{"id":856,"date":"2024-12-10T08:57:34","date_gmt":"2024-12-10T00:57:34","guid":{"rendered":"http:\/\/weitai1.globaldeepsea.site\/how-tac-coated-graphite-susceptors-are-made\/"},"modified":"2025-01-12T16:56:47","modified_gmt":"2025-01-12T08:56:47","slug":"how-tac-coated-graphite-susceptors-are-made","status":"publish","type":"post","link":"https:\/\/www.cnvetenergy.com\/ja\/how-tac-coated-graphite-susceptors-are-made\/","title":{"rendered":"How TaC Coated Graphite Susceptors Are Made"},"content":{"rendered":"<p>&nbsp;<\/p>\n<p data-line=\"4\">\u9ad8\u6e29\u304a\u3088\u3073\u8150\u98df\u6027\u306e\u74b0\u5883\u306e\u8981\u6c42\u306b\u5fdc\u3058\u308b\u9ad8\u5ea6\u6750\u6599\u306b\u983c\u308a\u307e\u3059\u3002 \u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u3068\u30bf\u30f3\u30bf\u30eb\u30ab\u30fc\u30d0\u30a4\u30c9(TaC)\u306e\u30e6\u30cb\u30fc\u30af\u306a\u7279\u6027\u3092\u7d44\u307f\u5408\u308f\u305b\u3066\u3001\u5353\u8d8a\u3057\u305f\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002 \u30e1\u30fc\u30ab\u30fc\u306f\u3001\u5316\u5b66\u84b8\u6c17\u84b8\u7740(CVD)\u3084\u30a6\u30a7\u30c3\u30c8\u30bb\u30e9\u30df\u30c3\u30af\u306a\u3069\u306e\u9769\u65b0\u7684\u306a\u65b9\u6cd5\u3092\u4f7f\u7528\u3057\u3066\u3001TAC\u3067\u9ad8\u7d14\u5ea6\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u8cea\u3092\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3057\u307e\u3059\u3002 \u3053\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u5805\u7262\u306a\u30dc\u30f3\u30c9\u3092\u5f62\u6210\u3057\u3001\u611f\u53d7\u6027\u306e\u8010\u4e45\u6027\u3068\u6975\u7aef\u306a\u6761\u4ef6\u3078\u306e\u62b5\u6297\u3092\u5f37\u5316\u3057\u307e\u3059\u3002 TaC\u306e\u512a\u308c\u305f\u5316\u5b66\u7684\u5b89\u5b9a\u6027\u3068\u71b1\u30ec\u30b8\u30ea\u30a8\u30f3\u30b9\u306f\u3001\u7cbe\u5bc6\u3068\u4fe1\u983c\u6027\u3092\u5fc5\u8981\u3068\u3059\u308b\u696d\u754c\u306b\u304a\u3044\u3066\u3001\u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3092\u6b20\u304b\u305b\u307e\u305b\u3093.<\/p>\n<p data-line=\"4\"><img decoding=\"async\" src=\"http:\/\/weitai1.globaldeepsea.site\/wp-content\/uploads\/2025\/01\/mceclip17-2.png\"><\/p>\n<p>&nbsp;<\/p>\n<h2 id=\"Key Takeaways\" data-line=\"6\">\u8981\u70b9<\/h2>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<ul data-line=\"8\">\n<li data-line=\"8\">TaC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u611f\u53d7\u6027\u306f\u9ad8\u6e29\u304a\u3088\u3073\u8150\u98df\u6027\u306e\u74b0\u5883\u3067\u4f8b\u5916\u7684\u306a\u6027\u80fd\u3092\u63d0\u4f9b\u3059\u308b\u305f\u3081\u306b\u9ad8\u7d14\u5ea6\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u304a\u3088\u3073\u30bf\u30f3\u30bf\u30eb\u306e\u70ad\u5316\u7269(TaC)\u3092\u7d50\u5408\u3057\u307e\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<ul data-line=\"8\">\n<li data-line=\"9\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5f37\u3044\u5bc6\u7740\u6027\u3092\u78ba\u4fdd\u3059\u308b\u305f\u3081\u306b\u3001\u5fb9\u5e95\u3057\u305f\u6e05\u6383\u3084\u7cbe\u5bc6\u306a\u30b7\u30a7\u30fc\u30d4\u30f3\u30b0\u3092\u542b\u3080\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u8cea\u306e\u9069\u5207\u306a\u8abf\u88fd\u304c\u4e0d\u53ef\u6b20\u3067\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<ul data-line=\"8\">\n<li data-line=\"10\">\u5316\u5b66\u84b8\u6c17\u84b8\u7740(CVD)\u3084\u30a6\u30a7\u30c3\u30c8\u30bb\u30e9\u30df\u30c3\u30af\u306a\u3069\u306e\u9ad8\u5ea6\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853\u306b\u3088\u308a\u3001TAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u611f\u53d7\u6027\u306e\u8010\u4e45\u6027\u3068\u71b1\u5b89\u5b9a\u6027\u304c\u5411\u4e0a\u3057\u307e\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<ul data-line=\"8\">\n<li data-line=\"11\">\u8996\u899a\u70b9\u691c\u304a\u3088\u3073\u6027\u80fd\u306e\u30c6\u30b9\u30c8\u3092\u542b\u3080\u54c1\u8cea\u7ba1\u7406\u306e\u624b\u6bb5\u306f\u3001\u5404\u611f\u53d7\u6027\u304c\u4fe1\u983c\u6027\u304a\u3088\u3073\u6709\u52b9\u6027\u306e\u305f\u3081\u306e\u4f01\u696d\u306e\u6a19\u6e96\u3092\u6e80\u305f\u3057\u3066\u3044\u308b\u3053\u3068\u3092\u4fdd\u969c\u3057\u307e\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<ul data-line=\"8\">\n<li data-line=\"12\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u4e0d\u53ef\u6b20\u3067\u3042\u308a\u3001\u5747\u4e00\u306a\u71b1\u5206\u5e03\u3092\u63d0\u4f9b\u3057\u3001\u91cd\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u4e2d\u306b\u6c5a\u67d3\u3092\u9632\u3050\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<ul data-line=\"8\">\n<li data-line=\"13\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u8010\u4e45\u6027\u306f\u3001\u8907\u6570\u306e\u30ea\u30b5\u30a4\u30af\u30eb\u30b5\u30a4\u30af\u30eb\u3092\u53ef\u80fd\u306b\u3057\u3001\u9ad8\u6027\u80fd\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u305f\u3081\u306e\u6301\u7d9a\u53ef\u80fd\u306a\u9078\u629e\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<ul data-line=\"8\">\n<li data-line=\"14\">TaC\u3068\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u30e6\u30cb\u30fc\u30af\u306a\u7279\u6027\u3092\u6d3b\u7528\u3059\u308b\u3053\u3068\u3067\u3001\u696d\u754c\u306f\u3001\u8981\u6c42\u306e\u53b3\u3057\u3044\u7528\u9014\u3067\u52b9\u7387\u3001\u4fe1\u983c\u6027\u3001\u9577\u5bff\u6027\u3092\u9ad8\u3081\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<h2 id=\"Materials Used in Manufacturing TaC Coated Graphite Susceptors\" data-line=\"16\">\u88fd\u9020\u3067\u4f7f\u7528\u3055\u308c\u308b\u6750\u6599 TaC\u4e0a\u5857\u3092\u65bd\u3057\u3066\u3042\u308b\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u30b9\u30bb\u30d7\u30bf\u30fc<\/h2>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"22\">The creation of <strong>\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong> 2\u3064\u306e\u4e3b\u8981\u306a\u6750\u6599\u306b\u983c\u308a\u307e\u3059:\u9ad8\u7d14\u5ea6\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u304a\u3088\u3073\u30bf\u30f3\u30bf\u30eb\u306e\u70ad\u5316\u7269(TaC)\u3002 \u5404\u6750\u6599\u306f\u3001\u53d7\u5bb9\u4f53\u304c\u6975\u7aef\u306a\u74b0\u5883\u3067\u78ba\u5b9f\u306b\u5b9f\u884c\u3067\u304d\u308b\u3088\u3046\u306b\u3001\u30e6\u30cb\u30fc\u30af\u306a\u7279\u6027\u306b\u8ca2\u732e\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"Graphite Substrate\" data-line=\"24\">\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u677f<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"26\">\u9ad8\u7d14\u5ea6\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306f\u3001\u3053\u308c\u3089\u306e\u53d7\u5bb9\u4f53\u306e\u57fa\u790e\u3068\u3057\u3066\u6a5f\u80fd\u3057\u307e\u3059\u3002 \u305d\u306e\u4f8b\u5916\u7684\u306a\u7279\u5fb4\u306f\u305d\u308c\u3092\u8981\u6c42\u3059\u308b\u9069\u7528\u306e\u305f\u3081\u306e\u7406\u60f3\u7684\u306a\u9078\u629e\u306b\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Properties of High-Purity Graphite\" data-line=\"28\">\u9ad8\u7d14\u5ea6\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u7279\u6027<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"30\">\u9ad8\u7d14\u5ea6\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306f\u71b1\u4f1d\u5c0e\u6027\u3092\u8457\u3057\u304f\u767a\u63ee\u3057\u3001\u8868\u9762\u5168\u4f53\u306b\u71b1\u3092\u5747\u7b49\u306b\u5206\u6563\u3055\u305b\u307e\u3059\u3002 \u534a\u5c0e\u4f53\u5c64\u306e\u6b20\u9665\u3092\u5747\u4e00\u306a\u71b1\u5206\u5e03\u304c\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u306e\u3088\u3046\u306a\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u3053\u306e\u7279\u6027\u304c\u91cd\u8981\u3067\u3042\u308b\u3002 \u305d\u306e\u52a0\u5de5\u6027\u306f\u3001\u30e1\u30fc\u30ab\u30fc\u304c\u7279\u5b9a\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u5408\u308f\u305b\u3066\u3001\u30c7\u30a3\u30b9\u30af\u3084\u30d0\u30ec\u30eb\u306a\u3069\u306e\u7cbe\u5bc6\u306a\u5f62\u306b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u307e\u305f\u3001\u71b1\u885d\u6483\u306b\u5bfe\u3059\u308b\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u62b5\u6297\u306b\u3088\u308a\u3001\u5272\u308c\u3084\u5909\u5f62\u305b\u305a\u306b\u6025\u901f\u6e29\u5ea6\u5909\u5316\u306b\u8010\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<blockquote data-line=\"32\">\n<p>&nbsp;<\/p>\n<p data-line=\"32\"><em>\u300c\u6d44\u5316\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u4f7f\u7528\u306f\u6c5a\u67d3\u306e\u5371\u967a\u6027\u3001\u7d50\u6676\u5c64\u306e\u7d14\u5ea6\u3092\u7dad\u6301\u3059\u308b\u91cd\u8981\u306a\u8981\u56e0\u3092\u6e1b\u3089\u3057\u307e\u3059\u3002 \u30c4\u30a4\u30fc\u30c8<\/em><\/p>\n<p>&nbsp;<\/p>\n<\/blockquote>\n<p>&nbsp;<\/p>\n<p data-line=\"34\">\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u3053\u306e\u4e0d\u6d3b\u6027\u6027\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306e\u5b8c\u5168\u6027\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u6c5a\u67d3\u3092\u9632\u304e\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Importance of Isostatic Graphite for Enhanced Performance\" data-line=\"36\">\u9ad8\u3081\u3089\u308c\u305f\u6027\u80fd\u306e\u305f\u3081\u306eIsostatic\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u306e\u91cd\u8981\u6027<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"38\">\u9759\u96fb\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u3001\u9ad8\u5f37\u5ea6\u591a\u69d8\u4f53\u3001\u3055\u3089\u306b\u30b5\u30b9\u30da\u30f3\u30b5\u306e\u6027\u80fd\u3092\u9ad8\u3081\u307e\u3059\u3002 \u5747\u4e00\u306a\u5bc6\u5ea6\u304a\u3088\u3073\u826f\u3044\u7a40\u7269\u306e\u69cb\u9020\u306f\u6a5f\u68b0\u5f37\u3055\u304a\u3088\u3073\u71b1\u5b89\u5b9a\u6027\u3092\u6539\u5584\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u8cc7\u8cea\u306f\u3001\u5358\u7d50\u6676\u6210\u9577\u3084MOCVD(\u91d1\u5c5e\u6709\u6a5f\u5316\u5b66\u84b8\u7740)\u30d7\u30ed\u30bb\u30b9\u306a\u3069\u306e\u9ad8\u6e29\u7528\u9014\u306b\u7279\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002 \u9759\u96fb\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u3092\u4f7f\u7528\u3059\u308b\u3053\u3068\u3067\u3001\u9ad8\u5ea6\u306a\u88fd\u9020\u74b0\u5883\u306e\u53b3\u683c\u306b\u8010\u3048\u308b\u8010\u4e45\u6027\u3068\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u57fa\u8cea\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"Tantalum Carbide (TaC)\" data-line=\"40\">\u70ad\u5316\u30bf\u30f3\u30bf\u30eb\uff08TaC\uff09<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"42\">\u30bf\u30f3\u30bf\u30eb\u30ab\u30fc\u30d0\u30a4\u30c9\u306f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u8cea\u306e\u4fdd\u8b77\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u5f62\u4f5c\u308a\u307e\u3059\u3002 \u3053\u306e\u6750\u6599\u306f\u3001\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u5168\u4f53\u7684\u306a\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u3092\u5411\u4e0a\u3055\u305b\u308b\u4e0a\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Key Properties of TaC\" data-line=\"44\">TaC\u306e\u4e3b\u306a\u7279\u6027<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"46\">TaC\u306f2600\u00b0\u3092\u8d8a\u3048\u308b\u6e29\u5ea6\u3067\u5b89\u5b9a\u3057\u305f\u305d\u308c\u3092\u4f5c\u308b\u9ad8\u3044\u878d\u70b9\u3092\u3001\u81ea\u6162\u3057\u307e\u3059 \u30c4\u30a4\u30fc\u30c8 \u305d\u306e\u786c\u5ea6\u306f\u5ef6\u9577\u3055\u308c\u305f\u4f7f\u7528\u306e\u9593\u306b\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u304c\u305d\u306e\u307e\u307e\u6b8b\u3063\u3066\u3044\u308b\u3053\u3068\u3092\u4fdd\u969c\u3057\u307e\u3059\u512a\u79c0\u306a\u8010\u4e45\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002 \u307e\u305f\u3001TAC\u306e\u8010\u85ac\u54c1\u6027\u306f\u3001\u534a\u5c0e\u4f53\u3084\u7d50\u6676\u6210\u9577\u30d7\u30ed\u30bb\u30b9\u306b\u6b20\u304b\u305b\u306a\u3044\u8150\u98df\u6027\u30ac\u30b9\u3084\u6750\u6599\u3068\u306e\u53cd\u5fdc\u3092\u9632\u6b62\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<blockquote data-line=\"48\">\n<p>&nbsp;<\/p>\n<p data-line=\"48\"><em>\u300cSiC\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3068\u6bd4\u8f03\u3055\u308c\u3066\u3001TaC\u306b\u3088\u308a\u9ad8\u3044\u5316\u5b66\u4e0d\u6d3b\u6027\u304a\u3088\u3073\u8010\u98df\u6027\u304c\u3042\u308a\u307e\u3059\u3002 \u30c4\u30a4\u30fc\u30c8<\/em><\/p>\n<p>&nbsp;<\/p>\n<\/blockquote>\n<p>&nbsp;<\/p>\n<p data-line=\"50\">\u3053\u306e\u512a\u308c\u305f\u8010\u85ac\u54c1\u6027\u306f\u3001\u7d14\u5ea6\u3068\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3059\u308b\u74b0\u5883\u306b\u7406\u60f3\u7684\u306aTAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Role of TaC in Improving Chemical Resistance and Thermal Stability\" data-line=\"52\">\u8010\u85ac\u54c1\u6027\u30fb\u71b1\u5b89\u5b9a\u6027\u5411\u4e0a\u306b\u304a\u3051\u308bTAC\u306e\u5f79\u5272<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"54\">\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306b\u9069\u7528\u3055\u308c\u308b\u5834\u5408\u3001TAC\u306f\u611f\u53d7\u6027\u306e\u5316\u5b66\u62b5\u6297\u304a\u3088\u3073\u71b1\u5b89\u5b9a\u6027\u3092\u5927\u5e45\u306b\u9ad8\u3081\u307e\u3059\u3002 \u53cd\u5fdc\u30ac\u30b9\u74b0\u5883\u306b\u304a\u3044\u3066\u3082\u3001\u5206\u89e3\u30fb\u8150\u98df\u304b\u3089\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u677f\u3092\u4fdd\u8b77\u3057\u307e\u3059\u3002 \u3053\u306e\u4fdd\u8b77\u306f\u3001\u611f\u53d7\u6027\u306e\u5bff\u547d\u3092\u5ef6\u3070\u3057\u3001\u7dad\u6301\u8cbb\u3092\u524a\u6e1b\u3057\u307e\u3059\u3002 \u307e\u305f\u3001GaN\u3084SiC\u7d50\u6676\u6210\u9577\u306a\u3069\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u6e29\u5ea6\u5236\u5fa1\u3092\u6539\u5584\u3057\u3001\u54c1\u8cea\u306e\u9ad8\u3044\u7d50\u679c\u3092\u4fdd\u8a3c\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"56\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3067\u9ad8\u7d14\u5ea6\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u3067\u3001, <strong>\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong> \u6700\u5148\u7aef\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u5fc5\u8981\u306a\u8010\u4e45\u6027\u3001\u5b89\u5b9a\u6027\u3001\u7cbe\u5ea6\u3092\u5b9f\u73fe\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h2 id=\"Preparation of the Graphite Substrate\" data-line=\"58\">\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u677f\u306e\u8abf\u88fd<\/h2>\n<p>&nbsp;<\/p>\n<p data-line=\"61\">\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u8cea\u306e\u6e96\u5099\u306f\u88fd\u9020\u696d\u306e\u91cd\u8981\u306a\u30b9\u30c6\u30c3\u30d7\u3067\u3059 <strong>\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong>. . \u9069\u5207\u306a\u6e96\u5099\u306f\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u304c\u52b9\u679c\u7684\u306b\u4ed8\u7740\u3057\u3001\u611f\u53d7\u6027\u306e\u5168\u9762\u7684\u306a\u6027\u80fd\u3092\u9ad8\u3081\u308b\u3053\u3068\u3092\u4fdd\u969c\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"Cleaning the Graphite\" data-line=\"63\">\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u30af\u30ea\u30fc\u30cb\u30f3\u30b0<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"65\">\u7533\u3057\u8fbc\u307f\u306e\u524d\u306b <strong>TaC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/strong>\u30b0\u30e9\u30ca\u30a4\u30c8\u57fa\u677f\u3092\u5fb9\u5e95\u7684\u306b\u6d17\u6d44\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002 \u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5bc6\u7740\u6027\u3068\u8010\u4e45\u6027\u3092\u640d\u306a\u3046\u3053\u3068\u304c\u3067\u304d\u308b\u4e0d\u7d14\u7269\u3092\u9664\u53bb\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Removal of Impurities and Surface Contaminants\" data-line=\"67\">\u4e0d\u7d14\u7269\u304a\u3088\u3073\u8868\u9762\u306e\u6c5a\u67d3\u7269\u8cea\u306e\u9664\u53bb<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"69\">\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u8868\u9762\u306f\u3001\u51e6\u7406\u3084\u4fdd\u7ba1\u4e2d\u306b\u3001\u57c3\u3001\u6cb9\u3001\u6b8b\u6e23\u306a\u3069\u306e\u6c5a\u67d3\u7269\u8cea\u3092\u983b\u7e41\u306b\u84c4\u7a4d\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u4e0d\u7d14\u7269\u306f\u63a5\u7740\u30d7\u30ed\u30bb\u30b9\u306b\u5e72\u6e09\u3057\u3001\u5f31\u3044\u4ed8\u7740\u304b\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u6b20\u9665\u306b\u5c0e\u304d\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u6c5a\u67d3\u7269\u8cea\u3092\u53d6\u9664\u304f\u3053\u3068\u306f\u5747\u4e00\u304a\u3088\u3073\u8010\u4e45\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u5fc5\u8981\u3067\u3042\u308b\u304d\u308c\u3044\u306a\u8868\u9762\u3092\u4fdd\u969c\u3057\u307e\u3059 <strong>TaC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/strong>.<\/p>\n<p>&nbsp;<\/p>\n<blockquote data-line=\"71\">\n<p>&nbsp;<\/p>\n<p data-line=\"71\"><em>\u300cTAC\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u306e\u3088\u3046\u306a\u9ad8\u6e29\u8010\u6027\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u6210\u5206\u306e\u6c5a\u67d3\u3084\u52a3\u5316\u3092\u9632\u6b62\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002 \u30c4\u30a4\u30fc\u30c8<\/em><\/p>\n<p>&nbsp;<\/p>\n<\/blockquote>\n<p>&nbsp;<\/p>\n<p data-line=\"73\">\u4e0d\u7d14\u7269\u3092\u9664\u53bb\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001SiC\u5358\u7d50\u6676\u6210\u9577\u3084\u534a\u5c0e\u4f53\u30a6\u30a8\u30cf\u51e6\u7406\u306a\u3069\u306e\u30bb\u30f3\u30b7\u30c6\u30a3\u30d6\u306a\u7528\u9014\u3067\u306e\u6c5a\u67d3\u306e\u30ea\u30b9\u30af\u3082\u8efd\u6e1b\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Techniques Used for Cleaning\" data-line=\"75\">\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u306b\u4f7f\u7528\u3055\u308c\u308b\u6280\u8853<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"77\">\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u8cea\u3092\u52b9\u679c\u7684\u306b\u304d\u308c\u3044\u306b\u3059\u308b\u305f\u3081\u306b\u3001\u88fd\u9020\u696d\u8005\u306f\u9ad8\u5ea6\u306e\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u65b9\u6cd5\u3092\u4f7f\u7528\u3057\u307e\u3059:<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<ul data-line=\"79\">\n<li data-line=\"79\"><strong>\u5316\u5b66\u6d17\u6d44<\/strong>: : : \u3053\u306e\u65b9\u6cd5\u306f\u3001\u7279\u6b8a\u306a\u5316\u5b66\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u4f7f\u7528\u3057\u3066\u8868\u9762\u6c5a\u67d3\u7269\u8cea\u3092\u6eb6\u89e3\u304a\u3088\u3073\u9664\u53bb\u3059\u308b\u3053\u3068\u3092\u542b\u307f\u307e\u3059\u3002 \u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u69cb\u9020\u3092\u640d\u306a\u3046\u3053\u3068\u306a\u304f\u5fb9\u5e95\u7684\u306b\u6e05\u6383\u3057\u307e\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<ul data-line=\"79\">\n<li