5883\u306e\u4f8b\u5916\u7684\u306a\u6027\u80fd\u3092\u3001\u6b21\u5143\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3057\u3001\u5747\u4e00\u71b1\u914d\u5206\u3092\u652f\u3048\u307e\u3059\u793a\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u7279\u5fb4\u306f\u3001\u9ad8\u5ea6\u306a\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u7406\u60f3\u7684\u3067\u3059.<\/p>\n<p><\/p><\/blockquote>\n<p><\/p>\n<p data-line=\"58\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306e\u71b1\u4f1d\u9054\u306e\u30e1\u30ab\u30cb\u30ba\u30e0\u306f\u30d7\u30ed\u30bb\u30b9\u52b9\u7387\u3092\u6539\u5584\u3059\u308b\u3060\u3051\u3067\u306a\u304f\u3001\u5806\u7a4d\u30d5\u30a3\u30eb\u30e0\u306e\u6b20\u9665\u306e\u53ef\u80fd\u6027\u3092\u6e1b\u3089\u3059\u3060\u3051\u3067\u306a\u304f\u3002 \u4e00\u8cab\u3057\u305f\u71b1\u6761\u4ef6\u3092\u4fdd\u3061\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306a\u3069\u306e\u696d\u754c\u306b\u9ad8\u54c1\u8cea\u306e\u6750\u6599\u3092\u751f\u7523\u3059\u308b\u4e0a\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059.<\/p>\n<p><\/p>\n<h2 data-line=\"60\" id=\"Applications of Pancake Susceptors in CVD Systems\">CVD\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u30d1\u30f3\u30b1\u30fc\u30ad\u30b5\u30bb\u30d7\u30bf\u30fc\u306e\u7528\u9014<\/h2>\n<p><\/p>\n<h3 data-line=\"63\" id=\"Semiconductor Manufacturing\">\u534a\u5c0e\u4f53\u88fd\u9020<\/h3>\n<p><\/p>\n<p data-line=\"65\">\u30d1\u30f3\u30b1\u30fc\u30ad\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u6b20\u304b\u305b\u306a\u3044\u3082\u306e\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002 \u30a6\u30a7\u30fc\u30cf\u30a8\u30d4\u30bf\u30ad\u30b7\u306e\u3088\u3046\u306a\u30d7\u30ed\u30bb\u30b9\u306b\u5fc5\u8981\u306a\u7cbe\u5ea6\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u3001\u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306b\u4f9d\u5b58\u3057\u3066\u3044\u307e\u3059\u3002 \u5e73\u3089\u3067\u5186\u5f62\u8a2d\u8a08\u306f\u3001\u9ad8\u54c1\u8cea\u306e\u534a\u5c0e\u4f53\u30a6\u30a7\u30fc\u30cf\u3092\u4f5c\u6210\u3059\u308b\u305f\u3081\u306b\u91cd\u8981\u306a\u57fa\u677f\u5168\u4f53\u306e\u5747\u4e00\u306a\u52a0\u71b1\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002 \u30de\u30a4\u30ca\u30fc\u306a\u6e29\u5ea6\u306e\u4e0d\u6574\u5408\u4f53\u3067\u3055\u3048\u3001\u6b20\u9665\u306b\u3064\u306a\u304c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u3001\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u4f53\u306e\u5f79\u5272\u306f\u3001\u88fd\u54c1\u306e\u5b8c\u5168\u6027\u3092\u7dad\u6301\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"67\">\u534a\u5c0e\u4f53\u88fd\u9020\u3067\u306f\u3001\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u4e00\u8cab\u3057\u305f\u8584\u819c\u5806\u7a4d\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u80fd\u529b\u306e\u305f\u3081\u306b\u652f\u914d\u3057\u307e\u3059\u3002 \u70ad\u5316\u30b1\u30a4\u7d20\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u71b1\u5b89\u5b9a\u6027\u304a\u3088\u3073\u5316\u5b66\u62b5\u6297\u3092\u9ad8\u3081\u307e\u3059\u3001\u305d\u308c\u3089\u304c\u9ad8\u6e29\u30d7\u30ed\u30bb\u30b9\u306e\u8981\u6c42\u3059\u308b\u6761\u4ef6\u306b\u6297\u3059\u308b\u3053\u3068\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002 \u6027\u80fd\u3092\u640d\u306a\u3046\u3053\u3068\u306a\u304f\u7e70\u308a\u8fd4\u3057\u4f7f\u7528\u3067\u304d\u308b\u8010\u4e45\u6027\u3067\u3059\u3002 \u307e\u305f\u3001\u5782\u76f4\u69cb\u6210\u3068\u306e\u4e92\u63db\u6027\u306b\u3088\u308a\u3001\u3088\u308a\u9ad8\u3044\u57fa\u677f\u306e\u53d6\u308a\u6271\u3044\u3084\u3001\u9ad8\u5ea6\u306a\u534a\u5c0e\u4f53\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u306e\u30e6\u30fc\u30c6\u30a3\u30ea\u30c6\u30a3\u306e\u62e1\u5927\u306b\u3082\u9069\u3057\u3066\u3044\u307e\u3059.