SiC-Schichtträger für RTP/RTA

VET Energy SiC Coating Carrier For RTP/RTA is a high-performance product designed to provide consistent and reliable performance over an extended period. It has super good heat resistance and thermal uniformity, high purity, erosion resistance, making it the perfect solution for wafer processing applications.

 

Silicon carbide is an advanced ceramic material with excellent properties such as high strength, hardness, temperature resistance, thermal conductivity, and chemical corrosion resistance. It is widely used in industries like oil mining, chemicals, machinery, aerospace, nuclear energy, and military applications. We can provide customized designs for applications like seal rings, valves, and protective armor with high quality and reasonable delivery times.

SiC-Schichtträger für RTP/RTA is a key component used in the semiconductor manufacturing processes called Rapid Thermal Processing & Annealing, we use our patented technology to make the silicon carbide carrier with extremely high purity, good coating uniformity and an excellent service life, as well as high chemical resistance and thermal stability properties.

Merkmale unserer Produkte:

1. Hohe Temperatur Oxidationsbeständigkeit bis zu 1700℃.
2. High purity and thermal uniformity
3. Ausgezeichnete Korrosionsbeständigkeit: Säure, Alkali, Salz und organische Reagenzien.
4. Hohe Härte, kompakte Oberfläche, feine Partikel.
5. Längere Lebensdauer und mehr haltbar

VET Energy is a manufacturer specializing in customized graphite and silicon carbide products with various coatings, including SiC, TaC, glassy carbon, and pyrolytic carbon. We supply tailored parts for the semiconductor and photovoltaic industries. Backed by experts from top domestic research institutions, we offer professional material solutions and patented technology for stronger, more durable coatings.

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