data-line=\"80\"><strong>\u8d85\u97f3\u6ce2\u6d17\u6d44<\/strong>:\u9ad8\u5468\u6ce2\u306e\u97f3\u6ce2\u306f\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u306e\u89e3\u6c7a\u306e\u9855\u5fae\u93e1\u306e\u6ce1\u3092\u4f5c\u6210\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u6ce1\u306f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u8868\u9762\u304b\u3089\u306e\u7c92\u5b50\u305d\u3057\u3066\u6b8b\u4f59\u3092\u3001\u6df1\u304f\u3001\u7cbe\u5bc6\u306a\u304d\u308c\u3044\u306b\u4e0e\u3048\u307e\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"82\">\u3069\u3061\u3089\u306e\u6280\u8853\u3082\u3001\u6700\u9069\u306a\u63a5\u7740\u306e\u305f\u3081\u306b\u57fa\u677f\u3092\u6e96\u5099\u3057\u3001 <strong>TaC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/strong> \u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306b\u3057\u3063\u304b\u308a\u3068\u63a5\u7740\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"Shaping and Machining\" data-line=\"84\">\u5f62\u6210\u304a\u3088\u3073\u6a5f\u68b0\u5316<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"86\">\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u306e\u5f8c\u3067\u3001\u9069\u7528\u306e\u7279\u5b9a\u306e\u6761\u4ef6\u3092\u6e80\u305f\u3059\u305f\u3081\u306b\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u57fa\u8cea\u3092\u5f62\u3065\u3051\u3001\u6a5f\u68b0\u3067\u9020\u3089\u306a\u3051\u308c\u3070\u306a\u308a\u307e\u305b\u3093\u3002 \u3053\u306e\u30b9\u30c6\u30c3\u30d7\u306f\u7cbe\u5bc6\u304a\u3088\u3073\u6027\u80fd\u306e\u305f\u3081\u306e\u57fa\u8cea\u3092\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Customizing the Graphite to Desired Shapes and Dimensions\" data-line=\"88\">\u6df1\u307f\u306e\u3042\u308b\u5f62\u72b6\u3068\u5bf8\u6cd5\u306b\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u3092\u30ab\u30b9\u30bf\u30de\u30a4\u30ba<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"90\">\u30b0\u30e9\u30ca\u30a4\u30c8\u57fa\u8cea\u306f\u3001\u76ee\u7684\u306e\u7528\u9014\u306b\u5fdc\u3058\u3066\u3001\u30c7\u30a3\u30b9\u30af\u3001\u30ea\u30f3\u30b0\u3001\u30d0\u30ec\u30eb\u306a\u3069\u306e\u69d8\u3005\u306a\u5f62\u72b6\u306b\u52a0\u5de5\u3055\u308c\u307e\u3059\u3002 \u4f8b\u3048\u3070\u3001, <strong>TaC Coated Guide Rings<\/strong> \u9ad8\u6e29\u74b0\u5883\u3067\u52b9\u679c\u7684\u306b\u6a5f\u80fd\u3059\u308b\u305f\u3081\u306b\u7cbe\u5bc6\u306a\u6b21\u5143\u3092\u8981\u6c42\u3057\u3066\u4e0b\u3055\u3044\u3002 \u52a0\u5de5\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308a\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u3084\u822a\u7a7a\u5b87\u5b99\u30b7\u30b9\u30c6\u30e0\u3067\u3082\u3001\u57fa\u677f\u304c\u30b7\u30fc\u30e0\u30ec\u30b9\u306b\u30d5\u30a3\u30c3\u30c8\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<blockquote data-line=\"92\">\n<p>&nbsp;<\/p>\n<p data-line=\"92\"><em>\u300c\u7cbe\u88fd\u304a\u3088\u3073\u5f62\u72b6\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u4f7f\u7528\u306f\u3001\u6b20\u9665\u306e\u5371\u967a\u6027\u3092\u4f4e\u4e0b\u3055\u305b\u3001\u7d50\u6676\u6210\u9577\u304a\u3088\u3073\u6750\u6599\u751f\u7523\u306b\u304a\u3051\u308b\u9ad8\u54c1\u8cea\u306e\u7d50\u679c\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002 \u30c4\u30a4\u30fc\u30c8<\/em><\/p>\n<p>&nbsp;<\/p>\n<\/blockquote>\n<p>&nbsp;<\/p>\n<p data-line=\"94\">\u30ab\u30b9\u30bf\u30e0\u5316\u306b\u3088\u308a\u3001\u57fa\u677f\u3092\u7279\u5b9a\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u5408\u308f\u305b\u3001\u52b9\u7387\u3068\u4fe1\u983c\u6027\u3092\u9ad8\u3081\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Ensuring Surface Smoothness for Optimal Coating Adhesion\" data-line=\"96\">\u6700\u9069\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u4ed8\u7740\u306e\u305f\u3081\u306e\u8868\u9762\u306e\u6ed1\u3089\u304b\u3055\u3092\u4fdd\u969c\u3057\u3066\u4e0b\u3055\u3044<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"98\">\u6ed1\u3089\u304b\u306a\u8868\u9762\u306f\u306e\u305f\u3081\u306b\u91cd\u5927\u3067\u3059 <strong>TaC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/strong> \u5747\u4e00\u306b\u4ed8\u7740\u3059\u308b\u305f\u3081\u3002 \u7c97\u304f\u307e\u305f\u306f\u4e0d\u5747\u7b49\u306a\u8868\u9762\u306f\u5f31\u70b9\u3001\u6c7a\u5b9a\u307e\u305f\u306f\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5931\u6557\u306b\u3064\u306a\u304c\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u30e1\u30fc\u30ab\u30fc\u306f\u7cbe\u5bc6\u52a0\u5de5\u6280\u8853\u3092\u4f7f\u7528\u3057\u3066\u3001\u5fc5\u8981\u306a\u8868\u9762\u3092\u6ed1\u3089\u304b\u306b\u3057\u307e\u3059\u3002 \u57fa\u8cea\u3092\u78e8\u304d\u3001\u5fae\u8abf\u6574\u3059\u308b\u3053\u3068\u306f\u4e0d\u898f\u5247\u6027\u3092\u9664\u53bb\u3057\u3001\u7406\u60f3\u7684\u306a\u57fa\u76e4\u3092\u306e\u305f\u3081\u306e\u4f5c\u308a\u307e\u3059 <strong>TaC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/strong>.<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"100\">\u4e01\u5be7\u306a\u6d17\u6d44\u3068\u30b7\u30a7\u30fc\u30d4\u30f3\u30b0\u3067\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u677f\u3092\u6e96\u5099\u3059\u308b\u3053\u3068\u3067\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306e\u6210\u529f\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u30b9\u30c6\u30c3\u30d7\u306f\u8010\u4e45\u304a\u3088\u3073\u9ad8\u6027\u80fd\u3092\u4f5c\u308a\u51fa\u3059\u305f\u3081\u306e\u57fa\u790e\u3092\u7f6e\u304d\u307e\u3059 <strong>\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong>\u3001\u9ad8\u5ea6\u306e\u9069\u7528\u306e\u6975\u7aef\u306a\u6761\u4ef6\u306b\u8010\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h2 id=\"Coating Process for TaC Coated Graphite Susceptors\" data-line=\"102\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u52a0\u5de5 \u30b0\u30e9\u30ca\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/h2>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"108\">\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306f\u6027\u80fd\u304a\u3088\u3073\u8010\u4e45\u6027\u3092\u6c7a\u5b9a\u3059\u308b\u969b\u306b\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059 <strong>\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong>. . \u5316\u5b66\u84b8\u6c17\u84b8\u7740(CVD)\u3084\u30a6\u30a7\u30c3\u30c8\u30bb\u30e9\u30df\u30c3\u30af\u306a\u3069\u306e\u9ad8\u5ea6\u306a\u6280\u8853\u306b\u3088\u308a\u3001\u5805\u7262\u3067\u5747\u4e00\u306aTaC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u65b9\u6cd5\u306f\u3001\u6975\u7aef\u306a\u6e29\u5ea6\u3068\u8150\u98df\u6027\u74b0\u5883\u306b\u8010\u3048\u308b\u611f\u53d7\u6027\u306e\u80fd\u529b\u3092\u9ad8\u3081\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"Chemical Vapor Deposition (CVD)\" data-line=\"110\">\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5\uff08CVD\uff09<\/h3>\n<p>&nbsp;<\/p>\n<h4 id=\"Overview of the CVD Process\" data-line=\"112\">Overview of the CVD Process<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"114\">\u5316\u5b66\u84b8\u6c17\u84b8\u7740(CVD)\u306f\u3001TAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u9069\u7528\u3059\u308b\u305f\u3081\u306e\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u65b9\u6cd5\u3067\u3059\u3002 \u3053\u306e\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u30b0\u30e9\u30ca\u30a4\u30c8\u57fa\u8cea\u3092\u30ac\u30b9\u72b6\u5f62\u72b6\u306e\u30bf\u30f3\u30bf\u30eb\u304a\u3088\u3073\u30ab\u30fc\u30dc\u30f3\u524d\u99c6\u4f53\u3092\u542b\u3080\u5236\u5fa1\u3055\u308c\u305f\u74b0\u5883\u306b\u3055\u3089\u3057\u307e\u3059\u3002 \u30ac\u30b9\u306f\u9ad8\u6e29\u3067\u53cd\u5fdc\u3057\u3001\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u8868\u9762\u306b\u30bf\u30f3\u30bf\u30eb\u30ab\u30fc\u30d0\u30a4\u30c9\u306e\u8584\u304f\u5747\u4e00\u306a\u5c64\u3092\u5f62\u6210\u3057\u307e\u3059\u3002 \u3053\u306e\u6280\u8853\u306f\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u539a\u3055\u304a\u3088\u3073\u69cb\u6210\u4e0a\u306e\u7cbe\u5bc6\u306a\u5236\u5fa1\u3092\u4fdd\u969c\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<blockquote data-line=\"116\">\n<p>&nbsp;<\/p>\n<p data-line=\"116\"><em>\u300cCVD\u306f\u3001\u70ad\u7d20\u6750\u6599\u306bTAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u6e96\u5099\u3059\u308b\u305f\u3081\u306e\u52b9\u7387\u7684\u306a\u65b9\u6cd5\u3067\u3042\u308a\u3001\u512a\u308c\u305f\u63a5\u7740\u6027\u3068\u5747\u4e00\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002 \u30c4\u30a4\u30fc\u30c8<\/em><\/p>\n<p>&nbsp;<\/p>\n<\/blockquote>\n<p>&nbsp;<\/p>\n<p data-line=\"118\">CVD\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u9ad8\u71b1\u304a\u3088\u3073\u5316\u5b66\u7684\u5b89\u5b9a\u6027\u3092\u5fc5\u8981\u3068\u3059\u308b\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u5bc6\u3067\u6b20\u9665\u306e\u306a\u3044\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u4f5c\u6210\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Conditions Required for CVD\" data-line=\"120\">CVD\u306b\u5fc5\u8981\u306a\u6761\u4ef6<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"122\">\u6700\u9069\u306a\u7d50\u679c\u3092\u5f97\u308b\u305f\u3081\u306b\u306f\u3001CVD \u30d7\u30ed\u30bb\u30b9\u4e2d\u306b\u7279\u5b9a\u306e\u6761\u4ef6\u3092\u7dad\u6301\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<ul data-line=\"124\">\n<li data-line=\"124\"><strong>\u6e29\u5ea6<\/strong>: : : \u53cd\u5fdc\u306f1200\u00b0C\u3092\u8d85\u3048\u308b\u6e29\u5ea6\u3067\u767a\u751f\u3057\u307e\u3059\u3002 \u3053\u306e\u9ad8\u6e29\u306f\u3001\u524d\u99c6\u30ac\u30b9\u304a\u3088\u3073\u5f37\u3044TaC\u5c64\u306e\u5f62\u6210\u306e\u5206\u89e3\u3092\u5bb9\u6613\u306b\u3057\u307e\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<ul data-line=\"124\">\n<li