<\/p>\n<p><\/p>\n<blockquote data-line=\"69\"><p><\/p>\n<p data-line=\"69\"><strong>\u304a\u554f\u3044\u5408\u308f\u305b?<\/strong> \u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306f\u3088\u308a\u5c0f\u3055\u3044\u3001\u3088\u308a\u6709\u52b9\u306a\u96fb\u5b50\u88c5\u7f6e\u306e\u305f\u3081\u306e\u6210\u9577\u3057\u305f\u8981\u6c42\u306b\u4f1a\u3046\u305f\u3081\u306b\u5fc5\u8981\u3067\u3059\u3002 \u7cbe\u5bc6\u306a\u71b1\u7ba1\u7406\u80fd\u529b\u306f\u3001\u30b9\u30de\u30fc\u30c8\u30d5\u30a9\u30f3\u3001\u30b3\u30f3\u30d4\u30e5\u30fc\u30bf\u3001\u305d\u306e\u4ed6\u6700\u5148\u7aef\u6280\u8853\u3067\u4f7f\u7528\u3055\u308c\u308b\u30de\u30a4\u30af\u30ed\u30c1\u30c3\u30d7\u306e\u751f\u7523\u306b\u76f4\u63a5\u8ca2\u732e\u3057\u307e\u3059.<\/p>\n<p><\/p><\/blockquote>\n<p><\/p>\n<p data-line=\"71\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u3092CVD\u30b7\u30b9\u30c6\u30e0\u306b\u7d71\u5408\u3059\u308b\u3053\u3068\u3067\u3001\u9032\u5316\u3059\u308b\u534a\u5c0e\u4f53\u696d\u754c\u306b\u304a\u3044\u3066\u7af6\u4e89\u529b\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u306b\u5fc5\u8981\u306a\u7cbe\u5ea6\u3068\u52b9\u7387\u6027\u306e\u30ec\u30d9\u30eb\u3092\u9054\u6210\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"73\" id=\"Thin-Film Deposition in Other Industries\">\u305d\u306e\u4ed6\u306e\u7523\u696d\u306b\u304a\u3051\u308b\u8584\u8089\u5806\u7a4d<\/h3>\n<p><\/p>\n<p data-line=\"75\">\u534a\u5c0e\u4f53\u3092\u8d85\u3048\u3066\u3001\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u4f53\u306f\u8584\u819c\u84b8\u7740\u306b\u4f9d\u5b58\u3059\u308b\u4ed6\u306e\u696d\u754c\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002 \u3042\u306a\u305f\u306f\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u5909\u63db\u52b9\u7387\u3092\u6700\u5927\u5316\u3059\u308b\u305f\u3081\u306b\u5747\u4e00\u306a\u30d5\u30a3\u30eb\u30e0\u54c1\u8cea\u304c\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u592a\u967d\u96fb\u6c60\u88fd\u9020\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u305d\u308c\u3089\u3092\u898b\u3064\u3051\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u4e00\u8cab\u3057\u305f\u52a0\u71b1\u3092\u63d0\u4f9b\u3059\u308b\u80fd\u529b\u306f\u3001\u30bd\u30fc\u30e9\u30fc\u30d1\u30cd\u30eb\u306b\u5806\u7a4d\u3057\u305f\u8584\u819c\u304c\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u7528\u9014\u306b\u5fc5\u8981\u306a\u53b3\u683c\u306a\u57fa\u6e96\u3092\u6e80\u305f\u3057\u3066\u3044\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"77\">\u5149\u5b66\u7cfb\u3084\u9ad8\u5ea6\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306a\u3069\u306e\u696d\u754c\u3067\u306f\u3001\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u9ad8\u6027\u80fd\u6750\u6599\u306e\u751f\u7523\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002 \u5f7c\u3089\u306e\u8a2d\u8a08\u306f\u6e29\u5ea6\u306e\u52fe\u914d\u3092\u6700\u5c0f\u306b\u3057\u3001\u6c88\u6bbf\u7269\u306e\u30d5\u30a3\u30eb\u30e0\u304c\u5747\u4e00\u539a\u3055\u304a\u3088\u3073\u69cb\u6210\u3092\u793a\u3059\u3053\u3068\u3092\u4fdd\u969c\u3057\u307e\u3059\u3002 \u3053\u306e\u7cbe\u5ea6\u306f\u3001\u53cd\u5c04\u9632\u6b62\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3084\u4fdd\u8b77\u5c64\u306a\u3069\u306e\u7528\u9014\u306b\u7279\u306b\u91cd\u8981\u3067\u3059\u3002\u307e\u305f\u3001\u308f\u305a\u304b\u306a\u5909\u5316\u3067\u3082\u6a5f\u80fd\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059.