반도체 공정에서 TAC 코팅 척의 용도
TAC coating chucks, featuring a specialized tic tac coating made from Tantalum Carbide, are essential tools in semiconductor processing. These chucks provide outstanding thermal stability and chemical resistance, making them perfect for wafer handling, etching, and deposition tasks. Their capability to maintain vacuum integrity significantly reduces contamination risks. By improving precision and efficiency, they enhance […]