data-line=\"125\"><strong>\u30d7\u30ec\u30c3\u30b7\u30e3\u30fc<\/strong>: : : \u4f4e\u5727\u74b0\u5883\u3067\u3001\u5747\u4e00\u306a\u30ac\u30b9\u306e\u6d41\u308c\u3092\u4fdd\u3061\u3001\u4e0d\u8981\u306a\u53cd\u5fdc\u3092\u9632\u6b62\u3057\u307e\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<ul data-line=\"124\">\n<li data-line=\"126\"><strong>\u30ac\u30b9\u69cb\u6210<\/strong>: \u30bf\u30f3\u30bf\u30eb\u304a\u3088\u3073\u30ab\u30fc\u30dc\u30f3\u306e\u524d\u99c6\u4f53\u306e\u7cbe\u5bc6\u306a\u6bd4\u7387\u306f\u76ee\u7684\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u7279\u6027\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u91cd\u8981\u3067\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"128\">\u3053\u308c\u3089\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u3092\u614e\u91cd\u306b\u5236\u5fa1\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u6027\u80fd\u3092\u9ad8\u3081\u308b\u9ad8\u54c1\u8cea\u306eTAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u751f\u6210\u3067\u304d\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"Wet Ceramic Process\" data-line=\"130\">\u306c\u308c\u305f\u9676\u78c1\u5668\u306e\u30d7\u30ed\u30bb\u30b9<\/h3>\n<p>&nbsp;<\/p>\n<h4 id=\"Application of TaC Coating Using Wet Ceramic Techniques\" data-line=\"132\">\u30a6\u30a7\u30c3\u30c8\u30bb\u30e9\u30df\u30c3\u30af\u6280\u8853\u3092\u7528\u3044\u305fTAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5fdc\u7528<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"134\">\u30a6\u30a7\u30c3\u30c8\u30bb\u30e9\u30df\u30c3\u30af\u30d7\u30ed\u30bb\u30b9\u306f\u3001TAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u9069\u7528\u3059\u308b\u305f\u3081\u306e\u4ee3\u66ff\u65b9\u6cd5\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002 \u3053\u306e\u6280\u8853\u3067\u306f\u3001\u30bf\u30f3\u30bf\u30eb\u30ab\u30fc\u30d0\u30a4\u30c9\u7c92\u5b50\u3068\u7d50\u5408\u5264\u3092\u542b\u3080\u30b9\u30e9\u30ea\u30fc\u3092\u6e96\u5099\u3057\u307e\u3059\u3002 \u3053\u306e\u30b9\u30e9\u30ea\u30fc\u3092\u3001\u30c7\u30a3\u30c3\u30d4\u30f3\u30b0\u3084\u30b9\u30d7\u30ec\u30fc\u306a\u3069\u306e\u65b9\u6cd5\u3067\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u677f\u306b\u5857\u5e03\u3057\u307e\u3059\u3002 \u9069\u7528\u306e\u5f8c\u3067\u3001\u4e0a\u5857\u3092\u65bd\u3057\u3066\u3042\u308b\u57fa\u8cea\u306f\u4f59\u5206\u306a\u6e7f\u6c17\u3092\u53d6\u9664\u304f\u305f\u3081\u306b\u4e7e\u71e5\u3092\u7d4c\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"136\">\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001CVD\u3068\u6bd4\u8f03\u3057\u3066\u539a\u3044\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5806\u7a4d\u3092\u53ef\u80fd\u306b\u3057\u3001\u5f37\u5316\u3055\u308c\u305f\u8010\u6469\u8017\u6027\u3092\u5fc5\u8981\u3068\u3059\u308b\u7528\u9014\u306b\u9069\u3057\u3066\u3044\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"High-Temperature Solid-Phase Sintering for Strong Adhesion\" data-line=\"138\">\u5f37\u529b\u306a\u4ed8\u7740\u306e\u305f\u3081\u306e\u9ad8\u6e29\u56fa\u4f53\u7dda\u91cf\u306e\u713c\u7d50<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"140\">\u5f37\u56fa\u306a\u5bc6\u7740\u6027\u3092\u78ba\u4fdd\u3059\u308b\u305f\u3081\u306b\u3001\u88ab\u8986\u57fa\u6750\u306f\u9ad8\u6e29\u56fa\u76f8\u713c\u7d50\u3092\u53d7\u3051\u307e\u3059\u3002 \u3053\u306e\u30b9\u30c6\u30c3\u30d7\u306e\u9593\u306b\u3001\u6750\u6599\u30922000\u00b0\u4e0a\u306e\u6e29\u5ea6\u306b\u71b1\u3057\u307e\u3059 \u30c4\u30a4\u30fc\u30c8 \u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001TaC\u7c92\u5b50\u3092\u30d2\u30e5\u30fc\u30ba\u3057\u3001\u5bc6\u3067\u51dd\u96c6\u7684\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u4f5c\u6210\u3057\u307e\u3059\u3002 \u713c\u7d50\u5de5\u7a0b\u306f\u3001TAC\u5c64\u3068\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u6750\u306e\u63a5\u5408\u90e8\u3092\u5f37\u5316\u3057\u3001\u5265\u96e2\u30ea\u30b9\u30af\u3092\u4f4e\u6e1b\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<blockquote data-line=\"142\">\n<p>&nbsp;<\/p>\n<p data-line=\"142\"><em>\u300c\u9ad8\u6e29\u713c\u7d50\u306f\u3001\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u8010\u4e45\u6027\u3068\u9577\u6301\u3061\u3059\u308bTAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002 \u30c4\u30a4\u30fc\u30c8<\/em><\/p>\n<p>&nbsp;<\/p>\n<\/blockquote>\n<p>&nbsp;<\/p>\n<p data-line=\"144\">\u306c\u308c\u305f\u9676\u78c1\u5668\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u713c\u7d50\u3068\u7d50\u5408\u3057\u307e\u3057\u305f\u308a\u3001\u5f37\u3044TaC\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u4f5c\u308a\u51fa\u3059\u305f\u3081\u306e\u8cbb\u7528\u52b9\u679c\u304c\u5927\u304d\u3044\u89e3\u6c7a\u3092\u63d0\u4f9b\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"Managing Thermal Stresses\" data-line=\"146\">\u71b1\u7684\u30b9\u30c8\u30ec\u30b9\u306e\u7ba1\u7406<\/h3>\n<p>&nbsp;<\/p>\n<h4 id=\"Challenges of Delamination During Manufacturing\" data-line=\"148\">\u88fd\u9020\u6642\u306e\u6c7a\u610f\u306e\u8ab2\u984c<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"150\">\u71b1\u7684\u30b9\u30c8\u30ec\u30b9\u306f\u3001\u88fd\u9020\u4e2d\u306b\u91cd\u8981\u306a\u8ab2\u984c\u3092\u30dd\u30fc\u30ba <strong>\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong>. . \u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u3068TAC\u306e\u71b1\u81a8\u5f35\u4fc2\u6570\u306e\u9055\u3044\u306f\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u304c\u4e80\u88c2\u3084\u8131\u30e9\u30df\u30cd\u30fc\u30c8\u3092\u5f15\u304d\u8d77\u3053\u3057\u3001\u30b9\u30c8\u30ec\u30b9\u84c4\u7a4d\u306b\u3064\u306a\u304c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002 \u3053\u306e\u554f\u984c\u306f\u3001\u611f\u53d7\u6027\u306e\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u3068\u9577\u5bff\u3092\u59a5\u5354\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Techniques to Mitigate Thermal Stress\" data-line=\"152\">\u71b1\u30b9\u30c8\u30ec\u30b9\u3092\u8efd\u6e1b\u3059\u308b\u305f\u3081\u306e\u30c6\u30af\u30cb\u30c3\u30af<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"154\">\u3053\u308c\u3089\u306e\u8ab2\u984c\u306b\u5bfe\u51e6\u3059\u308b\u305f\u3081\u3001\u30e1\u30fc\u30ab\u30fc\u306f\u3044\u304f\u3064\u304b\u306e\u6280\u8853\u3092\u63a1\u7528\u3057\u3066\u3044\u307e\u3059<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<ul data-line=\"156\">\n<li data-line=\"156\"><strong>\u7c92\u72b6\u6696\u623f\u304a\u3088\u3073\u51b7\u5374<\/strong>: : : \u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u5de5\u7a0b\u306e\u52a0\u71b1\u901f\u5ea6\u3068\u51b7\u5374\u901f\u5ea6\u3092\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u3059\u308b\u3053\u3068\u3067\u3001\u71b1\u885d\u6483\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u3001\u30b9\u30c8\u30ec\u30b9\u3092\u8efd\u6e1b\u3067\u304d\u307e\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<ul data-line=\"156\">\n<li data-line=\"157\"><strong>\u4e2d\u9593\u5c64<\/strong>: \u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u8cea\u3068TAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u9593\u306b\u7de9\u885d\u5c64\u3092\u8ffd\u52a0\u3059\u308b\u3068\u3001\u8131\u30e9\u30df\u30cd\u30fc\u30c8\u3092\u9632\u3050\u71b1\u5fdc\u529b\u3092\u5438\u53ce\u3067\u304d\u307e\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<ul data-line=\"156\">\n<li data-line=\"158\"><strong>\u6700\u9069\u5316\u3055\u308c\u305f\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u539a\u3055<\/strong>: \u5747\u4e00\u3067\u9069\u5207\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u539a\u3055\u3092\u7dad\u6301\u3059\u308b\u3068\u3001\u5fdc\u529b\u96c6\u4e2d\u30dd\u30a4\u30f3\u30c8\u304c\u6e1b\u5c11\u3057\u307e\u3059.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"160\">\u3053\u308c\u3089\u306e\u6226\u7565\u306f\u3001TAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5b8c\u5168\u6027\u3092\u78ba\u4fdd\u3057\u3001\u30b5\u30b9\u30da\u30f3\u30b5\u30fc\u304c\u8981\u6c42\u3059\u308b\u74b0\u5883\u3067\u78ba\u5b9f\u306b\u5b9f\u884c\u3067\u304d\u308b\u3088\u3046\u306b\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"162\">\u9ad8\u5ea6\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853\u3092\u63a1\u7528\u3057\u3001\u71b1\u5fdc\u529b\u8ab2\u984c\u306b\u5bfe\u51e6\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001 <strong>\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong> \u9ad8\u6e29\u304a\u3088\u3073\u8150\u98df\u6027\u306e\u9069\u7528\u306eExcel\u3002 \u3053\u308c\u3089\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u8010\u4e45\u6027\u3092\u78ba\u4fdd\u3057\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u3084\u822a\u7a7a\u5b87\u5b99\u306a\u3069\u306e\u696d\u754c\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3068\u306a\u308a\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h2 id=\"Quality Control in Manufacturing\" data-line=\"164\">\u88fd\u9020\u696d\u306e\u54c1\u8cea\u7ba1\u7406<\/h2>\n<p>&nbsp;<\/p>\n<p data-line=\"167\">\u54c1\u8cea\u7ba1\u7406\u306f\u3042\u3089\u3086\u308b\u3053\u3068\u3092\u4fdd\u969c\u3057\u307e\u3059 <strong>\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong> \u6027\u80fd\u304a\u3088\u3073\u4fe1\u983c\u6027\u306e\u6700\u9ad8\u57fa\u6e96\u3092\u6e80\u305f\u3057\u307e\u3059\u3002 \u5fb9\u5e95\u3057\u305f\u691c\u67fb\u3068\u53b3\u683c\u306a\u8a66\u9a13\u3092\u884c\u3046\u3053\u3068\u3067\u3001\u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u304c\u8981\u6c42\u3059\u308b\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u4e00\u8cab\u3057\u305f\u7d50\u679c\u3092\u3082\u305f\u3089\u3059\u3053\u3068\u3092\u4fdd\u8a3c\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"Inspection