<\/p>\n<p><\/p>\n<blockquote data-line=\"79\"><p><\/p>\n<p data-line=\"79\"><strong>\u4e3b\u306a\u6d1e\u5bdf:<\/strong> \u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u4f53\u306f\u3001\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u3084\u96fb\u5b50\u6a5f\u5668\u306a\u3069\u306e\u5206\u91ce\u3067\u9ad8\u54c1\u8cea\u306e\u6750\u6599\u306e\u9700\u8981\u304c\u9ad8\u307e\u3063\u3066\u3044\u307e\u3059\u3002 \u5f7c\u3089\u306e\u6c4e\u7528\u6027\u306f\u3001\u3055\u307e\u3056\u307e\u306a\u5806\u7a4d\u30d7\u30ed\u30bb\u30b9\u306b\u9069\u5fdc\u3057\u3001\u8907\u6570\u306e\u696d\u754c\u306b\u4fa1\u5024\u306e\u3042\u308b\u8cc7\u7523\u3092\u4f5c\u308b\u3053\u3068\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059.<\/p>\n<p><\/p><\/blockquote>\n<p><\/p>\n<p data-line=\"81\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306e\u6a5f\u80fd\u3092\u6d3b\u7528\u3059\u308b\u3053\u3068\u3067\u3001\u8584\u819c\u84b8\u7740\u30d7\u30ed\u30bb\u30b9\u306e\u52b9\u7387\u6027\u3068\u54c1\u8cea\u3092\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u592a\u967d\u96fb\u6c60\u3084\u5149\u5b66\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u88fd\u9020\u3057\u3066\u3044\u308b\u5834\u5408\u3067\u3082\u3001\u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u696d\u754c\u6a19\u6e96\u3092\u6e80\u305f\u3059\u305f\u3081\u306b\u5fc5\u8981\u306a\u4fe1\u983c\u6027\u3068\u6027\u80fd\u3092\u63d0\u4f9b\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h2 data-line=\"83\" id=\"Advantages of Pancake Susceptors\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u5229\u70b9<\/h2>\n<p><\/p>\n<h3 data-line=\"86\" id=\"Enhanced Process Efficiency\">Enhanced Process Efficiency<\/h3>\n<p><\/p>\n<p data-line=\"88\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u611f\u53d7\u6027\u5668\u306f\u5316\u5b66\u84b8\u6c17\u306e\u6c88\u6bbf(CVD)\u30b7\u30b9\u30c6\u30e0\u306e\u52b9\u7387\u3092\u304b\u306a\u308a\u6539\u5584\u3057\u307e\u3059\u3002 \u8a2d\u8a08\u306f\u9ad8\u6e29\u30d7\u30ed\u30bb\u30b9\u306e\u9593\u306b\u30a8\u30cd\u30eb\u30ae\u30fc\u6d88\u8cbb\u3092\u6e1b\u3089\u3059\u6700\u9069\u71b1\u4f1d\u9054\u3092\u4fdd\u969c\u3057\u307e\u3059\u3002 \u4e00\u8cab\u3057\u305f\u71b1\u6761\u4ef6\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u3067\u3001\u8584\u819c\u84b8\u7740\u306b\u5fc5\u8981\u306a\u6642\u9593\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u307e\u3059\u3002 \u3053\u306e\u52b9\u7387\u6027\u306b\u3088\u308a\u3001\u88fd\u9020\u30b5\u30a4\u30af\u30eb\u3092\u9ad8\u901f\u5316\u3057\u3001\u5168\u4f53\u7684\u306a\u751f\u7523\u6027\u3092\u5411\u4e0a\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p><\/p>\n<p data-line=\"90\">\u30d1\u30f3\u30b1\u30fc\u30ad\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u8010\u4e45\u6027\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u52b9\u7387\u306b\u3082\u8ca2\u732e\u3057\u307e\u3059\u3002 \u30e1\u30fc\u30ab\u30fc\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30ab\u30fc\u30d0\u30a4\u30c9(SiC)\u3067\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u9ad8\u7d14\u5ea6\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u3088\u3046\u306a\u9ad8\u5ea6\u306a\u6750\u6599\u3092\u4f7f\u7528\u3057\u3066\u3001\u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3092\u69cb\u7bc9\u3057\u307e\u3059\u3002 \u3053\u306e\u7d44\u307f\u5408\u308f\u305b\u306f\u3001\u6975\u7aef\u306a\u6761\u4ef6\u4e0b\u3067\u3042\u3063\u3066\u3082\u3001\u6469\u8017\u3059\u308b\u512a\u308c\u305f\u71b1\u5b89\u5b9a\u6027\u3068\u62b5\u6297\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002 \u305f\u3068\u3048\u3070\u3001\u6700\u65b0\u306eCVD SiC\u30d1\u30f3\u30b1\u30fc\u30ad\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u6027\u80fd\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u53b3\u3057\u3044\u51e6\u7406\u74b0\u5883\u306b\u8010\u3048\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002 \u3053\u306e\u4fe1\u983c\u6027\u306f\u3001\u983b\u7e41\u306a\u4ea4\u63db\u306e\u5fc5\u8981\u6027\u3092\u6e1b\u3089\u3057\u3001\u6642\u9593\u3068\u30ea\u30bd\u30fc\u30b9\u306e\u4e21\u65b9\u3092\u7bc0\u7d04\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<blockquote data-line=\"92\"><p><\/p>\n<p data-line=\"92\"><strong>\u4e3b\u306a\u6d1e\u5bdf:<\/strong> \u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306f\u7cbe\u5bc6\u304a\u3088\u3073\u8cea\u306e\u305f\u3081\u306e\u4f01\u696d\u306e\u53b3\u3057\u3044\u6761\u4ef6\u3092\u6e80\u305f\u3059\u3053\u3068\u306b\u3088\u3063\u3066\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u696d\u306e\u305f\u3081\u306e\u56fa\u4f53\u57fa\u790e\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002 \u6975\u7aef\u306a\u6e29\u5ea6\u3078\u306e\u9069\u5fdc\u6027\u306f\u3001\u3055\u307e\u3056\u307e\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u9593\u3067\u4e00\u8cab\u3057\u305f\u7d50\u679c\u3092\u4fdd\u8a3c\u3057\u307e\u3059.<\/p>\n<p><\/p><\/blockquote>\n<p><\/p>\n<p data-line=\"94\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u3092CVD\u30b7\u30b9\u30c6\u30e0\u306b\u7d71\u5408\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u9ad8\u54c1\u8cea\u306e\u57fa\u6e96\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u3001\u3088\u308a\u8fc5\u901f\u3067\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u64cd\u4f5c\u3092\u5b9f\u73fe\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"96\" id=\"Improved Uniformity and Quality of Thin Films\">\u8584\u819c\u306e\u5747\u4e00\u6027\u3068\u54c1\u8cea\u306e\u5411\u4e0a<\/h3>\n<p><\/p>\n<p data-line=\"98\">\u5747\u4e00\u306a\u52a0\u71b1\u306f\u3001\u9ad8\u54c1\u8cea\u306e\u8584\u819c\u3092\u4f5c\u6210\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3042\u308a\u3001\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306f\u3053\u306e\u9818\u57df\u3067\u512a\u308c\u3066\u3044\u307e\u3059\u3002 \u5e73\u3089\u3067\u5186\u306e\u8a2d\u8a08\u306f\u71b1\u52fe\u914d\u3092\u6700\u5c0f\u306b\u3057\u3001\u57fa\u8cea\u3092\u6e21\u308b\u6e29\u5ea6\u306e\u914d\u5206\u3092\u4fdd\u969c\u3057\u307e\u3059\u3002 \u3053\u306e\u5747\u4e00\u6027\u306f\u3001\u5806\u7a4d\u30d5\u30a3\u30eb\u30e0\u306e\u54c1\u8cea\u306b\u76f4\u63a5\u5f71\u97ff\u3092\u4e0e\u3048\u3001\u6b20\u9665\u3084\u4e0d\u6574\u5408\u6027\u3092\u6e1b\u3089\u3059.<\/p>\n<p><\/p>\n<p data-line=\"100\">\u30a6\u30a8\u30cf\u30a8\u30b9\u30bf\u30ad\u30b7\u30fc\u306a\u3069\u306e\u7528\u9014\u3067\u306f\u3001\u7cbe\u5bc6\u306a\u6e29\u5ea6\u5236\u5fa1\u304c\u4e0d\u53ef\u6b20\u3067\u3059\u3002 \u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u8584\u819c\u306e\u69cb\u9020\u7684\u5b8c\u5168\u6027\u3092\u640d\u306a\u3046\u53ef\u80fd\u6027\u304c\u3042\u308b\u30d0\u30ea\u30a8\u30fc\u30b7\u30e7\u30f3\u3092\u6392\u9664\u3059\u308b\u3053\u3068\u306b\u3088\u3063\u3066\u3001\u3053\u306e\u5fc5\u8981\u6027\u306b\u5bfe\u51e6\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u65ad\u9762\u8a2d\u8a08\u306f\u3001\u8907\u96d1\u306a\u84b8\u7740\u30d7\u30ed\u30bb\u30b9\u3067\u3042\u3063\u3066\u3082\u3001\u4e00\u8cab\u3057\u305f\u71b1\u6761\u4ef6\u3092\u7dad\u6301\u3059\u308b\u80fd\u529b\u3092\u3055\u3089\u306b\u9ad8\u3081\u307e\u3059\u3002 \u9ad8\u5ea6\u306a\u88fd\u9020\u3067\u6c42\u3081\u3089\u308c\u308b\u9ad8\u7cbe\u5ea6\u3092\u5b9f\u73fe\u3059\u308b\u305f\u3081\u306b\u6b20\u304b\u305b\u306a\u3044\u6a5f\u80fd\u3067\u3059.