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Glassy carbon offers exceptional high-temperature resistance, excellent chemical stability, and high purity, making it widely used in fields like metallurgy, ceramics, chemicals, and semiconductors.

VET Energy focuses on the research and production of high-purity graphite barrel susceptor, through independent CVD coating technology, the susceptor combines the high thermal conductivity of graphite with the oxidation resistance of SiC, and can operate stably at high temperatures of 1600 ℃, with a lifespan increase of more than three times.

High-purity CVD SiC raw material, prepared via CVD, is ideal for silicon carbide crystal growth through physical vapor transport. Supplied by VET Energy, it boasts higher density than small particles formed by spontaneous combustion of Si and C-containing gases. It requires no dedicated sintering furnace, offers a stable evaporation rate, and enables the growth of high-quality SiC single crystals. We look forward to your inquiry!

Continuous wafer boats are advanced semiconductor processing equipment. Their carefully designed structure ensures efficient processing and production of precision wafers. VET China offers customized product solutions and welcomes your inquiries.

This article analyzes the quality of thin films grown at various process temperatures during CVD SiC coating preparation to determine the optimal temperature. Using graphite as the substrate and trichloromethylsilane (MTS) as the reaction gas, the low-pressure CVD process deposits the SiC coating, with its micromorphology observed via scanning electron microscopy to assess structural density.