of Coating\" data-line=\"169\">\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u70b9\u691c<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"171\">\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u70b9\u691c\u30d7\u30ed\u30bb\u30b9\u306fTaC\u306e\u5c64\u306e\u5747\u7b49\u6027\u305d\u3057\u3066\u8010\u4e45\u6027\u3092\u70b9\u691c\u3059\u308b\u3053\u3068\u306b\u7126\u70b9\u3092\u5408\u308f\u305b\u307e\u3059\u3002 \u3053\u306e\u30b9\u30c6\u30c3\u30d7\u306f\u3001\u53d7\u5bb9\u4f53\u304c\u6975\u7aef\u306a\u6761\u4ef6\u4e0b\u3067\u52b9\u679c\u7684\u306b\u5b9f\u884c\u3059\u308b\u3053\u3068\u3092\u4fdd\u8a3c\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Visual and Microscopic Examination for Uniformity\" data-line=\"173\">\u5747\u4e00\u6027\u306e\u305f\u3081\u306e\u8996\u899a\u304a\u3088\u3073\u9855\u5fae\u93e1\u691c\u67fb<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"175\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u8996\u899a\u7684\u306b\u691c\u67fb\u3057\u3001\u4e80\u88c2\u3001\u6ce1\u3001\u307e\u305f\u306f\u4e0d\u5747\u7b49\u306a\u539a\u3055\u306a\u3069\u306e\u8868\u9762\u4e0d\u898f\u5247\u6027\u3092\u8b58\u5225\u3057\u307e\u3059\u3002 \u3053\u306e\u521d\u671f\u30c1\u30a7\u30c3\u30af\u306f\u3001\u611f\u53d7\u6027\u306e\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u3092\u640d\u306a\u3046\u53ef\u80fd\u6027\u304c\u3042\u308b\u660e\u3089\u304b\u306a\u6b20\u9665\u3092\u691c\u51fa\u3059\u308b\u306e\u306b\u5f79\u7acb\u3061\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"177\">\u3088\u308a\u8a73\u7d30\u306a\u5206\u6790\u306e\u305f\u3081\u306b\u3001\u9855\u5fae\u93e1\u691c\u67fb\u3092\u4f7f\u7528\u3057\u307e\u3059\u3002 \u3053\u306e\u65b9\u6cd5\u306f\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u69cb\u9020\u306e\u30de\u30a4\u30af\u30ed\u30af\u30e9\u30c3\u30af\u3084\u77db\u76fe\u306a\u3069\u306e\u7d30\u304b\u3044\u8a73\u7d30\u3092\u660e\u3089\u304b\u306b\u3057\u307e\u3059\u3002 \u5747\u4e00\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306b\u3088\u308a\u3001\u9ad8\u6e29\u64cd\u4f5c\u6642\u306e\u71b1\u5b89\u5b9a\u6027\u3068\u8010\u85ac\u54c1\u6027\u304c\u7dad\u6301\u3055\u308c\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<blockquote data-line=\"179\">\n<p>&nbsp;<\/p>\n<p data-line=\"179\"><em>\u300cFluwless TaC\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u904e\u9177\u306a\u74b0\u5883\u306b\u8010\u3048\u3001\u9577\u671f\u306b\u308f\u305f\u308b\u4fe1\u983c\u6027\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002 \u30c4\u30a4\u30fc\u30c8<\/em><\/p>\n<p>&nbsp;<\/p>\n<\/blockquote>\n<p>&nbsp;<\/p>\n<p data-line=\"181\">\u8996\u899a\u691c\u67fb\u3068\u9855\u5fae\u93e1\u691c\u67fb\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u3067\u3001\u5fc5\u8981\u306a\u54c1\u8cea\u57fa\u6e96\u3092\u6e80\u305f\u3057\u3066\u3044\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Testing for Adhesion and Durability\" data-line=\"183\">\u4ed8\u7740\u529b\u304a\u3088\u3073\u8010\u4e45\u6027\u306e\u30c6\u30b9\u30c8<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"185\">\u63a5\u7740\u8a66\u9a13\u3067\u306f\u3001TAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30dc\u30f3\u30c9\u3092\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u6750\u306b\u3069\u308c\u3060\u3051\u3088\u304f\u8a55\u4fa1\u3057\u3066\u3044\u307e\u3059\u3002 \u76ae\u3092\u3080\u304f\u304b\u3001\u307e\u305f\u306f\u5265\u96e2\u306e\u305f\u3081\u306b\u70b9\u691c\u3059\u308b\u305f\u3081\u306b\u5857\u3089\u308c\u305f\u8868\u9762\u306b\u6a5f\u68b0\u7684\u5727\u529b\u3092\u52a0\u3048\u3066\u4e0b\u3055\u3044\u3002 \u9577\u671f\u4f7f\u7528\u4e2d\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u5b8c\u5168\u6027\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u306b\u306f\u5f37\u3044\u4ed8\u7740\u304c\u91cd\u8981\u3067\u3059.<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"187\">\u8010\u4e45\u6027\u8a66\u9a13\u3067\u306f\u3001\u9ad8\u6e29\u3084\u8150\u98df\u6027\u30ac\u30b9\u3078\u306e\u66b4\u9732\u306a\u3069\u306e\u73fe\u5b9f\u7684\u306a\u6761\u4ef6\u3092\u30b7\u30df\u30e5\u30ec\u30fc\u30c8\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u30c6\u30b9\u30c8\u306f\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u80fd\u529b\u3092\u8a55\u4fa1\u3057\u3001\u6469\u8017\u3084\u52a3\u5316\u3092\u6642\u9593\u3092\u304b\u3051\u3066\u62b5\u6297\u3057\u307e\u3059\u3002 \u8010\u4e45\u6027\u306e\u3042\u308bTAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u5bff\u547d\u3092\u5ef6\u3070\u3057\u3001\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3059\u308b\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u677f\u3092\u4fdd\u8b77\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"Performance Testing\" data-line=\"189\">\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u30c6\u30b9\u30c8<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"191\">\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u30c6\u30b9\u30c8\u306f\u3001\u30b9\u30bb\u30d7\u30bf\u30fc\u304c\u610f\u56f3\u3057\u305f\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u78ba\u5b9f\u306b\u6a5f\u80fd\u3059\u308b\u80fd\u529b\u3092\u691c\u8a3c\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u30c6\u30b9\u30c8\u306f\u3001\u71b1\u304a\u3088\u3073\u5316\u5b66\u62b5\u6297\u3001\u304a\u3088\u3073\u696d\u754c\u6a19\u6e96\u306e\u9806\u5b88\u306b\u7126\u70b9\u3092\u5408\u308f\u305b\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Thermal and Chemical Resistance Tests\" data-line=\"193\">\u71b1\u304a\u3088\u3073\u5316\u5b66\u62b5\u6297\u30c6\u30b9\u30c8<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"195\">\u71b1\u62b5\u6297\u30c6\u30b9\u30c8\u306f\u5b89\u5b9a\u6027\u304a\u3088\u3073\u6027\u80fd\u3092\u8a55\u4fa1\u3059\u308b\u305f\u3081\u306b\u6975\u5ea6\u306a\u6e29\u5ea6\u3078\u306e\u611f\u53d7\u6027\u3092\u9732\u51fa\u3057\u307e\u3059\u3002 TaC\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f2600\u00b0\u3092\u8d85\u904e\u3059\u308b\u6e29\u5ea6\u306e\u9178\u5316\u304b\u4f4e\u4e0b\u304b\u3089\u306e\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u57fa\u8cea\u3092\u9632\u3050\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059 \u30c4\u30a4\u30fc\u30c8 \u3053\u306e\u30d7\u30ed\u30d1\u30c6\u30a3\u306f\u3001\u5358\u4e00\u306e\u7d50\u6676\u6210\u9577\u3084\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u306a\u3069\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u4e0d\u53ef\u6b20\u3067\u3059.<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"197\">\u8010\u85ac\u54c1\u6027\u8a66\u9a13\u306f\u3001\u53cd\u5fdc\u6027\u30ac\u30b9\u3084\u8150\u98df\u6027\u6750\u6599\u306e\u611f\u53d7\u6027\u3092\u5bfe\u8c61\u3068\u3057\u3066\u3044\u307e\u3059\u3002 \u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u8cea\u3092\u640d\u306a\u3046\u53ef\u80fd\u6027\u304c\u3042\u308b\u5316\u5b66\u53cd\u5fdc\u3092\u9632\u3050\u3001\u4fdd\u8b77\u30d0\u30ea\u30a2\u3068\u3057\u3066\u6a5f\u80fd\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u30c6\u30b9\u30c8\u3067\u306f\u3001\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u6a5f\u80fd\u6027\u3092\u640d\u306a\u3046\u3053\u3068\u306a\u304f\u3001\u904e\u9177\u306a\u74b0\u5883\u306b\u8010\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<blockquote data-line=\"199\">\n<p>&nbsp;<\/p>\n<p data-line=\"199\"><em>\u300cTAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u512a\u308c\u305f\u5316\u5b66\u7684\u4e0d\u6d3b\u6027\u306f\u3001\u30b9\u30bb\u30d7\u30bf\u30fc\u304c\u534a\u5c0e\u4f53\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306e\u5b8c\u5168\u6027\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u307e\u3059\u3002 \u30c4\u30a4\u30fc\u30c8<\/em><\/p>\n<p>&nbsp;<\/p>\n<\/blockquote>\n<p>&nbsp;<\/p>\n<p data-line=\"201\">\u3053\u308c\u3089\u306e\u30c6\u30b9\u30c8\u3092\u901a\u904e\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u9ad8\u6027\u80fd\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u305d\u306e\u9069\u5408\u6027\u3092\u8a3c\u660e\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Ensuring Compliance with Industry Standards\" data-line=\"203\">Ensuring Compliance with Industry Standards<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"205\">\u3042\u3089\u3086\u308b\u3053\u3068\u3092\u4fdd\u969c\u3057\u307e\u3059 <strong>\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong> \u8cea\u304a\u3088\u3073\u6027\u80fd\u306e\u305f\u3081\u306e\u4f01\u696d\u306e\u6a19\u6e96\u306b\u5f93\u3044\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u57fa\u6e96\u306f\u3001\u71b1\u5b89\u5b9a\u6027\u3001\u8010\u85ac\u54c1\u6027\u3001\u6a5f\u68b0\u7684\u5f37\u5ea6\u306a\u3069\u306e\u7279\u6027\u306e\u6700\u5c0f\u8981\u4ef6\u3092\u5b9a\u7fa9\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u30d9\u30f3\u30c1\u30de\u30fc\u30af\u306f\u3001\u30b9\u30bb\u30d7\u30bf\u30fc\u304c\u534a\u5c0e\u4f53\u88fd\u9020\u3084\u822a\u7a7a\u5b87\u5b99\u30b7\u30b9\u30c6\u30e0\u306a\u3069\u306e\u91cd\u8981\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u78ba\u5b9f\u306b\u5b9f\u884c\u3055\u308c\u308b\u3053\u3068\u3092\u4fdd\u8a3c\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"207\">\u5b9a\u671f\u7684\u306a\u76e3\u67fb\u3068\u8a8d\u8a3c\u306b\u3088\u308a\u3001\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306e\u54c1\u8cea\u3092\u3055\u3089\u306b\u691c\u8a3c\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u57fa\u6e96\u306b\u5247\u308a\u3001\u304a\u5ba2\u69d8\u3068\u4fe1\u983c\u3092\u7bc9\u304d\u3001\u5148\u9032\u6280\u8853\u306e\u4fe1\u983c\u3067\u304d\u308b\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3068\u3057\u3066\u30b9\u30bb\u30d7\u30bf\u30fc\u3092\u78ba\u7acb\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"209\">\u7d30\u5fc3\u306e\u54c1\u8cea\u7ba1\u7406\u3092\u901a\u3057\u3066\u3001\u3042\u306a\u305f\u306f\u305d\u308c\u3092\u4fdd\u969c\u3057\u307e\u3059 <strong>\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong> \u6bd4\u985e\u306e\u306a\u3044\u6027\u80fd\u3068\u8010\u4e45\u6027\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u5bfe\u7b56\u306f\u3001\u7cbe\u5bc6\u3068\u4fe1\u983c\u6027\u3092\u5fc5\u8981\u3068\u3059\u308b\u696d\u754c\u306e\u91cd\u8981\u306a\u30c4\u30fc\u30eb\u3068\u3057\u3066\u3001\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u8a55\u5224\u3092\u628a\u63e1\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h2 id=\"Applications and Benefits of TaC Coated Graphite Susceptors\" data-line=\"211\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3068\u5229\u70b9<\/h2>\n<p>&nbsp;<\/p>\n<h3 id=\"Applications\" data-line=\"214\">\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h3>\n<p>&nbsp;<\/p>\n<h4 id=\"Use in Semiconductor Manufacturing (e.g., epitaxy and wafer processing)\" data-line=\"216\">\u534a\u5c0e\u4f53\u88fd\u9020(\u4f8b\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u3001\u30a6\u30a8\u30cf\u52a0\u5de5)<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"218\">\u304a\u554f\u3044\u5408\u308f\u305b <strong>\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong> \u534a\u5c0e\u4f53\u88fd\u9020\u306b\u6b20\u304b\u305b\u306a\u3044\u3002 \u3053\u308c\u3089\u306e\u53d7\u5bb9\u4f53\u306f\u3001\u7cbe\u5ea6\u3068\u5b89\u5b9a\u6027\u304c\u30d1\u30e9\u30de\u30a6\u30f3\u30c8\u3067\u3042\u308b\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u3084\u30a6\u30a7\u30fc\u30cf\u51e6\u7406\u306a\u3069\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002 TaC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u8584\u819c\u306e\u84b8\u7740\u4e2d\u306b\u5747\u4e00\u306a\u71b1\u5206\u5e03\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002 \u534a\u5c0e\u4f53\u5c64\u306e\u6b20\u9665\u3092\u6700\u5c0f\u9650\u306b\u3057\u3001LED\u3084\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306a\u3069\u306e\u30c7\u30d0\u30a4\u30b9\u306e\u54c1\u8cea\u3092\u5411\u4e0a\u3055\u305b\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<blockquote data-line=\"220\">\n<p>&nbsp;<\/p>\n<p data-line=\"220\"><em>\u300cTAC\u3067\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u71b1\u5206\u91ce\u6750\u6599\u306f\u3001\u4e0d\u7d14\u7269\u3084\u6b20\u9665\u3092\u6e1b\u3089\u3059\u3053\u3068\u3067\u3001SiC\u3068AlN\u5358\u7d50\u6676\u306e\u54c1\u8cea\u3092\u5927\u5e45\u306b\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002 \u30c4\u30a4\u30fc\u30c8<\/em><\/p>\n<p>&nbsp;<\/p>\n<\/blockquote>\n<p>&nbsp;<\/p>\n<p data-line=\"222\">\u307e\u305f\u3001TAC\u306e\u5316\u5b66\u7684\u4e0d\u6d3b\u6027\u306f\u3001\u7d50\u6676\u6210\u9577\u4e2d\u306e\u6c5a\u67d3\u3092\u9632\u304e\u3001\u70ad\u5316\u30b1\u30a4\u7d20(SiC)\u3084\u7a92\u5316\u30ac\u30ea\u30a6\u30e0(GaN)\u306a\u3069\u306e\u6750\u6599\u306e\u7d14\u5ea6\u3092\u7dad\u6301\u3057\u307e\u3059\u3002 \u3053\u308c\u306b\u3088\u308a\u3001\u5148\u9032\u6280\u8853\u3067\u4f7f\u7528\u3055\u308c\u308b\u9ad8\u6027\u80fd\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u306b\u4e0d\u53ef\u6b20\u3067\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Applications in Aerospace and High-Temperature Furnaces\" data-line=\"224\">\u5927\u6c17\u304a\u3088\u3073\u9ad8\u6e29\u7089\u306e\u9069\u7528<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"226\">\u822a\u7a7a\u5b87\u5b99\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u306f\u3001 <strong>\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong> \u6975\u7aef\u306a\u6761\u4ef6\u306b\u8010\u3048\u308b\u80fd\u529b\u306e\u305f\u3081\u3002 \u822a\u7a7a\u5b87\u5b99\u7523\u696d\u306f\u3001\u6027\u80fd\u3092\u640d\u306a\u3046\u3053\u3068\u306a\u304f\u9ad8\u6e29\u3084\u8150\u98df\u6027\u74b0\u5883\u306b\u8010\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u6750\u6599\u3092\u8981\u6c42\u3057\u307e\u3059\u3002 \u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u9178\u5316\u3068\u52a3\u5316\u304b\u3089\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u677f\u3092\u4fdd\u8b77\u3057\u3001\u30bf\u30fc\u30d3\u30f3\u30d6\u30ec\u30fc\u30c9\u88fd\u9020\u3084\u9ad8\u6e29\u8a66\u9a13\u306a\u3069\u306e\u7528\u9014\u3067\u306e\u8010\u4e45\u6027\u3092\u4fdd\u8a3c\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"228\">\u9ad8\u6e29\u7089\u306f\u307e\u305f\u3053\u308c\u3089\u306e\u611f\u53d7\u6027\u304b\u3089\u5bc4\u4e0e\u3057\u307e\u3059\u3002 \u5316\u5b66\u53cd\u5fdc\u306b\u5bfe\u3059\u308b\u71b1\u5b89\u5b9a\u6027\u3068\u62b5\u6297\u306f\u3001\u91d1\u5c5e\u7cbe\u88fd\u3084\u7d50\u6676\u6210\u9577\u306a\u3069\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u6700\u9069\u3067\u3059\u3002 \u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u9577\u3044\u8010\u7528\u5e74\u6570\u306f\u3001200\u6642\u9593\u3092\u8d85\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u52b9\u7387\u6027\u3092\u9ad8\u3081\u3001\u3053\u308c\u3089\u306e\u8981\u6c42\u306e\u53b3\u3057\u3044\u74b0\u5883\u3067\u904b\u7528\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"Benefits\" data-line=\"230\">\u30e1\u30ea\u30c3\u30c8<\/h3>\n<p>&nbsp;<\/p>\n<h4 id=\"Enhanced Durability and Longevity\" data-line=\"232\">\u8010\u4e45\u6027\u3068\u5bff\u547d\u306e\u5411\u4e0a<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"234\">\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u3068TAC\u306e\u7d44\u307f\u5408\u308f\u305b\u306f\u3001\u6bd4\u985e\u306e\u306a\u3044\u8010\u4e45\u6027\u3067\u30b5\u30b9\u30da\u30f3\u30b5\u30fc\u3092\u4f5c\u6210\u3057\u307e\u3059\u3002 \u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u904e\u9177\u306a\u6761\u4ef6\u3067\u3082\u5bff\u547d\u3092\u5ef6\u3070\u3059\u3001\u6469\u8017\u304a\u3088\u3073\u8150\u98df\u304b\u3089\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u8cea\u3092\u30b7\u30fc\u30eb\u30c9\u3057\u307e\u3059\u3002 \u305f\u3068\u3048\u3070\u3001TaC-coated crucibles\u306f\u3001\u9577\u671f\u4f7f\u7528\u5f8c\u306e\u69cb\u9020\u7684\u6574\u5408\u6027\u3068\u5916\u89b3\u3092\u7dad\u6301\u3057\u3001\u8907\u6570\u306e\u30ea\u30b5\u30a4\u30af\u30eb\u30b5\u30a4\u30af\u30eb\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002 \u3053\u306e\u8010\u4e45\u6027\u306f\u3001\u983b\u7e41\u306a\u4ea4\u63db\u306e\u5fc5\u8981\u6027\u3092\u6e1b\u3089\u3057\u3001\u6642\u9593\u3068\u30ea\u30bd\u30fc\u30b9\u3092\u7bc0\u7d04\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<blockquote data-line=\"236\">\n<p>&nbsp;<\/p>\n<p data-line=\"236\"><em>\u300cTaC-coated crucibles\u306f\u3001\u6700\u5927200\u6642\u9593\u306e\u8010\u7528\u5e74\u6570\u3092\u63d0\u4f9b\u3057\u3001\u30b5\u30b9\u30c6\u30a4\u30ca\u30d3\u30ea\u30c6\u30a3\u3092\u5411\u4e0a\u3055\u305b\u308b\u305f\u3081\u306b\u3001\u8907\u6570\u56de\u30ea\u30b5\u30a4\u30af\u30eb\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u30c4\u30a4\u30fc\u30c8<\/em><\/p>\n<p>&nbsp;<\/p>\n<\/blockquote>\n<p>&nbsp;<\/p>\n<p data-line=\"238\">TaC-coated\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3092\u9078\u629e\u3059\u308b\u3053\u3068\u3067\u3001\u9577\u671f\u306b\u308f\u305f\u308b\u4e00\u8cab\u3057\u305f\u6027\u80fd\u3092\u767a\u63ee\u3059\u308b\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u30c4\u30fc\u30eb\u306b\u6295\u8cc7\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h4 id=\"Improved Resistance to Corrosion and Thermal Stress\" data-line=\"240\">\u8150\u98df\u304a\u3088\u3073\u71b1\u5727\u529b\u3078\u306e\u6539\u5584\u3055\u308c\u305f\u62b5\u6297<\/h4>\n<p>&nbsp;<\/p>\n<p data-line=\"242\">TaC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u512a\u308c\u305f\u62b5\u6297\u304b\u3089\u8150\u98df\u304a\u3088\u3073\u71b1\u5fdc\u529b\u3078\u306e\u5229\u70b9\u3002 TaC\u306e\u5316\u5b66\u7684\u4e0d\u6d3b\u6027\u306f\u3001\u8150\u98df\u6027\u30ac\u30b9\u3084\u6750\u6599\u3068\u306e\u53cd\u5fdc\u3092\u9632\u304e\u3001\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u8cea\u3092\u640d\u50b7\u304b\u3089\u4fdd\u8b77\u3057\u307e\u3059\u3002 \u3053\u306e\u7279\u6027\u306f\u3001\u6750\u6599\u306e\u7d14\u5ea6\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3042\u308b\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u7279\u306b\u4fa1\u5024\u304c\u3042\u308a\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"244\">\u71b1\u7684\u30b9\u30c8\u30ec\u30b9\u306f\u3001\u9ad8\u6e29\u7528\u9014\u3067\u306e\u8ab2\u984c\u3092\u5f37\u8abf\u3059\u308b\u3053\u3068\u304c\u591a\u3044\u3002 \u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u8fc5\u901f\u306a\u6e29\u5ea6\u5909\u5316\u306b\u8010\u3048\u308b\u5b89\u5b9a\u3057\u305f\u30d0\u30ea\u30a2\u3092\u63d0\u4f9b\u3059\u308b\u3053\u3068\u3067\u3001\u3053\u308c\u3089\u306e\u30b9\u30c8\u30ec\u30b9\u3092\u8efd\u6e1b\u3057\u307e\u3059\u3002 \u3053\u306e\u5b89\u5b9a\u6027\u306f\u3001\u53d7\u5bb9\u4f53\u304c\u6975\u7aef\u306a\u74b0\u5883\u3067\u3082\u78ba\u5b9f\u306b\u5b9f\u884c\u3057\u3001\u91cd\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u4e2d\u306b\u969c\u5bb3\u306e\u5371\u967a\u6027\u3092\u6e1b\u3089\u3059\u3053\u3068\u3092\u4fdd\u8a3c\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<p