<\/p>\n<p><\/p>\n<blockquote data-line=\"102\"><p><\/p>\n<p data-line=\"102\"><strong>\u304a\u554f\u3044\u5408\u308f\u305b?<\/strong> \u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u306e\u9593\u306b\u71b1\u52fe\u914d\u3092\u9664\u53bb\u3059\u308b\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\u3002 \u3053\u306e\u6a5f\u80fd\u306b\u3088\u308a\u3001\u57fa\u8cea\u30a6\u30a7\u30fc\u30cf\u304c\u4e0d\u5747\u4e00\u306a\u52a0\u71b1\u306b\u3088\u3063\u3066\u5f71\u97ff\u3092\u53d7\u3051\u306a\u3044\u307e\u307e\u3001\u512a\u308c\u305f\u30d5\u30a3\u30eb\u30e0\u54c1\u8cea\u304c\u5f97\u3089\u308c\u307e\u3059.<\/p>\n<p><\/p><\/blockquote>\n<p><\/p>\n<p data-line=\"104\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306e\u4f7f\u7528\u306f\u307e\u305f\u4f8b\u5916\u7684\u306a\u7d14\u5ea6\u304a\u3088\u3073\u69cb\u9020\u306e\u5b8c\u5168\u6027\u304c\u4ed8\u3044\u3066\u3044\u308b\u6750\u6599\u306e\u751f\u7523\u3092\u652f\u3048\u307e\u3059\u3002 \u4e00\u8cab\u3057\u305f\u5806\u7a4d\u7387\u3092\u7dad\u6301\u3059\u308b\u80fd\u529b\u306f\u6700\u7d42\u88fd\u54c1\u304c\u6700\u9ad8\u306e\u696d\u754c\u6a19\u6e96\u3092\u6e80\u305f\u3057\u3066\u3044\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u307e\u3059\u3002 \u534a\u5c0e\u4f53\u88fd\u9020\u3084\u305d\u306e\u4ed6\u696d\u754c\u306b\u643a\u308f\u3063\u3066\u3044\u308b\u5834\u5408\u3067\u3082\u3001\u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u3001\u8584\u819c\u84b8\u7740\u306b\u304a\u3051\u308b\u6bd4\u985e\u306e\u306a\u3044\u54c1\u8cea\u3092\u5b9f\u73fe\u3059\u308b\u306e\u306b\u5f79\u7acb\u3061\u307e\u3059.<\/p>\n<p><\/p>\n<hr data-line=\"106\"><\/p>\n<p data-line=\"108\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306f\u5316\u5b66\u84b8\u6c17\u306e\u6c88\u6bbf\u7269\u30b7\u30b9\u30c6\u30e0\u5185\u306e\u6709\u52b9\u3067\u3001\u5747\u4e00\u30d7\u30ed\u30bb\u30b9\u3092\u4fdd\u969c\u3059\u308b\u91cd\u8981\u306a\u5f79\u5272\u3092\u62c5\u3044\u307e\u3059\u3002 \u534a\u5c0e\u4f53\u88fd\u9020\u3084\u592a\u967d\u96fb\u6c60\u88fd\u9020\u306a\u3069\u306e\u7523\u696d\u306b\u6b20\u304b\u305b\u306a\u3044\u9ad8\u54c1\u8cea\u306e\u6750\u6599\u306e\u751f\u7523\u3092\u53ef\u80fd\u306b\u3057\u3001\u4e00\u8cab\u3057\u305f\u52a0\u71b1\u3068\u6c5a\u67d3\u306e\u4f4e\u6e1b\u3092\u5b9f\u73fe\u3002 \u6975\u7aef\u306a\u6761\u4ef6\u4e0b\u3067\u306e\u4fe1\u983c\u6027\u3092\u7dad\u6301\u3059\u308b\u80fd\u529b\u306f\u3001\u9ad8\u5ea6\u306a\u71b1\u7528\u9014\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002 \u73fe\u4ee3\u306e\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u3092\u63a2\u6c42\u3059\u308b\u4e2d\u3001\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3001\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u3001\u305d\u3057\u3066\u305d\u308c\u3092\u8d85\u3048\u308b\u6280\u8853\u9769\u65b0\u306b\u8457\u3057\u304f\u8ca2\u732e\u3057\u3066\u3044\u308b\u3053\u3068\u304c\u308f\u304b\u308a\u307e\u3059\u3002 \u7d20\u6750\u306e\u5b89\u5b9a\u6027\u3068\u30d7\u30ed\u30bb\u30b9\u306e\u52b9\u7387\u6027\u3092\u5411\u4e0a\u3055\u305b\u308b\u305f\u3081\u306e\u30a4\u30f3\u30d1\u30af\u30c8\u306f\u3001\u8907\u6570\u306e\u30bb\u30af\u30bf\u30fc\u306b\u308f\u305f\u3063\u3066\u9032\u6b69\u3092\u99c6\u52d5\u3057\u7d9a\u3051\u3066\u3044\u307e\u3059.