The Problem with Standard Coatings
Most coatings start to break down or “peel” when temperatures exceed 1600°C. In nitrogen-rich processes, this leads to:
Contamination of the wafer.
Frequent replacement of parts.
Higher production costs.
The TaC Solution
TaC is a “super-ceramic” with a melting point of 3880°C. Here is why it lasts longer in your reactor:
Extreme Heat Resistance: It stays solid and stable far beyond the point where SiC coatings fail.
Nitrogen Shield: TaC is chemically “lazy”—it doesn’t react with nitrogen. This prevents the coating from pitting or eroding over time.
Perfect Match: It expands and contracts at the same rate as graphite, meaning no cracks during fast heating and cooling.
The Result: Lower Costs, Better Yields
By switching to TaC-coated parts, our clients see:
2x to 3x longer part life.
Less downtime for maintenance.
Cleaner wafers and higher success rates.
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