data-line=\"246\">\u72ec\u81ea\u306e\u7279\u6027\u3092\u6d3b\u304b\u3057\u3066 <strong>\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc<\/strong>\u3055\u307e\u3056\u307e\u306a\u7523\u696d\u306e\u52b9\u7387\u6027\u3001\u4fe1\u983c\u6027\u304a\u3088\u3073\u6301\u7d9a\u53ef\u80fd\u6027\u3092\u9ad8\u3081\u308b\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3078\u306e\u30a2\u30af\u30bb\u30b9\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<hr data-line=\"248\">\n<p>&nbsp;<\/p>\n<p data-line=\"250\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u88fd\u9020\u306f\u3001\u6975\u7aef\u306a\u74b0\u5883\u306e\u8981\u6c42\u3092\u6e80\u305f\u3059\u305f\u3081\u306b\u3001\u7cbe\u5ea6\u3001\u9769\u65b0\u3001\u9ad8\u54c1\u8cea\u306e\u6750\u6599\u3092\u7d44\u307f\u5408\u308f\u305b\u307e\u3059\u3002 \u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u71b1\u4f1d\u5c0e\u6027\u3068TAC\u306e\u512a\u308c\u305f\u8010\u85ac\u54c1\u6027\u3092\u767a\u63ee\u3059\u308b\u3053\u3068\u3067\u3001\u8010\u4e45\u6027\u3068\u6027\u80fd\u306b\u512a\u308c\u3066\u3044\u307e\u3059\u3002 \u534a\u5c0e\u4f53\u88fd\u9020\u3084\u822a\u7a7a\u5b87\u5b99\u306a\u3069\u306e\u7523\u696d\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u62c5\u3063\u3066\u304a\u308a\u3001\u6750\u6599\u306e\u7d14\u5ea6\u3068\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3042\u308b\u3002 \u8150\u98df\u3001\u71b1\u5fdc\u529b\u3001\u6469\u8017\u306b\u62b5\u6297\u3059\u308b\u80fd\u529b\u306f\u3001\u9ad8\u6a5f\u80fd\u306a\u7528\u9014\u306b\u6b20\u304b\u305b\u306a\u3044\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u64cd\u4f5c\u3092\u4fdd\u8a3c\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h2 id=\"FAQ\" data-line=\"252\">\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/h2>\n<p>&nbsp;<\/p>\n<h3 id=\"What are the raw materials used for TaC Coated Graphite Susceptor manufacturing?\" data-line=\"255\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30ca\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u88fd\u9020\u306b\u4f7f\u7528\u3055\u308c\u308b\u539f\u6750\u6599\u306f\u4f55\u3067\u3059\u304b?<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"257\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u3001\u9ad8\u7d14\u5ea6\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u3068\u30bf\u30f3\u30bf\u30eb\u30ab\u30fc\u30d0\u30a4\u30c9(TaC)\u306e2\u3064\u306e\u4e3b\u8981\u306a\u6750\u6599\u3092\u4f7f\u7528\u3057\u3066\u88fd\u9020\u3055\u308c\u3066\u3044\u307e\u3059\u3002 \u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u8cea\u306f\u3001\u9ad8\u6e29\u7528\u9014\u306b\u7406\u60f3\u7684\u306a\u71b1\u4f1d\u5c0e\u6027\u3068\u5b89\u5b9a\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002 \u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3068\u3057\u3066\u52a0\u3048\u3089\u308c\u305fTaC\u306f\u3001\u5316\u5b66\u62b5\u6297\u304a\u3088\u3073\u71b1\u8010\u4e45\u6027\u3092\u9ad8\u3081\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u53d7\u5bb9\u4f53\u306f\u3001\u591a\u304f\u306e\u5834\u5408\u3001\u30c7\u30a3\u30b9\u30af\u3084\u30d0\u30ec\u30eb\u306a\u3069\u306e\u5f62\u72b6\u3067\u6765\u307e\u3059\u3002 \u30c7\u30a3\u30b9\u30af\u578b\u30b5\u30b9\u30da\u30f3\u30b5\u306f\u3001\u4e00\u822c\u7684\u306a\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u30d7\u30ed\u30bb\u30b9\u3067\u4f7f\u7528\u3055\u308c\u3001\u30d0\u30ec\u30eb\u578b\u306f\u5358\u7d50\u6676\u6210\u9577\u306e\u305f\u3081\u306b\u597d\u307e\u308c\u3066\u3044\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<blockquote data-line=\"259\">\n<p>&nbsp;<\/p>\n<p data-line=\"259\"><em>\u300c\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u71b1\u7279\u6027\u3068TAC\u306e\u4fdd\u8b77\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u7d44\u307f\u5408\u308f\u305b\u306b\u3088\u308a\u3001MOCVD\u3084\u534a\u5c0e\u4f53\u88fd\u9020\u306a\u3069\u306e\u8981\u6c42\u74b0\u5883\u3067\u512a\u308c\u305f\u6027\u80fd\u3092\u767a\u63ee\u3057\u307e\u3059\u3002 \u30c4\u30a4\u30fc\u30c8<\/em><\/p>\n<p>&nbsp;<\/p>\n<\/blockquote>\n<p>&nbsp;<\/p>\n<h3 id=\"How does the TaC coating improve the performance of graphite susceptors?\" data-line=\"261\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u6027\u80fd\u3092\u5411\u4e0a\u3055\u305b\u308b\u65b9\u6cd5\u306f?<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"263\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u5316\u5b66\u53cd\u5fdc\u3084\u71b1\u5206\u89e3\u306b\u5bfe\u3059\u308b\u4fdd\u8b77\u30d0\u30ea\u30a2\u3092\u63d0\u4f9b\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u611f\u53d7\u6027\u306e\u6027\u80fd\u3092\u5927\u5e45\u306b\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002 2600\u00b0\u3092\u8d85\u3048\u308b\u6e29\u5ea6\u3067\u3082\u3001\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u677f\u306e\u9178\u5316\u3092\u9632\u3050 \u30c4\u30a4\u30fc\u30c8 \u3053\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u307e\u305f\u3001\u8010\u6469\u8017\u6027\u3092\u6539\u5584\u3057\u3001\u30b9\u30bb\u30d7\u30bf\u30fc\u304c\u9577\u671f\u4f7f\u7528\u4e2d\u306b\u305d\u306e\u69cb\u9020\u7684\u5b8c\u5168\u6027\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u3092\u78ba\u8a8d\u3057\u307e\u3059\u3002 \u305d\u306e\u7d50\u679c\u306f\u3001GaN\u7d50\u6676\u6210\u9577\u3084\u30a6\u30a7\u30fc\u30cf\u51e6\u7406\u306a\u3069\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u6975\u7aef\u306a\u6761\u4ef6\u306b\u8010\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u8010\u4e45\u6027\u306e\u3042\u308b\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3067\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"What industries benefit from TaC Coated Graphite Susceptors?\" data-line=\"265\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u696d\u754c\u30e1\u30ea\u30c3\u30c8\u306f\u4f55\u3067\u3059\u304b?<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"267\">\u534a\u5c0e\u4f53\u88fd\u9020\u3001\u822a\u7a7a\u5b87\u5b99\u3001\u9ad8\u6e29\u7089\u306a\u3069\u306e\u696d\u754c\u306b\u6b20\u304b\u305b\u306a\u3044\u3001TAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u304c\u898b\u3064\u304b\u308a\u307e\u3059\u3002 \u534a\u5c0e\u4f53\u88fd\u9020\u3067\u306f\u3001\u3053\u308c\u3089\u306e\u53d7\u5bb9\u4f53\u306f\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u304a\u3088\u3073MOCVD\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3001\u5747\u4e00\u306a\u71b1\u5206\u5e03\u3068\u6750\u6599\u306e\u7d14\u5ea6\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002 \u822a\u7a7a\u5b87\u5b99\u7528\u9014\u306f\u3001\u9ad8\u6e29\u3084\u8150\u98df\u6027\u74b0\u5883\u306b\u8010\u3048\u308b\u80fd\u529b\u306b\u4f9d\u5b58\u3057\u3066\u3044\u307e\u3059\u3002 \u9ad8\u6e29\u7089\u306f\u5316\u5b66\u53cd\u5fdc\u306b\u5bfe\u3059\u308b\u71b1\u5b89\u5b9a\u6027\u304a\u3088\u3073\u62b5\u6297\u306b\u3088\u308b\u91d1\u5c5e\u306e\u7cbe\u88fd\u304a\u3088\u3073\u6c34\u6676\u6210\u9577\u306e\u305f\u3081\u306e\u3053\u308c\u3089\u306e\u611f\u53d7\u6027\u88c5\u7f6e\u3092\u4f7f\u7528\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"Why is isostatic graphite preferred for TaC Coated Graphite Susceptors?\" data-line=\"269\">\u306a\u305c\u9759\u96fb\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306f\u3001TAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306b\u597d\u307e\u308c\u3066\u3044\u307e\u3059\u304b?<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"271\">Isostatic\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306f\u5747\u4e00\u5bc6\u5ea6\u304a\u3088\u3073\u826f\u3044\u7a40\u7269\u69cb\u9020\u3092\u63d0\u4f9b\u3057\u3001\u6a5f\u68b0\u5f37\u3055\u304a\u3088\u3073\u71b1\u5b89\u5b9a\u6027\u3092\u9ad8\u3081\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u7279\u6027\u306f\u5358\u4e00\u306e\u6c34\u6676\u6210\u9577\u304a\u3088\u3073MOCVD\u306e\u3088\u3046\u306a\u9ad8\u6027\u80fd\u306e\u9069\u7528\u306e\u305f\u3081\u306e\u305d\u308c\u306e\u512a\u79c0\u306a\u9078\u629e\u3092\u3057\u307e\u3059\u3002 \u305d\u306e\u4e00\u8cab\u3057\u305f\u54c1\u8cea\u306f\u3001\u91cd\u8981\u306a\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306e\u9593\u306b\u6b20\u9665\u306e\u5371\u967a\u6027\u3092\u6e1b\u3089\u3059\u3001\u4fe1\u983c\u3067\u304d\u308b\u6027\u80fd\u3092\u4fdd\u969c\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<blockquote data-line=\"273\">\n<p>&nbsp;<\/p>\n<p data-line=\"273\"><em>\u300c\u57fa\u8cea\u3068\u3057\u3066\u306e\u9759\u96fb\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u4f7f\u7528\u306f\u3001\u5148\u9032\u6280\u8853\u306b\u304a\u3051\u308bTAC\u88ab\u8986\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u8010\u4e45\u6027\u3068\u52b9\u7387\u6027\u3092\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002 \u30c4\u30a4\u30fc\u30c8<\/em><\/p>\n<p>&nbsp;<\/p>\n<\/blockquote>\n<p>&nbsp;<\/p>\n<h3 id=\"What challenges arise during the manufacturing of TaC Coated Graphite Susceptors?\" data-line=\"275\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u88fd\u9020\u4e2d\u306b\u767a\u751f\u3057\u305f\u8ab2\u984c\u306f\u4f55\u3067\u3059\u304b?