<\/p>\n<p><\/p>\n<h2 data-line=\"110\" id=\"FAQ\">\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/h2>\n<p><\/p>\n<h3 data-line=\"113\" id=\"What are pancake susceptors and their role in CVD systems?\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u4f53\u3068CVD\u30b7\u30b9\u30c6\u30e0\u306e\u5f79\u5272\u306f\u4f55\u3067\u3059\u304b?<\/h3>\n<p><\/p>\n<p data-line=\"115\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306f\u5e83\u3044\u533a\u57df\u3092\u6e21\u308b\u5747\u4e00\u6696\u623f\u3092\u63d0\u4f9b\u3059\u308b\u3088\u3046\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u308b\u5e73\u3089\u306a\u3001\u5186\u306e\u90e8\u54c1\u3067\u3059\u3002 \u8584\u819c\u84b8\u7740\u30d7\u30ed\u30bb\u30b9\u4e2d\u306b\u6e29\u5ea6\u5206\u5e03\u3092\u3055\u3089\u306b\u78ba\u4fdd\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u5316\u5b66\u84b8\u6c17\u84b8\u7740(CVD)\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002 \u305d\u306e\u6c4e\u7528\u6027\u3068\u52b9\u7387\u6027\u306f\u3001\u7cbe\u5bc6\u304c\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u534a\u5c0e\u4f53\u88fd\u9020\u306a\u3069\u306e\u696d\u754c\u3067\u4e0d\u53ef\u6b20\u3067\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"117\" id=\"What are the main physical properties of CVD SiC Pancake Susceptors?\">CVD SiC\u30d1\u30f3\u30b1\u30fc\u30ad\u30b5\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u4e3b\u306a\u7269\u7406\u7684\u6027\u8cea\u306f\u4f55\u3067\u3059\u304b?<\/h3>\n<p><\/p>\n<p data-line=\"119\">\u30a4\u30f3\u30d5\u30a9\u30e1\u30fc\u30b7\u30e7\u30f3 SiC \u30d1\u30f3\u30b1\u30fc\u30ad \u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u9ad8\u5ea6\u306e\u5316\u5b66\u84b8\u6c17\u306e\u6c88\u6bbf\u306e\u6280\u8853\u3092\u4f7f\u7528\u3057\u3066\u88fd\u9020\u3055\u308c\u307e\u3059\u3002 \u512a\u308c\u305f\u8010\u4e45\u6027\u3092\u767a\u63ee\u3057\u3001\u6975\u7aef\u306a\u6e29\u5ea6\u306b\u8010\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u7279\u6027\u306f\u3001\u8981\u6c42\u306e\u53b3\u3057\u3044\u74b0\u5883\u3067\u9ad8\u6027\u80fd\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u4fe1\u983c\u6027\u3092\u767a\u63ee\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"121\" id=\"What is the thermal conductivity of a CVD Pancake Susceptor?\">CVD\u30d1\u30f3\u30b1\u30fc\u30ad\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u71b1\u4f1d\u5c0e\u6027\u306f\u4f55\u3067\u3059\u304b?<\/h3>\n<p><\/p>\n<p data-line=\"123\">CVD\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u71b1\u4f1d\u5c0e\u7387\u306f\u307e\u3067\u9054\u3057\u307e\u3059 <strong>120 W\/m\u30fbK<\/strong>\u52b9\u7387\u7684\u306a\u71b1\u4f1d\u9054\u3092\u6709\u52b9\u306b\u3057\u307e\u3059\u3002 \u3053\u306e\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027\u306f\u5747\u4e00\u8584\u819c\u306e\u6c88\u7740\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u91cd\u8981\u306a\u4e00\u8cab\u3057\u305f\u6696\u623f\u3092\u4fdd\u969c\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"125\" id=\"What is the typical thermal expansion coefficient of SiC Pancake Susceptors?\">SiC\u30d1\u30f3\u30b1\u30fc\u30ad\u30b5\u30bb\u30d7\u30bf\u30fc\u306e\u5178\u578b\u7684\u306a\u71b1\u81a8\u5f35\u4fc2\u6570\u306f\u4f55\u3067\u3059\u304b?<\/h3>\n<p><\/p>\n<p data-line=\"127\">\u30b7\u30b9\u30b3 \u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u304a\u3088\u305d\u306e\u5178\u578b\u7684\u306a\u71b1\u62e1\u5f35\u4fc2\u6570\u3092\u5099\u3048\u3066\u3044\u307e\u3059 <strong>4.0\u00d710^-6 \/\u00b0C<\/strong>. . \u9ad8\u6e29\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u5bf8\u6cd5\u5b89\u5b9a\u6027\u3092\u78ba\u4fdd\u3057\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u539a\u3055\u3068\u54c1\u8cea\u306e\u4e00\u8cab\u6027\u3092\u7dad\u6301\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"129\" id=\"What is the importance of SiC-coated graphite barrel susceptors?