Silicon Carbide SiC Diffusion Process Tube

Silicon Carbide Diffusion Furnace Tubes are key components used in semiconductor, high-temperature heat treatment, and material preparation processes. They are primarily used as the support and reaction chamber for diffusion furnaces or oxidation furnaces, performing processes such as atmospheric reaction, oxidation, diffusion, and annealing in high-temperature, highly corrosive environments.
VET Energy specializes in the design and manufacturing of silicon carbide (SiC) tubes for high-temperature and corrosive semiconductor applications.With advanced production facilities and proprietary CVD and sintering technologies, we deliver tubes that feature excellent thermal stability, oxidation resistance, and long service life.

Key advantages of VET Energy’s SiC tubes:
High-temperature resistance: SiC is known for its ability to withstand extreme temperatures, making it suitable for high-temperature processes without performance degradation.
Corrosion resistance: The material is naturally resistant to many corrosive substances, including strong acids and oxidizing environments, which extends the product’s life in harsh chemical applications.
Ultra-high purity: VET Energy uses a special sintering process to produce tubes with very low levels of harmful metal impurities, ensuring minimal contamination in sensitive semiconductor processes.
Enhanced durability: The SiC coating enhances the durability of the underlying substrate, protecting it from oxidation and increasing its lifespan compared to standard materials.
Superior thermal conductivity: SiC has high thermal conductivity, which leads to even heat distribution, reduced energy consumption, and improved performance efficiency.
Thermal shock resistance: SiC tubes are resistant to thermal shock, making them reliable in applications with sudden temperature changes, which prevents breakage and minimizes downtime. 

Silicon carbide (SiC) tubes are widely used in high-temperature furnace components, heat exchangers, thermocouple protection, and corrosion-resistant piping for chemical and industrial applications. Their exceptional strength and stability at extreme temperatures make them ideal for demanding industries like metallurgy, power, semiconductors, aerospace, and oil drilling.

VET Energy specializes in R&D and manufacturing of advanced materials like graphite, silicon carbide, and quartz, along with treatments such as SiC, TaC, glassy carbon, and pyrolytic carbon coatings. Our products are widely applied in industries like photovoltaics, semiconductors, new energy, and metallurgy.