<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"277\">1\u3064\u306e\u5927\u304d\u306a\u8ab2\u984c\u306f\u3001\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u3068TAC\u9593\u306e\u71b1\u81a8\u5f35\u306e\u9055\u3044\u306b\u3088\u308b\u71b1\u5fdc\u529b\u3092\u7ba1\u7406\u3057\u3066\u3044\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u30b9\u30c8\u30ec\u30b9\u306f\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5265\u96e2\u3084\u5272\u308c\u306b\u3064\u306a\u304c\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u30e1\u30fc\u30ab\u30fc\u306f\u3001\u30b0\u30e9\u30c7\u30fc\u30b7\u30e7\u30f3\u52a0\u71b1\u3084\u51b7\u5374\u306a\u3069\u306e\u6280\u8853\u3092\u4f7f\u7528\u3057\u3066\u3001\u4e2d\u9593\u30d0\u30c3\u30d5\u30a1\u5c64\u3092\u9069\u7528\u3057\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u539a\u3055\u3092\u6700\u9069\u5316\u3059\u308b\u3053\u3068\u306b\u3088\u3063\u3066\u3001\u3053\u306e\u554f\u984c\u306b\u5bfe\u51e6\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u65b9\u6cd5\u306f\u3001TAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5b8c\u5168\u6027\u3092\u78ba\u4fdd\u3057\u3001\u611f\u53d7\u6027\u304c\u6975\u7aef\u306a\u74b0\u5883\u3067\u78ba\u5b9f\u306b\u5b9f\u884c\u3067\u304d\u308b\u3088\u3046\u306b\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"How are TaC Coated Graphite Susceptors inspected for quality?\" data-line=\"279\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u54c1\u8cea\u306e\u305f\u3081\u306b\u691c\u67fb\u3059\u308b\u65b9\u6cd5?<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"281\">\u30e1\u30fc\u30ab\u30fc\u306f\u3001TAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u54c1\u8cea\u3092\u78ba\u4fdd\u3059\u308b\u305f\u3081\u306b\u5fb9\u5e95\u3057\u305f\u691c\u67fb\u3092\u5b9f\u65bd\u3057\u307e\u3059\u3002 \u8868\u9762\u5747\u4e00\u6027\u3092\u691c\u67fb\u3057\u3001\u4e80\u88c2\u3084\u6ce1\u306a\u3069\u306e\u6b20\u9665\u3092\u691c\u51fa\u3057\u307e\u3059\u3002 \u63a5\u7740\u8a66\u9a13\u3067\u306f\u3001TAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3068\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u57fa\u6750\u306e\u63a5\u5408\u5f37\u5ea6\u3092\u8a55\u4fa1\u3057\u307e\u3059\u3002 \u8010\u4e45\u6027\u8a66\u9a13\u306f\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u8010\u6469\u8017\u6027\u3001\u71b1\u5fdc\u529b\u3001\u5316\u5b66\u7684\u66b4\u9732\u306b\u5bfe\u3059\u308b\u8010\u6027\u3092\u8a55\u4fa1\u3059\u308b\u305f\u3081\u306b\u3001\u73fe\u5b9f\u7684\u306a\u6761\u4ef6\u3092\u30b7\u30df\u30e5\u30ec\u30fc\u30c8\u3057\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u53b3\u5bc6\u306a\u54c1\u8cea\u7ba1\u7406\u306f\u8981\u6c42\u3059\u308b\u9069\u7528\u306e\u4fe1\u983c\u3067\u304d\u308b\u6027\u80fd\u3092\u4fdd\u8a3c\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"What makes TaC Coated Graphite Susceptors suitable for semiconductor manufacturing?\" data-line=\"283\">\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u9069\u3057\u305fTAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306f?<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"285\">\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u71b1\u4f1d\u5c0e\u6027\u3068TAC\u306e\u8010\u85ac\u54c1\u6027\u306e\u7d44\u307f\u5408\u308f\u305b\u306b\u3088\u308a\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u6700\u9069\u3067\u3059\u3002 \u30a8\u30d4\u30bf\u30ad\u30b7\u306e\u3088\u3046\u306a\u8584\u819c\u5806\u7a4d\u30d7\u30ed\u30bb\u30b9\u306e\u6b20\u9665\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u5747\u4e00\u306a\u71b1\u5206\u5e03\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002 TaC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001SiC\u3084GaN\u306a\u3069\u306e\u6750\u6599\u306e\u7d14\u5ea6\u3092\u7dad\u6301\u3057\u3001\u6c5a\u67d3\u3092\u9632\u304e\u307e\u3059\u3002 \u3053\u308c\u3089\u306e\u7279\u6027\u306f\u3001LED\u3084\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306a\u3069\u306e\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u3067\u9ad8\u54c1\u8cea\u306a\u7d50\u679c\u3092\u4fdd\u8a3c\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"Can TaC Coated Graphite Susceptors be recycled?\" data-line=\"287\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u30ea\u30b5\u30a4\u30af\u30eb\u3067\u304d\u307e\u3059\u304b?<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"289\">\u306f\u3044\u3001TAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306f\u8907\u6570\u56de\u30ea\u30b5\u30a4\u30af\u30eb\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 TaC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u8010\u4e45\u6027\u306f\u3001\u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u304c\u9577\u671f\u4f7f\u7528\u5f8c\u306e\u69cb\u9020\u7684\u5b8c\u5168\u6027\u3068\u6027\u80fd\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002 \u305f\u3068\u3048\u3070\u3001TaC-coated crucibles\u306f\u3001\u6700\u5927200\u6642\u9593\u306e\u8010\u7528\u5e74\u6570\u3092\u9054\u6210\u3057\u3001\u9ad8\u6e29\u7528\u9014\u306e\u6301\u7d9a\u53ef\u80fd\u306a\u9078\u629e\u3092\u5b9f\u73fe\u3057\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"What is the market outlook for TaC Coated Graphite Susceptors?\" data-line=\"291\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30b0\u30e9\u30ca\u30a4\u30c8\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u5e02\u5834\u898b\u901a\u3057\u306f\u4f55\u3067\u3059\u304b?<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"293\">\u534a\u5c0e\u4f53\u88fd\u9020\u304a\u3088\u3073\u822a\u7a7a\u5b87\u5b99\u7523\u696d\u306e\u9700\u8981\u306e\u5897\u52a0\u306b\u3088\u3063\u3066\u904b\u8ee2\u3055\u308c\u308bTaC\u306e\u4e0a\u5857\u3092\u65bd\u3057\u3066\u3042\u308b\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8\u306e\u30b9\u30bb\u30d7\u30bf\u30fc\u306e\u305f\u3081\u306e\u5e02\u5834\u306f\u6210\u9577\u3057\u7d9a\u3051\u307e\u3059\u3002 MOCVD\u3084\u5358\u7d50\u6676\u6210\u9577\u306a\u3069\u306e\u6280\u8853\u304c\u9032\u3080\u306b\u3064\u308c\u3066\u3001\u512a\u308c\u305f\u71b1\u30fb\u5316\u5b66\u7684\u7279\u6027\u3092\u6301\u3064\u9ad8\u6027\u80fd\u306a\u611f\u53d7\u6027\u306e\u5fc5\u8981\u6027\u304c\u9ad8\u307e\u308a\u307e\u3059\u3002 \u3053\u306e\u6210\u9577\u306f\u3001\u3053\u308c\u3089\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u304c\u6700\u5148\u7aef\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u518d\u751f\u3059\u308b\u91cd\u8981\u306a\u5f79\u5272\u3092\u53cd\u6620\u3057\u3066\u3044\u307e\u3059.<\/p>\n<p>&nbsp;<\/p>\n<h3 id=\"How do TaC Coated Guide Rings differ from other TaC-coated components?\" data-line=\"295\">TaC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30ac\u30a4\u30c9\u30ea\u30f3\u30b0\u306f\u3001\u4ed6\u306eTAC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3055\u308c\u305f\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3068\u3069\u306e\u3088\u3046\u306b\u7570\u306a\u308b\u306e\u3067\u3059\u304b?<\/h3>\n<p>&nbsp;<\/p>\n<p data-line=\"297\">\u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30ac\u30a4\u30c9 \u30ea\u30f3\u30b0\u306f\u9ad8\u6e29\u304a\u3088\u3073\u8150\u98df\u6027\u306e\u74b0\u5883\u306e\u305f\u3081\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u308b\u5c02\u9580\u306b\u3055\u308c\u305f\u90e8\u54c1\u3067\u3059\u3002 \u6c4e\u7528\u306eTaC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u90e8\u54c1\u3068\u306f\u7570\u306a\u308a\u3001\u30ac\u30a4\u30c9\u30ea\u30f3\u30b0\u306f\u3001\u7279\u5b9a\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u8981\u4ef6\u3092\u6e80\u305f\u3059\u305f\u3081\u306b\u3001\u7cbe\u5bc6\u306a\u5bf8\u6cd5\u3068\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3055\u308c\u305f\u8a2d\u8a08\u3092\u7279\u5fb4\u3068\u3057\u3066\u3044\u307e\u3059\u3002 \u30bf\u30c3\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u8010\u6469\u8017\u6027\u3068\u71b1\u5b89\u5b9a\u6027\u3092\u9ad8\u3081\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u7d50\u6676\u6210\u9577\u3084\u6750\u6599\u306e\u53d6\u308a\u6271\u3044\u306a\u3069\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u4e0d\u53ef\u6b20\u3067\u3059.<\/p>\n<p data-line=\"297\">&nbsp;<\/p>\n<p data-line=\"297\">\u88fd\u54c1\u306e\u8a73\u7d30\u306b\u3064\u3044\u3066\u306f\u3001\u4e0b\u8a18\u307e\u3067\u304a\u554f\u3044\u5408\u308f\u305b\u304f\u3060\u3055\u3044\u3002 <a href=\"mailto:steven@china-vet.com\">steven@china-vet.com<\/a>&nbsp; \u307e\u305f\u306f\u30a6\u30a7\u30d6\u30b5\u30a4\u30c8\uff1a <a href=\"https:\/\/www.vet-china.com\" target=\"_blank\" rel=\"noopener\">www.vet-china.com<\/a>.&nbsp;<\/p>\n<p data-line=\"297\"><img decoding=\"async\" src=\"http:\/\/weitai1.globaldeepsea.site\/wp-content\/uploads\/2025\/01\/mceclip18-2.png\"><\/p>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>TaC Coated Graphite Susceptors are made by coating high-purity graphite with TaC using methods like CVD, enhancing durability, thermal stability, and chemical resistance.<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[107],"tags":[178,177,183,184,176,108,109],"class_list":["post-856","post","type-post","status-publish","format-standard","hentry","category-blog","tag-tac-coated-graphite-guide-ring","tag-tac-coated-graphite-ring","tag-tac-coated-graphite-susceptor","tag-tac-coated-guide-ring","tag-tac-coated-ring","tag-tac-coating","tag-tac-coatingsic-coating"],"_links":{"self":[{"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/posts\/856","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/comments?post=856"}],"version-history":[{"count":0,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/posts\/856\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/media?parent=856"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/categories?post=856"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cnvetenergy.com\/ja\/wp-json\/wp\/v2\/tags?post=856"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}