\">SiC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30d0\u30ec\u30eb\u306e\u611f\u53d7\u6027\u306e\u91cd\u8981\u6027\u306f\u4f55\u3067\u3059\u304b?<\/h3>\n<p><\/p>\n<p data-line=\"131\">\u30d0\u30ec\u30eb\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u3001\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u3068\u306f\u9055\u3063\u3066\u3001\u5186\u7b52\u5f62\u306e\u8a2d\u8a08\u3092\u7279\u8272\u306b\u3057\u307e\u3059\u3002 \u8907\u6570\u306e\u30a6\u30a7\u30fc\u30cf\u3084\u57fa\u8cea\u3092\u540c\u6642\u306b\u30b5\u30dd\u30fc\u30c8\u3057\u3001\u540c\u6642\u306b\u52a0\u71b1\u3057\u3001\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3068\u52b9\u7387\u6027\u3092\u9ad8\u3081\u307e\u3059\u3002 SiC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u71b1\u5b89\u5b9a\u6027\u3068\u8010\u85ac\u54c1\u6027\u3092\u5411\u4e0a\u3055\u305b\u3001\u5927\u91cf\u751f\u7523\u306b\u6700\u9069\u3067\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"133\" id=\"Where can I find a theoretical study of the temperature field in a pancake CVD reactor?\">\u30d1\u30f3\u30b1\u30fc\u30adCVD\u53cd\u5fdc\u5668\u5185\u306e\u6e29\u5ea6\u30d5\u30a3\u30fc\u30eb\u30c9\u306e\u7406\u8ad6\u7684\u7814\u7a76\u306f\u3069\u3053\u306b\u3042\u308a\u307e\u3059\u304b?<\/h3>\n<p><\/p>\n<p data-line=\"135\">\u30d1\u30f3\u30b1\u30fc\u30adCVD\u539f\u5b50\u7089\u5185\u306e\u6e29\u5ea6\u30d5\u30a3\u30fc\u30eb\u30c9\u306e\u8a73\u7d30\u306a\u7406\u8ad6\u7684\u7814\u7a76\u3092\u63a2\u7d22\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059 <em>\u65e5\u672c\u5316\u5b66\u5de5\u5b66\u4f1a<\/em> 1992\u5e741\u67086\u65e5(\u6c34)\u3001692-697) \u3053\u306e\u7814\u7a76\u3067\u306f\u3001\u30d1\u30f3\u30b1\u30fc\u30adCVD\u30b7\u30b9\u30c6\u30e0\u306e\u71b1\u7684\u52d5\u614b\u306b\u8cb4\u91cd\u306a\u6d1e\u5bdf\u3092\u63d0\u4f9b\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"137\" id=\"What is the design of a pancake-type susceptor?\">\u30d1\u30f3\u30b1\u30fc\u30ad\u578b\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u30c7\u30b6\u30a4\u30f3\u3068\u306f?<\/h3>\n<p><\/p>\n<p data-line=\"139\">\u30d1\u30f3\u30b1\u30fc\u30ad\u30bf\u30a4\u30d7\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u30af\u30ed\u30b9\u30bb\u30af\u30c1\u30e5\u30a2\u30eb\u3067\u30c8\u30c3\u30d7\u30d7\u30e9\u30f3\u306e\u30d3\u30e5\u30fc\u3067\u3001\u30d5\u30e9\u30c3\u30c8\u3067\u5186\u5f62\u306e\u30c7\u30b6\u30a4\u30f3\u304c\u7279\u5fb4\u3067\u3059\u3002 \u3053\u306e\u5e7e\u4f55\u5b66\u306f\u57fa\u8cea\u3092\u6e21\u308b\u71b1\u914d\u5206\u3092\u4fdd\u969c\u3057\u3001\u6e29\u5ea6\u306e\u52fe\u914d\u3092\u6700\u5c0f\u306b\u3057\u3001\u8584\u819c\u306e\u6c88\u6bbf\u7269\u306e\u8cea\u3092\u6539\u5584\u3057\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"141\" id=\"What are the applications of pancake susceptors?\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306e\u9069\u7528\u306f\u4f55\u3067\u3059\u304b?<\/h3>\n<p><\/p>\n<p data-line=\"143\">\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u5bb9\u5668\u306f\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u3001\u592a\u967d\u96fb\u6c60\u306e\u751f\u7523\u304a\u3088\u3073\u9ad8\u5ea6\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3067\u5e83\u304f\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002 \u5747\u4e00\u306a\u52a0\u71b1\u3092\u63d0\u4f9b\u3059\u308b\u80fd\u529b\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u30a8\u30d4\u30bf\u30ad\u30b7\u3084\u8584\u819c\u84b8\u7740\u306a\u3069\u306e\u7cbe\u5bc6\u306a\u71b1\u7ba1\u7406\u3092\u5fc5\u8981\u3068\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u306b\u4e0d\u53ef\u6b20\u3067\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"145\" id=\"How is the market segmented for SiC-coated graphite susceptors?\">SiC-coated\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u5e02\u5834\u306f\u3069\u306e\u3088\u3046\u306b\u533a\u5206\u3055\u308c\u307e\u3059\u304b?<\/h3>\n<p><\/p>\n<p data-line=\"147\">SiC-coated\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u611f\u53d7\u6027\u306e\u305f\u3081\u306e\u5e02\u5834\u306f2\u3064\u306e\u4e3b\u8981\u306a\u30bf\u30a4\u30d7\u306b\u5206\u3051\u3089\u308c\u307e\u3059: <strong>\u30d1\u30f3\u30b1\u30fc\u30ad \u30b9\u30bb\u30d7\u30bf\u30fc<\/strong> \u305d\u3057\u3066 <strong>\u30d0\u30ec\u30eb\u306e\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong>. . \u30d0\u30ec\u30eb\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u8907\u6570\u306e\u57fa\u8cea\u3092\u540c\u6642\u306b\u51e6\u7406\u3059\u308b\u80fd\u529b\u306e\u305f\u3081\u306b\u91cd\u8981\u306a\u5e02\u5834\u30b7\u30a7\u30a2\u3092\u4fdd\u6301\u3057\u3001\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u9069\u3057\u3066\u3044\u307e\u3059.<\/p>\n<p><\/p>\n<h3 data-line=\"149\" id=\"What is the significance of pancake susceptors in the United States market?\">\u30a2\u30e1\u30ea\u30ab\u5e02\u5834\u3067\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u4f53\u306e\u91cd\u8981\u6027\u306f\u4f55\u3067\u3059\u304b?<\/h3>\n<p><\/p>\n<p data-line=\"151\">\u30a2\u30e1\u30ea\u30ab\u3067\u306f\u3001\u30d1\u30f3\u30b1\u30fc\u30ad\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u3084\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u306a\u3069\u306e\u696d\u754c\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002 \u7cbe\u5bc6\u306a\u71b1\u7ba1\u7406\u80fd\u529b\u306f\u3001\u5148\u9032\u6750\u6599\u306e\u751f\u7523\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3001\u3053\u308c\u3089\u306e\u5206\u91ce\u306b\u304a\u3051\u308b\u6280\u8853\u306e\u9032\u6b69\u306b\u8ca2\u732e\u3057\u307e\u3059.<\/p>\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>\u30d1\u30f3\u30b1\u30fc\u30ad\u306e\u53d7\u5bb9\u5668\u306fCVD\u30b7\u30b9\u30c6\u30e0\u3067\u5747\u4e00\u6696\u623f\u3092\u4fdd\u969c\u3057\u307e\u3001\u7cbe\u5bc6\u306a\u8584\u819c\u306e\u6c88\u6bbf\u7269\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002 \u534a\u5c0e\u4f53\u306b\u4e0d\u53ef\u6b20\u3067\u3001\u52b9\u7387\u3068\u54c1\u8cea\u3092\u9ad8\u3081\u307e\u3059.<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[107],"tags":[145,118,110,108,109],"class_list":["post-758","post","type-post","status-publish","format-standard","hentry","category-blog","tag-pancake-susceptor","tag-sic-coated-carrier","tag-sic-coating","tag-tac-coating","tag-tac-coatingsic-coating"],"_links":{"self":[{"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/posts\/758","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/comments?post=758"}],"version-history":[{"count":0,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/posts\/758\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/media?parent=758"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/categories?post=758"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/tags?post=758"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}